Pellicle film, pellicle, carbon nanotube web and production method therefor, carbon nanotube film, and carbon nanotube thread and production method therefor

Patent metadata

Field	Value
Publication number	US-12554192-B2
Application number	US-202217734447-A
Country	US
Kind code	B2
Filing date	May 2, 2022
Priority date	Nov 5, 2019
Publication date	Feb 17, 2026
Grant date	Feb 17, 2026

Abstract

A technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film contains a plurality of first carbon nanotubes extending in a first direction and arrayed in the radial direction, and a plurality of second carbon nanotubes extending in a second direction intersecting the first direction, and arrayed in their radial direction.

First claim

What is claimed is:

1 . A pellicle film, comprising:
a first linear array formed by a plurality of first parallel, non-overlapping carbon nanotubes each having a respective length extending in a first direction, the first linear array extends in a radial direction of the first parallel, non-overlapping carbon nanotubes, the radial direction of the first parallel, non-overlapping carbon nanotubes is perpendicular to the first direction; and a second linear array formed by a plurality of second parallel, non-overlapping carbon nanotubes each having a respective length extending in a second direction intersecting the first direction, the second linear array extends in a radial direction of the second parallel, non-overlapping carbon nanotubes, the radial direction of the second parallel, non-overlapping carbon nanotubes is perpendicular to the second direction.

2 . The pellicle film of claim 1 , wherein the plurality of first parallel, non-overlapping carbon nanotubes form a first carbon nanotube web, and the plurality of second parallel, non-overlapping carbon nanotubes form a second carbon nanotube web overlapped with the first carbon nanotube web.

3 . The pellicle film of claim 2 , wherein at least one of the first carbon nanotube web and the second carbon nanotube web is provided with a plurality of pores.

4 . The pellicle film of claim 3 , further comprising one or more covering layers covering at least one of the first carbon nanotube web and the second carbon nanotube web, the at least one of the first carbon nanotube web and the second carbon nanotube web being provided with the plurality of pores.

5 . The pellicle film of claim 3 , wherein the plurality of pores have a maximum diameter of 100 nm or less.

6 . The pellicle film of claim 1 , wherein the plurality of first parallel, non-overlapping carbon nanotubes form a plurality of first parallel, non-overlapping carbon nanotube threads each being formed of a plurality of carbon nanotubes, the plurality of second parallel, non-overlapping carbon nanotubes form a plurality of second parallel, non-overlapping carbon nanotube threads each being formed of a plurality of carbon nanotubes, and the plurality of first parallel, non-overlapping carbon nanotube threads and the plurality of second parallel, non-overlapping carbon nanotube threads form a woven textile.

7 . The pellicle film of claim 6 , wherein a maximum distance among distances between adjacent carbon nanotube threads in the plurality of first parallel, non-overlapping carbon nanotube threads, and among distances between adjacent carbon nanotube threads in the plurality of second parallel, non-overlapping carbon nanotube threads is 100 nm or less.

8 . The pellicle film of claim 6 , wherein one or more carbon nanotube threads, in the plurality of first parallel, non-overlapping carbon nanotube threads and the plurality of second parallel, non-overlapping carbon nanotube threads, each have a diameter varying along a length direction.

9 . The pellicle film of claim 1 , wherein the pellicle film has a thickness of 500 nm or less.

10 . A pellicle, comprising:
the pellicle film of claim 1 ; and a frame supporting the pellicle film.

11 . A pellicle film, comprising:
a plurality of first parallel, non-overlapping carbon nanotube threads each being formed of a plurality of first parallel, non-overlapping carbon nanotubes each having a respective length extending in a first direction; and a plurality of second parallel, non-overlapping carbon nanotube threads each being formed of a plurality of second parallel, non-overlapping carbon nanotubes each having a respective length extending in a second direction intersecting the first direction, wherein the plurality of first parallel, non-overlapping carbon nanotube threads and the plurality of second parallel, non-overlapping carbon nanotube threads form a woven textile.

12 . A carbon nanotube web comprising a linear array formed by a plurality of parallel, non-overlapping carbon nanotubes each having a respective length extending in a first direction, the linear array extends in a radial direction of the carbon nanotubes, the radial direction of the carbon nanotubes is perpendicular to the first direction, wherein the carbon nanotube web is provided with a plurality of pores.

13 . A carbon nanotube film, comprising:
a first carbon nanotube web including a plurality of first parallel, non-overlapping carbon nanotubes each extending in a first direction, the first carbon nanotube of said plurality extend in a radial direction of the first carbon nanotubes, the radial direction of the first carbon nanotubes is perpendicular to the first direction; and a second carbon nanotube web including a plurality of second parallel, non-overlapping carbon nanotubes each extending in a second direction intersecting the first direction, the second carbon nanotubes of said plurality form a linear array extending in a radial direction of the second carbon nanotubes, the radial direction of the second carbon nanotubes is perpendicular to the second direction, wherein at least one of the first carbon nanotube web and the second carbon nanotube web is provided with a plurality of pores.

14 . A carbon nanotube thread comprising a plurality of parallel, non-overlapping carbon nanotubes, wherein the carbon nanotube thread has a diameter varying along a length direction.

15 . A method of producing a carbon nanotube web, comprising:
preparing a linear carbon nanotube array formed of a plurality of parallel, non-overlapping carbon nanotubes extending from a support surface, the linear carbon nanotube array including one or more pores or concavities; and drawing out the carbon nanotubes in a web shape from an end face of the carbon nanotube array.

16 . A method of producing a carbon nanotube thread, comprising:
preparing a linear carbon nanotube array formed of a plurality of parallel, non-overlapping carbon nanotubes extending from a support surface, the carbon nanotube array including one or more pores or concavities; and drawing out the carbon nanotubes in a thread shape from an end face of the carbon nanotube array.

Assignees

• Toppan Inc

Inventors

• Takada Naoya
• Seki Kazunori
• Kodera Yutaka

Classifications

• D10B2101/122

  Nanocarbons · CPC title

• C01B32/158

  Carbon nanotubes · CPC title

• C01B32/168

  After-treatment · CPC title

• C01B32/16

  Preparation · CPC title

• C01P2006/90

  Other properties not specified above · CPC title