Plasma processing apparatus
US-2016225587-A1 · Aug 4, 2016 · US
US12555745B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12555745-B2 |
| Application number | US-202318321724-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 22, 2023 |
| Priority date | Aug 25, 2017 |
| Publication date | Feb 17, 2026 |
| Grant date | Feb 17, 2026 |
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Some embodiments include a high voltage waveform generator comprising: a generator inductor; a high voltage nanosecond pulser having one or more solid state switches electrically and/or inductively coupled with the generator inductor, the high voltage nanosecond pulser configured to produce a pulse burst having a burst period, the pulse burst comprising a plurality of pulses having different pulse widths; and a load electrically and/or inductively coupled with the high voltage nanosecond pulser, the generator inductor, and the generator capacitor, the voltage across the load having an output pulse with a pulse width substantially equal to the burst period and the voltage across the load varying in a manner that is substantially proportional with the pulse widths of the plurality of pulses.
Opening claim text (preview).
That which is claimed: 1 . An apparatus to apply a periodic voltage comprising: a switch coupled to a first node and a second node; a first voltage source coupled to the first node and third node; and a second voltage source coupled to the second node and the third node; wherein the switch is closed to connect and disconnect a current pathway between the first node and the second node to cause an application of an asymmetric periodic voltage waveform at the second node relative to the third node, wherein each cycle of the asymmetric periodic voltage waveform that includes at least the following a first portion that begins with a first negative voltage and changes to a positive peak voltage, a second portion that changes from the positive peak voltage to a third voltage level and a fourth portion that includes a negative voltage ramp from the third voltage level to a fourth voltage level. 2 . The apparatus of claim 1 , wherein connecting the current pathway between the first node and the second node causes the first portion of the asymmetric periodic voltage waveform that begins with a first negative voltage and changes to the positive peak voltage. 3 . The apparatus of claim 2 , wherein disconnecting the current pathway causes the second portion of the asymmetric periodic voltage waveform that changes from the positive peak voltage level to the third voltage level. 4 . The apparatus of claim 1 , further comprising a first diode and a first inductor disposed between the first node and the second node. 5 . The apparatus of claim 1 , further comprising a second inductor coupled between the second node and the third node. 6 . The apparatus of claim 1 , wherein the switch includes a plurality of switches arranged is series. 7 . The apparatus of claim 1 , wherein the switch includes a plurality of switches arranged in parallel. 8 . A method comprising: applying a first voltage between a first node and a third node; applying a second voltage between the second node and a third node; connecting and disconnecting a current pathway between the first node and the second node to cause an application of an asymmetric periodic voltage waveform at the second node, wherein each cycle of the asymmetric periodic voltage waveform includes at least a first portion that begins with a first negative voltage and changes to a positive peak voltage, a second portion that changes from the positive peak voltage to a third voltage level and a fourth portion that includes a negative voltage ramp from the third voltage level to a fourth voltage level. 9 . The apparatus of claim 8 , wherein the connecting and disconnecting causes unidirectional current through the current pathway between the first node and the second node. 10 . The method of claim 8 , wherein the connecting and disconnecting causes unidirectional current through a second current pathway between the second node and the third node. 11 . A method comprising: closing a switch to connect and disconnect a current pathway between a first node and a second node to cause an application of an asymmetric periodic voltage waveform at a second node relative to a third node, wherein each cycle of the asymmetric periodic voltage waveform that includes at least the following a first portion that begins with a first negative voltage and changes to a positive peak voltage, a second portion that changes from the positive peak voltage to a third voltage level and a fourth portion that includes a negative voltage ramp from the third voltage level to a fourth voltage level. 12 . The method according to claim 11 , wherein connecting the current pathway between the first node and the second node causes the first portion of the asymmetric periodic voltage waveform that begins with a first negative voltage and changes to the positive peak voltage. 13 . The method according to claim 11 , wherein disconnecting the current pathway causes the second portion of the asymmetric periodic voltage waveform that changes from the positive peak voltage level to the third voltage level.
the switching device being a semiconductor device · CPC title
Adjustment of width or dutycycle of pulses (pulse width modulation H03K7/08 {; to maintain energy constant H03K3/015}) · CPC title
Electric or electronic means · CPC title
using particular waveforms, e.g. polarised waves · CPC title
Amplitude modulation, includes pulsing · CPC title
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