Method and apparatus for forming layer, metal oxide transistor and fabrication method thereof
US-2019112704-A1 · Apr 18, 2019 · US
US12577656B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12577656-B2 |
| Application number | US-202118010978-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 18, 2021 |
| Priority date | Jun 18, 2020 |
| Publication date | Mar 17, 2026 |
| Grant date | Mar 17, 2026 |
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Thermally insulating materials (TIMs) for use in concentrated solar thermal (CST) technologies comprising a mesoporous oxide including a porous oxide matrix comprising a porous oxide and a metal oxide or metal nitride in the form of a conformal layer of the metal oxide or metal nitride on the surface of the porous oxide matrix, wherein the conformal layer completely covers the surface area of the porous oxide matrix, or in the form of metal oxide or metal nitride nanoparticles dispersed throughout the porous oxide matrix, or in the form of a conformal coating or nanoparticles, methods of preparing same, and solar devices comprising same.
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What is claimed: 1 . A mesoporous oxide comprising: a porous oxide matrix comprising a porous oxide and having a surface area; and a metal oxide or metal nitride in the form of a conformal layer of the metal oxide or metal nitride on the surface of the porous oxide matrix, wherein the mesoporous oxide has a thickness in a range of about 0.5 mm to about 15 cm, the mesoporous oxide is amorphous, the conformal layer completely covers the surface area of the porous oxide matrix through a thickness of the porous oxide matrix, and wherein when the conformal layer comprises the metal oxide, the porous oxide is not the same as the metal oxide. 2 . The mesoporous oxide of claim 1 , wherein the porous oxide comprises a transparent porous oxide. 3 . The mesoporous oxide of claim 1 , wherein the porous oxide comprises silicon dioxide (SiO 2 ), aluminum oxide (Al 2 O 3 ), chromium oxide (Cr 2 O 3 ), tin dioxide (SnO 2 ), sodium oxide (Na 2 O), calcium oxide (CaO), lithium oxide (Li 2 O), magnesium oxide (MgO), zinc oxide (ZnO), manganese oxide (MnO), cobalt oxide (CoO) or a combination thereof. 4 . The mesoporous oxide of claim 1 , wherein the metal oxide or metal nitride comprises a transparent semiconductor or transparent conductor. 5 . The mesoporous oxide of claim 1 , wherein the metal oxide or metal nitride comprises aluminum oxide (Al 2 O 3 ), indium oxide (In 2 O 3 ), zinc oxide (ZnO), titanium dioxide (TiO 2 ), titanium oxide (Ti 2 O 3 ), titanium nitride (TIN), tin dioxide (SnO 2 ), magnesium oxide (MgO), calcium oxide (CaO), hafnium dioxide (HfO 2 ), zirconium dioxide (ZrO 2 ), or a combination thereof. 6 . The mesoporous oxide of claim 1 , further comprising a mixed oxide material disposed between the porous oxide matrix and the metal oxide or metal nitride layer and comprising at least a portion of the porous oxide and at least a portion of the metal oxide. 7 . The mesoporous oxide of claim 6 , wherein the mixed oxide material comprises an amorphous ternary aluminum-silicon oxide material. 8 . The mesoporous oxide of claim 1 , further comprising metal oxide or metal nitride nanoparticles dispersed within the porous oxide matrix. 9 . The mesoporous oxide of claim 8 , wherein the volume fraction of the metal oxide or metal nitride nanoparticles in the mesoporous oxide is in a range of about 0.002% to about 5%, based on the total volume of the mesoporous oxide. 10 . The mesoporous oxide of claim 8 , wherein the metal oxide or metal nitride nanoparticles comprise an electrically transparent conductive oxide (TCO) material, an electrically transparent semiconductive oxide material, or a combination thereof. 11 . The mesoporous oxide of claim 8 , wherein the metal oxide or metal nitride nanoparticles have a localized surface plasmon absorption resonance at a wavelength in a range of about 2 to about 8 microns. 12 . The mesoporous oxide of claim 1 , having a porosity of about 30% to about 97%. 13 . The mesoporous oxide of claim 1 , having a Rosseland weighted absorption coefficient of about at least about 1 cm −1 . 14 . The mesoporous oxide of claim 1 , having a solar-weighted transmittance in a range of about 65% to about 99% over the AM1.5D standard spectrum. 15 . The mesoporous oxide of claim 1 having a density of about 550 kg/m 3 or less. 16 . The mesoporous oxide of claim 1 , wherein the effective thermal emittance values arev about 0.3 to about 0.1 over a range of temperatures of about 550° C. to 700° C., as determined by the Heat Flux test. 17 . A solar receiver, comprising: a solar absorber layer; a window layer; and a mesoporous oxide layer disposed between the solar absorber layer and the window layer, the mesoporous oxide layer comprising a porous oxide matrix and a metal oxide or a metal nitride, wherein the metal oxide or metal nitride is (1) in the form of a conformal layer of the metal oxide or metal nitride on the surface of the porous oxide matrix and the conformal layer completely covers the porous oxide through a thickness of the matrix, (2) in the form of metal oxide or metal nitride nanoparticles distributed throughout the porous oxide matrix, or (3) a combination of (1) and (2), wherein the mesoporous oxide layer is amorphous, and wherein when the conformal layer comprises the metal oxide, the porous oxide is not the same as the metal oxide.
Oxides · CPC title
characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations · CPC title
of aluminium, magnesium or beryllium · CPC title
characterised by means for preventing heat loss · CPC title
characterised by the material (for preventing heat loss F24S80/56) · CPC title
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