Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

Patent metadata

Field	Value
Publication number	US-12577952-B2
Application number	US-202318508671-A
Country	US
Kind code	B2
Filing date	Nov 14, 2023
Priority date	Mar 17, 2017
Publication date	Mar 17, 2026
Grant date	Mar 17, 2026

Abstract

An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.

First claim

The invention claimed is:

1 . A target vacuum pump criterion data determination apparatus, comprising:
one or more processors; and one or more memories coupled to the one or more processors, the one or more memories having instructions stored thereon which, when executed by the one or more processors, cause the criterion data determination apparatus to: access a storage device configured to store abnormality data, the abnormality data being detected in data of a state quantity from a continuously operable vacuum pump for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, wherein the abnormality data being from the continuously operable vacuum pump that is different from a target vacuum pump; determine a criterion data for judging an operation of the target vacuum pump during the operation of the target vacuum pump based on the abnormality data of the continuously operable vacuum pump for the predetermined period based on the set time, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus; acquire, during operation of the target vacuum pump, a state quantity comprising sensor data used in the target vacuum pump; compare the state quantity of the operating target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufacturing process; and perform a control to issue a notification to cause the operation of the target vacuum pump to stop or to continue the operation of the target vacuum pump according to the comparison result.

2 . The criterion data determination apparatus according to claim 1 ,
wherein the one or more processors determine the criterion data for each attribute of a vacuum pump.

3 . The apparatus of claim 1 , wherein the sensor data comprises one or more of: a driving current of a motor included in the target vacuum pump, a rotation speed of the motor, a pressure in the vacuum pump, a temperature of the vacuum pump, or a vibration of the vacuum pump, and wherein the apparatus comprises an input unit connected to one or more sensors selected from the group consisting of: an inverter, a pressure gauge, a temperature sensor, and a vibration sensor, the input unit being configured to receive the sensor data from the target vacuum pump during operation.

4 . A criterion data determination method, comprising:
accessing a storage device configured to store abnormality data, the abnormality data being detected in data of a state quantity for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, wherein the abnormality data being from the continuously operable vacuum pump that is different from a target vacuum pump; determining a criterion data for judging an operation of the target vacuum pump based on the abnormality data of the continuously operable vacuum pump for a predetermined period based on the set time, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus; acquiring, during operation of the target vacuum pump, a state quantity comprising sensor data received from the target vacuum pump; comparing the state quantity of the target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufacturing process; and performing a control to issue a notification to cause the operation of the target vacuum pump to stop or to continue the operation of the vacuum pump according to the comparison result.

5 . The apparatus of claim 4 , wherein the sensor data comprises one or more of: a driving current of a motor included in the target vacuum pump, a rotation speed of the motor, a pressure in the vacuum pump, a temperature of the vacuum pump, or a vibration of the vacuum pump, and wherein the apparatus comprises an input unit connected to one or more sensors selected from the group consisting of: an inverter, a pressure gauge, a temperature sensor, and a vibration sensor, the input unit being configured to receive the sensor data from the target vacuum pump during operation.

6 . A non-transitory computer readable recording medium storing a program that upon execution on a computer to cause a system at least to:
access a storage device configured to store criterion data, the criterion data being indicative of judging a failure arrival possibility based on an abnormality data detected in data of a state quantity for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, wherein the abnormality data being from the continuously operable vacuum pump that is different from a target vacuum pump, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus; acquire, during operation of the target vacuum pump, a state quantity comprising sensor data received from the target vacuum pump; compare a tendency of an abnormality data detected from data of a state quantity of an operating target vacuum pump with the criterion data stored in the storage device, and output the comparison result; compare the state quantity of the operating target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufacturing process; and perform a control to issue a notification to cause the operation of the target vacuum pump to stop or to continue the operation of the vacuum pump according to the comparison result.

7 . The apparatus of claim 6 , wherein the sensor data comprises one or more of: a driving current of a motor included in the target vacuum pump, a rotation speed of the motor, a pressure in the vacuum pump, a temperature of the vacuum pump, or a vibration of the vacuum pump, and wherein the apparatus comprises an input unit connected to one or more sensors selected from the group consisting of: an inverter, a pressure gauge, a temperature sensor, and a vibration sensor, the input unit being configured to receive the sensor data from the target vacuum pump during operation.

8 . A non-transitory computer readable recording medium storing a program that upon execution causes a computer to cause a system at least to:
access a storage device configured to store abnormality data, the abnormality data being detected in data of a state quantity for a predetermined period, the predetermined period based on a set time of a continuously operable vacuum pump after the set time has passed since it was operated, the continuously operable vacuum pump being different from a target vacuum pump; determine a criterion data for judging a failure arrival possibility of the target vacuum pump based on the abnormality data of the continuously operable vacuum pump for a predetermined period based on the set time, the criterion data comprising a parameter related to the abnormality data, wherein the criterion data is determined, stored, and applied for each manufacturing process of a semiconductor manufacturing apparatus; acquire, during operation of the target vacuum pump, a state quantity comprising sensor data received from the target vacuum pump; compare the state quantity of the operating target vacuum pump with a statistical quantity of the criterion data based on the semiconductor manufact

Assignees

• Ebara Corp

Inventors

• Maishigi Keiji
• Sugiura Tetsuro
• Usui Katsuaki
• Hatakeyama Masahiro
• Honma Chikako
• Osuga Toru
• Iwasaki Koichi
• Lin jie yuan

Classifications

• G06F17/18

  for evaluating statistical data {, e.g. average values, frequency distributions, probability functions, regression analysis (forecasting specially adapted for a specific administrative, business or logistic context G06Q10/04)} · CPC title

• G06F9/542

  Event management; Broadcasting; Multicasting; Notifications · CPC title

• F04D27/001

  Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring · CPC title

• Y02P90/02

  Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS] · CPC title

• G05B19/418

  Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] · CPC title