Transport apparatus and adapter pendant

Patent metadata

Field	Value
Publication number	US-12575375-B2
Application number	US-202318329622-A
Country	US
Kind code	B2
Filing date	Jun 6, 2023
Priority date	Jul 11, 2017
Publication date	Mar 10, 2026
Grant date	Mar 10, 2026

Abstract

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

First claim

What is claimed is:

1 . A semiconductor process transport apparatus comprising:
a drive section with at least one motor; an articulated arm coupled to the drive section for driving articulation motion of the articulated arm; a machine controller operably coupled to the drive section so as to control the at least one motor for moving the articulated arm from one location to a different other location; and an adapter pendant having a machine controller interface operably coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, different from the machine controller interface and configured for operably connecting with a fungible smart mobile device having predetermined resident user operable device functionality characteristics resident on the fungible smart mobile device; wherein the another interface has a connectivity configuration that communicates with at least one of the resident user operable device functionality characteristics of the fungible smart mobile device coupled with the another interface and defines a motion control input/output to the machine controller for motion control of the articulated arm from the one location to the other location, and wherein the adapter pendant has a three-position live man switch.

2 . The semiconductor process transport apparatus of claim 1 , wherein configuration of the at least one of the resident user operable device functionality characteristics is automatically enabled upon user initialization of the fungible smart mobile device mated to the adapter pendant.

3 . The semiconductor process transport apparatus of claim 1 , wherein the connectivity configuration is a plug and play connectivity configuration, and is at least one of a short or near field radio frequency coupling and a universal serial bus port coupling.

4 . The semiconductor process transport apparatus of claim 1 , wherein the input/output, to the machine controller, defined by the at least one of the resident user operable device functionality characteristics has an arrangement that embodies a motion teaching control for effecting teaching the machine controller motion control of the articulated arm from the one location to the other location.

5 . The semiconductor process transport apparatus of claim 1 , wherein the resident user operable device functionality characteristics includes a graphical user interface of the fungible smart mobile device that is configured to define a motion teaching control input/output interface for effecting teaching the machine controller motion control of the articulated arm from the one location to the other location.

6 . The semiconductor process transport apparatus of claim 1 , wherein the adapter pendant includes one or more of an integral emergency stop switch or emergency machine off switch or emergency system off switch.

7 . The semiconductor process transport apparatus of claim 1 , wherein the connectivity configuration of the another interface is disposed so that mating of the fungible smart mobile device with the another interface initializes a lockout, or limited access/functionality, of at least another predetermined resident user operable functionality characteristic on the fungible smart mobile device.

8 . The semiconductor process transport apparatus of claim 1 , wherein at least one of the one location and the other location is a workpiece holding station in a semiconductor processing apparatus.

9 . The semiconductor process transport apparatus of claim 1 , wherein the adapter pendant includes an integral mode selector switch.

10 . The semiconductor process transport apparatus of claim 1 , wherein the three-position live man switch is an off-on-off switch.

11 . A method comprising:
providing an articulated arm coupled to a drive section for driving articulation motion of the articulated arm, the drive section having at least one motor; operably coupling a machine controller to the drive section so as to control the at least one motor for moving the articulated arm from one location to a different other location; and operably coupling, for input/output, an adapter pendant to the machine controller with a machine controller interface of the adapter pendant, the adapter pendant having another interface, different from the machine controller interface and configured for operably connecting with a fungible smart mobile device having predetermined resident user operable device functionality characteristics resident on the fungible smart mobile device; wherein the another interface has a connectivity configuration that communicates with at least one of the resident user operable device functionality characteristics of the fungible smart mobile device coupled with the another interface and defines a motion control input/output to the machine controller for motion control of the articulated arm from the one location to the other location, and wherein the adapter pendant has a three-position live man switch.

12 . The method of claim 11 , further comprising automatically enabling configuration of the at least one of the resident user operable device functionality characteristics upon user initialization of the fungible smart mobile device mated to the adapter pendant.

13 . The method of claim 11 , wherein the input/output, to the machine controller, defined by the at least one of the resident user operable device functionality characteristics has an arrangement that embodies a motion teaching control for effecting teaching the machine controller motion control of the articulated arm from the one location to the other location.

14 . The method of claim 11 , wherein the resident user operable device functionality characteristics includes a graphical user interface of the fungible smart mobile device, the method further comprising defining, with the graphical user interface, a motion teaching control input/output interface for effecting teaching the machine controller motion control of the articulated arm from the one location to the other location.

15 . The method of claim 11 , wherein the connectivity configuration of the another interface is disposed so that mating of the fungible smart mobile device with the another interface initializes a lockout, or limited access/functionality, of at least another predetermined resident user operable functionality characteristic on the fungible smart mobile device.

16 . The method of claim 11 , wherein at least one of the one location and the other location is a workpiece holding station in a semiconductor processing apparatus.

17 . The method of claim 11 , wherein the adapter pendant includes an integral mode selector switch.

18 . The method of claim 11 , wherein the three-position live man switch is an off-on-off switch.

Assignees

• Brooks Automation Us Llc

Inventors

• Atwood Dana L
• Moura Jairo

Classifications

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title