MEMS Transducer for Interacting with a Volume Flow of a Fluid, and Method of Producing Same
US-2020087138-A1 · Mar 19, 2020 · US
MEMS having a large fluidically effective surface
US12565416B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12565416-B2 |
| Application number | US-202117476348-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 15, 2021 |
| Priority date | Mar 21, 2019 |
| Publication date | Mar 3, 2026 |
| Grant date | Mar 3, 2026 |
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Abstract
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An MEMS comprising a substrate having a cavity includes a movable layer arrangement arranged in the cavity including a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same. The movable layer arrangement is configured to perform a movement along a direction of movement in a substrate plane in response to an electrical potential between a first beam and a third beam or in response to an electrical potential between the second beam and the third beam. The first, second, and third beams are part of a first layer of the movable layer arrangement. The movable layer arrangement includes a second layer arranged adjacent to the first layer along a direction perpendicular to the substrate plane. The second layer is arranged movably along the direction of movement.
First claim
Opening claim text (preview).
The invention claimed is: 1 . A microelectromechanical system (MEMS), comprising: a substrate comprising a cavity; a movable layer arrangement arranged in the cavity comprising a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same; wherein the movable layer arrangement is configured to perform a movement along a direction of movement in-plane with respect to a substrate plane in response to an electrical potential between the first beam and the third beam or in response to an electrical potential between the second beam and the third beam; wherein the first beam, the second beam and the third beam are part of a first layer of the movable layer arrangement and the movable layer arrangement comprises a second layer that is arranged adjacent to the first layer along a direction perpendicular to the substrate plane, wherein the second layer is arranged movably along the direction of movement; wherein, in relation to the first layer, the second layer provides additional area for interaction with a fluid. 2 . The MEMS according to claim 1 , wherein the first beam, the second beam and the third beam form a movable element and wherein the second layer forms a resistor structure for interaction with a fluid in the cavity, which is mechanically connected to the movable element and which is moved together and/or deformed together with the movable element. 3 . The MEMS according to claim 2 , wherein the resistor structure comprises several partial elements that are arranged perpendicular to the direction of movement and in parallel to the substrate plane along an axial extension direction of the movable layer arrangement. 4 . The MEMS according to claim 3 , wherein the partial elements are at a distance to one another along the axial extension direction. 5 . The MEMS according to claim 4 , wherein the distance is at most 100 μm, advantageously at most 100 μm, most advantageously at most 1 μm. 6 . The MEMS according to claim 3 , wherein the partial elements are mechanically firmly connected either to the first beam or to the second beam or to the third beam. 7 . The MEMS according to claim 3 , wherein the partial elements are arranged on at least two of the first beam, the second beam and the third beam. 8 . The MEMS according to claim 2 , wherein the resistor structure is adapted to provide a mechanical fluidical resistance when interacting with the fluid.
Assignees
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Classifications
Mems transducers or their use · CPC title
using semiconductor materials · CPC title
Translation according to an axis parallel to the substrate · CPC title
Micropumps · CPC title
Comb drives · CPC title
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Frequently asked questions
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- What does patent US12565416B2 cover?
- An MEMS comprising a substrate having a cavity includes a movable layer arrangement arranged in the cavity including a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same. The movable layer arrangement is configured to perform a movement along a direction of movement in a …
- Who is the assignee on this patent?
- Fraunhofer Ges Forschung
- What technology area does this patent fall under?
- Primary CPC classification B81B3/0021. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Mar 03 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).