Mems array system and method of manipulating objects
US-2019273177-A1 · Sep 5, 2019 · US
US12558684B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12558684-B2 |
| Application number | US-202217993901-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 24, 2022 |
| Priority date | Dec 29, 2021 |
| Publication date | Feb 24, 2026 |
| Grant date | Feb 24, 2026 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
An electronic device including a substrate, a thin film transistor, a micro pump, and a micro fluid platform is provided. The thin film transistor is disposed on the substrate. The micro pump is disposed on the substrate and electrically connected to the thin film transistor. The micro fluid platform is disposed on the substrate and coupled to the micro pump. The micro pump is configured to travel a to-be-test sample to the micro fluid platform.
Opening claim text (preview).
What is claimed is: 1 . An electronic device, having an inlet area, a pump area, a channel area, a platform area, and an outlet area, wherein the inlet area, the pump area, and the channel area are in fluid communication in sequence to establish a travelling path connected to the platform area and the electronic device comprises: a substrate; a thin film transistor disposed on the substrate; a micro pump disposed on the substrate in the pump area and electrically connected to the thin film transistor; a micro fluid platform disposed on the substrate in the platform area and coupled to the micro pump, wherein the channel area extends between the micro pump and the micro fluid platform; a micro fluid chamber continuously distributed in the pump area, the channel area, and the platform area; and a hydrophobic layer extending throughout the micro fluid chamber; wherein the micro pump is configured to travel a to-be-test sample in the micro fluid chamber to the micro fluid platform. 2 . The electronic device according to claim 1 , wherein the micro pump comprises a cavity, a first electrode, and a second electrode, and the thin film transistor is electrically connected to the first electrode, wherein the thin film transistor is configured to provide the first electrode with different voltages relative to the second electrode, so that the cavity is squeezed or expanded to travel the to-be-test sample to the micro fluid platform. 3 . The electronic device according to claim 2 , wherein the cavity is disposed between the first electrode and the second electrode. 4 . The electronic device according to claim 2 , further comprising a membrane disposed between the cavity and the second electrode. 5 . The electronic device according to claim 2 , further comprising a piezoelectric layer disposed between the first electrode and the second electrode, wherein the first electrode and the second electrode are disposed on a side of the cavity. 6 . The electronic device according to claim 2 , further comprising a membrane disposed between the cavity and the first electrode. 7 . The electronic device according to claim 1 , wherein the micro fluid chamber comprises a microfluid channel coupled between the micro fluid platform and the micro pump. 8 . The electronic device according to claim 1 , wherein the micro fluid platform is an electrowetting dielectric platform. 9 . The electronic device according to claim 1 , wherein the micro fluid platform is an optically-induced dielectrophoresis platform. 10 . The electronic device according to claim 1 , further comprising an opposite substrate and a spacing member, wherein the spacing member is disposed between the substrate and the opposite substrate. 11 . The electronic device according to claim 10 , wherein the spacing member forms the micro fluid chamber between the substrate and the opposite substrate. 12 . The electronic device according to claim 10 , wherein an inlet and an outlet are disposed on the opposite substrate, the inlet is disposed adjacent to the micro pump, and the outlet is disposed adjacent to the micro fluid platform. 13 . The electronic device according to claim 1 , further comprising an insulation layer, wherein the insulation layer is disposed on the substrate, and the hydrophobic layer is disposed on the insulation layer. 14 . The electronic device according to claim 13 , further comprising a switching component and a switching electrode disposed on the substrate, wherein the switching electrode is connected to the switching component, and the insulation layer is located between the hydrophobic layer and the switching electrode. 15 . The electronic device according to claim 1 , wherein the micro fluid chamber comprises a travelling chamber in the pump area, and the micro pump is configured to change a height of the travelling chamber.
Dielectrophoretic forces · CPC title
characterised by the means or forces applied to move the fluids · CPC title
the valve being an elastic body, the length thereof changing in the opening direction · CPC title
with piezoelectric drive · CPC title
by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.