Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
US-11506295-B2 · Nov 22, 2022 · US
Fluid control valve
US12578024B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12578024-B2 |
| Application number | US-202418766737-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 9, 2024 |
| Priority date | Jul 18, 2023 |
| Publication date | Mar 17, 2026 |
| Grant date | Mar 17, 2026 |
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- Title
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Abstract
Official abstract text for this publication.
A fluid control valve includes a pressing member, a diaphragm member, and a valve seat. The pressing member presses and deforms the diaphragm member into contact with the valve seat. The valve seat includes a first annular valve seat made of fluorine resin and a second annular valve seat made of heat-resistant resin, which are arranged concentrically adjacent to each other. The heat-resistant resin has a higher deflection temperature under load at 1.82 MPa than the fluorine resin, measured according to ASTM D-648.
First claim
Opening claim text (preview).
What is claimed is: 1 . A fluid control valve comprising: a pressing member; a diaphragm member; a valve chamber; and a valve seat provided in the valve chamber, the fluid control valve being configured to press and deform the diaphragm member by the pressing member to bring the diaphragm member into contact with the valve seat, wherein the valve seat includes a first annular valve seat made of fluorine resin and a second annular valve seat made of heat-resistant resin…
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Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
Mechanical Engineering · mapped topic
Electricity · mapped topic
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- What does patent US12578024B2 cover?
- A fluid control valve includes a pressing member, a diaphragm member, and a valve seat. The pressing member presses and deforms the diaphragm member into contact with the valve seat. The valve seat includes a first annular valve seat made of fluorine resin and a second annular valve seat made of heat-resistant resin, which are arranged concentrically adjacent to each other. The heat-resistant r…
- Who is the assignee on this patent?
- Ckd Corp
- What technology area does this patent fall under?
- Primary CPC classification F16K7/14. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Mar 17 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 9 related publications on this page (citations in our corpus or others sharing the same primary CPC).