Display device having a second contact hole passing through the first insulating layer and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-12563926-B2
Application number	US-202318094393-A
Country	US
Kind code	B2
Filing date	Jan 9, 2023
Priority date	Jan 24, 2022
Publication date	Feb 24, 2026
Grant date	Feb 24, 2026

Abstract

A display device includes the following elements: a semiconductor layer positioned on a substrate; a first gate insulating layer positioned on the semiconductor layer; a first gate conductive layer positioned on the first gate insulating layer; a second gate insulating layer positioned on the first gate conductive layer; a second gate conductive layer positioned on the second gate insulating layer; a first insulating layer positioned on the second gate conductive layer; a first contact hole passing through the first insulating layer, the second gate insulating layer, and the first gate insulating layer; a second contact hole passing through the first insulating layer; and a third contact hole passing through the first insulating layer and the second gate insulating layer. A cross-section of the first insulating layer in a plane perpendicular to the substrate has a curved profile.

First claim

What is claimed is:

1 . A display device comprising:
a semiconductor layer positioned on a substrate; a first gate insulating layer positioned on the semiconductor layer; a first gate conductive layer positioned on the first gate insulating layer; a second gate insulating layer positioned on the first gate conductive layer; a second gate conductive layer positioned on the second gate insulating layer; a first insulating layer positioned on the second gate conductive layer; a first contact hole passing through the first insulating layer, the second gate insulating layer, and the first gate insulating layer; a second contact hole passing through the first insulating layer; and a third contact hole passing through the first insulating layer and the second gate insulating layer, wherein a cross-section of the first insulating layer in a plane perpendicular to the substrate has a curved profile, the semiconductor layer includes a first groove, and the first groove is part of the first contact hole.

2 . The display device of claim 1 , further comprising:
a data conductive layer positioned on the first insulating layer, wherein the data conductive layer includes: a source electrode electrically connected to the semiconductor layer through the first contact hole; a first connection electrode electrically connected to the second gate conductive layer through the second contact hole; and a second connection electrode electrically connected to the first gate conductive layer through the third contact hole.

3 . The display device of claim 2 , wherein
an interface between the data conductive layer and the first insulating layer includes fluorine, a fluorine-based compound, or CFx, and the x is a natural number of 1 or more.

4 . The display device of claim 1 , wherein
the semiconductor layer includes a first face, a second face, and a third face, the first face is opposite each of the second face and the third face, the second face is exposed by the first contact hole, the semiconductor layer has a first thickness from the first face to the second face, the semiconductor layer has a second thickness from the first face to the third face, and the second thickness is larger than the first thickness.

5 . The display device of claim 1 , wherein
the first gate conductive layer includes a first gate conductive member exposed by the third contact hole, the first gate conductive member includes a first gate conductive sub-member and a second gate conductive sub-member, and the third contact hole extends through the second gate conductive sub-member.

6 . The display device of claim 5 , wherein
the second gate conductive layer includes a second gate conductive member exposed by the second contact hole, the second gate conductive member includes a third gate conductive sub-member and a fourth gate conductive sub-member, and the second contact hole extends through the fourth gate conductive sub-member.

7 . The display device of claim 6 , wherein
each of the first gate conductive sub-member and the third gate conductive sub-member includes aluminum, and each of the second gate conductive sub-member and the fourth gate conductive sub-member includes titanium.

8 . The display device of claim 2 , further comprising:
an auxiliary layer positioned between the data conductive layer and the first insulating layer.

9 . The display device of claim 8 , wherein
the auxiliary layer includes amorphous silicon.

Assignees

• Samsung Display Co Ltd

Inventors

• Jung Dawoon
• Jeong Yu-Gwang
• Bae Su Bin
• Cho Sung Won

Classifications

• G09G2300/0842

  forming a memory circuit, e.g. a dynamic memory with one capacitor · CPC title

• G09G2300/0861

  with additional control of the display period without amending the charge stored in a pixel memory, e.g. by means of additional select electrodes · CPC title

• G09G2300/0819

  used for counteracting undesired variations, e.g. feedback or autozeroing · CPC title

• G09G2300/0426

  Layout of electrodes and connections · CPC title

• H10K59/1201

  Manufacture or treatment · CPC title