Probe card

Patent metadata

Field	Value
Publication number	US-12560628-B2
Application number	US-202318511034-A
Country	US
Kind code	B2
Filing date	Nov 16, 2023
Priority date	Nov 18, 2022
Publication date	Feb 24, 2026
Grant date	Feb 24, 2026

Abstract

A probe card is provided. The probe card includes: a main circuit board defining an opening; a fixed core provided on a bottom surface of the main circuit board; a movable core provided adjacent the fixed core and configured to move through the opening along a vertical direction; and a driver provided on an upper surface of the main circuit board and configured to control the movable core to move along the vertical direction. The driver includes a driving source provided on an installation portion of the main circuit board, and a power transmission member connected to the driving source and including a roller configured to contact the movable core, and the driver is configured to move the movable core to control whether the fixed core or the movable core is electrically connected to a product, according to a type of the product.

First claim

What is claimed is:

1 . A probe card comprising:
a main circuit board defining an opening; a fixed core provided on a bottom surface of the main circuit board; a movable core provided adjacent the fixed core and configured to move through the opening along a vertical direction; and a driver provided on an upper surface of the main circuit board and configured to control the movable core to move along the vertical direction, wherein the driver comprises a driving source provided on an installation portion of the main circuit board, and a power transmission member connected to the driving source and comprising a roller configured to contact the movable core, and wherein the driver is configured to move the movable core to control whether the fixed core or the movable core is in contact with a product, according to a type of the product.

2 . The probe card of claim 1 , wherein bottom surfaces of the fixed core and the movable core are provided at different levels along the vertical direction.

3 . The probe card of claim 1 , wherein the power transmission member comprises:
a first power transmission member connected to the driving source and configured to rotate within a frame provided on the installation portion; a second power transmission member connected to the first power transmission member and configured to move along a horizontal direction based on rotation of the first power transmission member; and a third power transmission member provided between the second power transmission member and the movable core, wherein the third power transmission member comprises a shaft portion supported by the second power transmission member, and wherein the roller is provided on the shaft portion.

4 . The probe card of claim 3 , wherein the driving source comprises a direct current (DC) motor configured to rotate in first and second directions.

5 . The probe card of claim 3 , wherein the first power transmission member comprises a screw configured to rotate within the frame.

6 . The probe card of claim 3 , wherein the main circuit board comprises a body that has a circular plate shape and is formed of an insulator material, and a plurality of channels spaced apart from each other in a circumferential direction on an upper surface of the body, and
wherein the plurality of channels are disposed around a circular region in which the fixed core and the movable core are disposed.

7 . The probe card of claim 6 , wherein the installation portion comprises a plurality of installation pillars provided in the circular region and a cover that has a circular plate shape and is connected to the plurality of installation pillars, and
wherein a through-hole is formed through the cover above the movable core, and the roller of the third power transmission member is configured to pass through the through-hole and press the movable core.

8 . The probe card of claim 6 , wherein the plurality of channels comprises 48 channels,
wherein 44 out of the 48 channels are electrically connected to the fixed core, and wherein 24 out of the 48 channels are electrically connected to the movable core.

9 . The probe card of claim 3 , further comprising a guide bar that is provided on the frame and configured to guide movement of the second power transmission member.

10 . The probe card of claim 3 , wherein the second power transmission member comprises an extension extending from a side surface thereof, and the driver further comprises a sensor provided on a moving path of the extension.

11 . The probe card of claim 10 , wherein the sensor is an ON/OFF sensor configured to detect whether the extension is in contact with the sensor.

12 . The probe card of claim 10 , wherein the sensor comprises a first sensor configured to detect whether the second power transmission member has moved forwards and a second sensor configured to detect whether the second power transmission member has moved backwards.

13 . The probe card of claim 3 , wherein the frame comprises a first frame in which the driving source is installed and a second frame spaced apart from the first frame, and
wherein one end of the first power transmission member is connected to the driving source through the first frame, and another end of the first power transmission member is rotatably installed in the second frame.

14 . The probe card of claim 1 , wherein a bottom surface of the fixed core and a bottom surface of the movable core are provided at different levels along the vertical direction, and
wherein the levels have a difference of 1000 μm or less.

15 . The probe card of claim 1 , wherein the movable core is configured to move within a range of 400 μm to 500 μm.

16 . A probe card comprising:
a main circuit board comprising a plurality of channels spaced apart from each other in a circumferential direction; a fixed core fixedly provided on a bottom surface of the main circuit board and electrically connected to the plurality of channels; a movable core electrically connected to the plurality of channels, provided adjacent the fixed core, and configured to move along a vertical direction; and a driver connected to the movable core and configured to control the movable core to move along the vertical direction, wherein the driver is configured to move the movable core to control whether the fixed core or the movable core is in contact with a product, according to a type of the product, and wherein at least one of the plurality of channels is connected to both the fixed core and the movable core.

17 . The probe card of claim 16 , wherein the plurality of channels comprises 48 channels,
wherein 44 out of the 48 channels are electrically connected to the fixed core, and wherein 24 out of the 48 channels are electrically connected to the movable core.

18 . The probe card of claim 16 , wherein the driver comprises a driving source provided on an installation portion of the main circuit board, and a power transmission member connected to the driving source and comprising a roller configured to contact and separate from the movable core.

19 . The probe card of claim 18 , wherein the power transmission member comprises:
a first power transmission member connected to the driving source and configured to rotate within a frame provided on the installation portion; a second power transmission member connected to the first power transmission member and configured to move along a horizontal direction based on rotation of the first power transmission member; and a third power transmission member provided between the second power transmission member and the movable core, wherein the third power transmission member comprises a shaft portion supported by the second power transmission member, and wherein the roller is provided on the shaft portion.

20 . A probe card comprising:
a main circuit board defining a first opening and a second opening; a fixed core provided on a bottom surface of the main circuit board; a first movable core provided adjacent the fixed core and configured to move through the first opening along a vertical direction; a first driver provided on an upper surface of the main circuit board and configured to control the first movable core to move along the vertical direction; a second movable core provided adjacent the fixed core and configured to move through the second opening along the vertical direction; and a second driver provided on the upper surface of the main circuit board and configured to control

Assignees

• Samsung Electronics Co Ltd
• Top Eng Co Ltd

Inventors

• Kim Kyubeom
• Choi Junoh
• Hwang Duhyun
• Kim Dongdae
• Kim Youngil
• Cho Jaehan

Classifications

• G01R1/07314

  the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title

• G01R31/2889

  Interfaces, e.g. between probe and tester (G01R31/31905 and G01R1/07364 take precedence) · CPC title

• G01R1/04

  Housings; Supporting members; Arrangements of terminals · CPC title

• G01R1/067

  Measuring probes · CPC title

• G01R31/28

  Testing of electronic circuits, e.g. by signal tracer ({EMC, EMP or similar testing of electronic circuits G01R31/002;} testing for short-circuits, discontinuities, leakage or incorrect line connection G01R31/50; checking computers {or computer components} G06F11/00; checking static stores for correct operation G11C29/00 {; testing receivers or transmitters of transmission systems H04B17/00}) · CPC title