Production method for patterned organic film, production apparatus for patterned organic film, organic semiconductor device produced by same, and integrated circuit including organic semiconductor device

Patent metadata

Field	Value
Publication number	US-12575309-B2
Application number	US-202117905941-A
Country	US
Kind code	B2
Filing date	Mar 10, 2021
Priority date	Mar 10, 2020
Publication date	Mar 10, 2026
Grant date	Mar 10, 2026

Abstract

A method for producing a patterned organic film includes: forming a hydrophobic organic film on a hydrophilic and non-water-soluble first substrate using a coating method, pressing the organic film formed on the first substrate against a convex portion of a stamp having the convex portion and a concave portion, transferring the organic film to the convex portion by applying water or an aqueous solution to an interface between the first substrate and the organic film, and pressing the organic film transferred to the convex portion against a second substrate to transfer the organic film to the second substrate to obtain a patterned organic film, wherein at least one of the organic film and the second substrate is an organic semiconductor.

First claim

The invention claimed is:

1 . A method for producing a patterned organic film, comprising:
forming a hydrophobic organic film on a hydrophilic and non-water-soluble first substrate using a coating method, pressing the organic film formed on the first substrate against a convex portion of a stamp having the convex portion and a concave portion, transferring the organic film to the convex portion by applying water or an aqueous solution to an interface between the first substrate and the organic film, and pressing the organic film transferred to the convex portion against a second substrate to transfer the organic film to the second substrate to obtain a patterned organic film, wherein at least one of the organic film and the second substrate is an organic semiconductor.

2 . The method according to claim 1 , wherein a distance between an uppermost portion of the convex portion and a lowest portion of the concave portion is 2 to 100 μm.

3 . The method according to claim 1 , wherein the patterned organic film comprises 10 or more organic films, each organic film has a thickness of 2 nm or more, a width of 500 nm or more, and a length of 500 nm or more, and a distance between adjacent organic films is 1 μm or more.

4 . An apparatus for producing a patterned organic film, comprising:
a stamp disposing part configured to dispose a stamp having a convex portion and a concave portion, a first substrate disposing part configured to dispose a hydrophilic and non-water-soluble first substrate having an organic film on a surface of the first substrate, a second substrate disposing part configured to dispose a second substrate, a first driving part configured to move at least one of the first substrate and the stamp so as to press the organic film on the first substrate against the convex portion of the stamp to dispose the organic film on the convex portion and to separate the first substrate from the organic film disposed on the convex portion, a first control part configured to control a force of pressing the organic film on the first substrate against the convex portion of the stamp, a supply part of water or aqueous solution configured to supply the water or aqueous solution to an interface between the organic film and the first substrate, a second driving part configured to move at least one of the stamp and the second substrate so as to press the organic film disposed on the convex portion of the stamp against the second substrate to dispose the patterned organic film on the second substrate and to separate the stamp from the patterned organic film disposed on the second substrate, and a second control part configured to control a force of pressing the organic film disposed on the convex portion of the stamp against the second substrate.

5 . The apparatus according to claim 4 , wherein the first control part is configured to control a distribution of the force of pressing the organic film in a plane of the organic film when the organic film is pressed against the convex portion.

6 . The apparatus according to claim 4 , wherein the second control part is configured to control a distribution of the force of pressing the organic film in a plane of the organic film when the organic film is pressed against the second substrate.

7 . The apparatus according to claim 4 , wherein the apparatus comprises an amount adjusting part configured to be able to adjust the amount of the water or aqueous solution supplied by the supply part of the water or aqueous solution.

8 . The apparatus according to claim 4 , wherein the apparatus comprises a supply position adjusting part capable of recognizing a position of the interface for supplying the water or aqueous solution, and adjusting the position of the water or aqueous solution supplied by the supply part of the water or aqueous solution.

9 . The apparatus according to claim 4 , wherein the apparatus comprises a first alignment part controlling a position at which the organic film on the first substrate is pressed against the convex portion of the stamp.

10 . The apparatus according to claim 4 , wherein the apparatus comprises a second alignment part controlling a position at which the organic film on the convex portion of the stamp is pressed against the second substrate.

Assignees

• Univ Tokyo

Inventors

• Takeya Junichi
• Watanabe Shunichiro
• Sasaki Mari
• Makita Tatsuyuki

Classifications

• H10K71/80

  using temporary substrates · CPC title

• H10K10/474

  the gate dielectric comprising a multilayered structure · CPC title

• H10K10/464

  Lateral top-gate IGFETs comprising only a single gate · CPC title

• H10K10/466

  Lateral bottom-gate IGFETs comprising only a single gate · CPC title

• H10K10/471

  the gate dielectric comprising only organic materials · CPC title