Apparatus for manufacturing display processing mask and method of manufacturing display processing mask using the same

Patent metadata

Field	Value
Publication number	US-12569945-B2
Application number	US-202217729463-A
Country	US
Kind code	B2
Filing date	Apr 26, 2022
Priority date	Aug 27, 2021
Publication date	Mar 10, 2026
Grant date	Mar 10, 2026

Abstract

A display processing mask manufacturing apparatus includes a stage, a clamp arranged outside the stage, and a chuck configured to move in a direction and arranged above the stage. The clamp includes a first clamp and a second clamp spaced apart from the first clamp in a first direction and arranged at a position opposite to a position of the first clamp with respect to the stage, and the chuck includes a first chuck and a second chuck spaced apart from the first chuck in a second direction crossing the first direction.

First claim

What is claimed is:

1 . An apparatus for manufacturing a display processing mask, the apparatus comprising:
a stage; a clamp arranged outside the stage; and a chuck configured to move in a direction and arranged above the stage, wherein the clamp comprises: a first clamp pulling a first wing of the display processing mask; and a second clamp spaced apart from the first clamp in a first direction and arranged at a position opposite to a position of the first clamp with respect to the stage and pulling a second wing of the display processing mask, the second wing being spaced apart from the first wing in the first direction, and wherein the chuck comprises: a first chuck adsorbing a third wing of the display processing mask using a vacuum pressure to pull the third wing; and a second chuck spaced apart from the first chuck in a second direction crossing the first direction and adsorbing a fourth wing of the display processing mask using a vacuum pressure to pull the fourth wing in the second direction, the fourth wing being spaced apart from the third wing in the second direction, at least one of the first chuck or the second chuck being movable in the second direction or a direction opposite to the second direction so as to pull and tension the display processing mask while at least one of the first clamp or the second clamp pulls the display processing mask in the first direction.

2 . The apparatus of claim 1 , wherein the stage comprises a fixing unit to selectively fix a fixing stick on the stage.

3 . The apparatus of claim 2 , wherein the fixing unit comprises at least one of a magnet to magnetically couple the fixing stick on the stage, a vacuum hole to vacuum adsorb the fixing stick on the stage, and an electrostatic chuck to fix the fixing stick on the stage using an electrostatic force.

4 . The apparatus of claim 2 , wherein the fixing unit is provided in plural, each of the fixing units extends in the first direction, and the fixing units are spaced apart from each other in the second direction.

5 . The apparatus of claim 1 , wherein the chuck further comprises a vacuum pump, the first chuck comprises an adsorption body, and the adsorption body comprises:
a vacuum pressure distribution space defined in the adsorption body and connected to the vacuum pump; and an adsorption hole extending downward from the vacuum pressure distribution space and connected to a lower surface of the adsorption body, wherein the adsorption hole is provided in plural, and the adsorption holes are spaced apart from each other in a horizontal direction.

6 . The apparatus of claim 1 , further comprising:
a welding laser unit to weld the fixing stick on the stage to a process mask arranged on the fixing stick; and a cutting laser unit to cut a portion of the process mask.

7 . The apparatus of claim 1 , further comprising a gantry, wherein each of the first chuck and the second chuck is provided in plural, the first chucks are spaced apart from each other in the first direction, the second chucks are spaced apart from each other in the first direction, and the gantry moves the first chucks and the second chucks.

8 . The apparatus of claim 1 , further comprising a clamp driver, wherein each of the first clamp and the second clamp is provided in plural, the first clamps are spaced apart from each other in the second direction, the second clamps are spaced apart from each other in the second direction, and the clamp driver moves the first clamps and the second clamps.

9 . An apparatus for manufacturing a display processing mask, the apparatus comprising:
a support body; a pair of clamps arranged above the support body; and a pair of chucks arranged above the support body, wherein the clamps are spaced apart from each other in a horizontal direction and pulling each of wings of the display processing mask, and the chucks are spaced apart from each other in a horizontal direction perpendicular to the horizontal direction in which the clamps are spaced apart from each other and pulling each of wings of the display processing mask, at least one of the pair of chucks being movable in the horizontal direction in which the chucks are spaced apart from each other or a direction opposite to the horizontal direction in which the chucks are spaced apart from each other so as to pull and tension the display processing mask while the pair of clamps pulls the display processing mask in the horizontal direction in which the clamps are spaced apart from each other.

10 . The apparatus of claim 9 , further comprising a fixing unit to selectively fix a fixing stick on the support body, and the fixing unit comprises at least one of a magnet, a vacuum hole, and an electrostatic chuck.

11 . The apparatus of claim 10 , wherein the fixing unit is provided in plural, and the fixing units are spaced apart from each other in the horizontal direction in which the chucks are spaced apart from each other.

12 . The apparatus of claim 10 , further comprising:
a stage arranged on the support body; and a mask loader arranged on the support body, wherein the fixing unit is provided in the stage.

13 . The apparatus of claim 9 , further comprising a vacuum pump, wherein each of the chucks comprises an adsorption body, the adsorption body comprising:
a vacuum pressure distribution space connected to the vacuum pump; and an adsorption hole extending up and down to expose the vacuum pressure distribution space to a lower space of the adsorption body, wherein the adsorption hole is provided in plural, and the adsorption holes are spaced apart from each other in the horizontal direction in which the chucks are spaced apart from each other.

14 . A method of manufacturing a display processing mask, the method comprising:
arranging a frame on a support body; arranging a fixing stick on the frame; arranging a process mask on the fixing stick; tensioning the process mask; and welding the tensioned process mask to the frame, wherein the tensioning the process mask comprises: tensioning the process mask in a first direction using a clamp; and tensioning the process mask in a second direction crossing the first direction using a chuck.

15 . The method of claim 14 , wherein the tensioning of the process mask in the first direction using the clamp comprises:
pulling a first wing of the process mask using a first clamp of the clamp; and pulling a second wing of the process mask using a second clamp of the clamp, the second wing being spaced apart from the first wing in a direction opposite to the first direction, and wherein the tensioning of the process mask in the second direction using the chuck comprises: adsorbing a third wing of the process mask using a first chuck of the chuck using a vacuum pressure to pull the third wing in the second direction; and adsorbing a fourth wing of the process mask which is spaced apart from the third wing in the second direction using a second chuck of the chuck to pull the fourth wing in a direction opposite to the second direction.

16 . The method of claim 15 , wherein the welding of the process mask comprises:
welding the first wing and the second wing to the frame; and welding the third wing and the fourth wing to the fixing stick.

17 . The method of claim 14 , further comprising fixing the fixing stick at a certain position using a fixing unit, wherein the fixing unit fixes the fixing stick to the certain position using at least one of a magnetic coupling, a vacuum adsorption, and an electrostatic force.

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Assignees

• Samsung Display Co Ltd

Inventors

• Moon Youngmin
• Park Youngho
• Jo Junho
• Song Seungyong
• Im Sungsoon

Classifications

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• B23K26/38

  by boring or cutting · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C23C14/042

  using masks · CPC title

• B23K26/21

  by welding · CPC title