Doubly resonant micromechanical beam scanners

Patent metadata

Field	Value
Publication number	US-12554125-B2
Application number	US-202118024146-A
Country	US
Kind code	B2
Filing date	Aug 23, 2021
Priority date	Sep 2, 2020
Publication date	Feb 17, 2026
Grant date	Feb 17, 2026

Abstract

The present disclosure is directed toward systems and methods for steering a light beam within a field of view with better uniformity and/or density than achievable using prior art beam scanners. Beam scanners in accordance with the present disclosure include an optical element that is operatively coupled with doubly resonant tethers that enable motion of the optical element in at least one dimension, thereby enabling the beam scanner to realize scan patterns that are more complex than simple Lissajous curves. In some embodiments, doubly resonant beam scanners can steer a light beam in a Rose pattern, a combined Rose and Lissajous pattern, or more complex patterns.

First claim

What is claimed is:

1 . An apparatus comprising a beam scanner ( 100 ) for steering a light beam ( 118 ) in a pattern ( 400 or 600 ), wherein the beam scanner includes:
first and second tethers ( 112 X) that are doubly resonant;
a stage ( 108 ) that is mechanically coupled between the first and second tethers; and
an optical element ( 104 ) configured to direct the light beam, wherein the optical element is mechanically coupled with the stage;
wherein the first and second tethers collectively enable a first motion of the stage, the first motion being selected from the group consisting of a rotation about a first axis (x axis) and a translation along a second axis (y axis) that is orthogonal to the first axis.

2 . The apparatus of claim 1 wherein the beam scanner further includes:
third and fourth tethers ( 112 Y) that are doubly resonant, the stage being mechanically coupled between the third and fourth tethers;
wherein the third and fourth tethers collectively enable a second motion of the stage, and wherein the second motion is selected from the group consisting of a rotation about the second axis and a translation along the first axis.

3 . The apparatus of claim 1 wherein the beam scanner further includes an actuator ( 106 ) configured to induce the first motion, the actuator being selected from the group consisting of a parallel-plate electrostatic actuator, a comb drive electrostatic actuator, a piezoelectric actuator, a magnetic actuator, a thermal actuator, a phase-transition actuator, and an electrowetting actuator.

4 . The apparatus of claim 1 wherein the pattern has at least one dimension and is selected from the group consisting of a generalized dynamic Rhodonea pattern, a combined generalized dynamic Rhodonea and Lissajous pattern, and a non-Lissajous pattern.

5 . The apparatus of claim 1 wherein the beam scanner is configured to steer the light beam to scan a field of view having a shape selected from the group consisting of circular and elliptical.

6 . The apparatus of claim 1 wherein the beam scanner is configured to control the density of the pattern.

7 . The apparatus of claim 1 wherein the beam scanner comprises a micro-electromechanical-systems-based (MEMS-based) scanning platform ( 102 ) that includes the stage and the first and second tethers.

8 . The apparatus of claim 1 wherein the optical element is selected from the group consisting of a mirror, a diffractive element, a hologram, a prism, and a refractive lens.

9 . The apparatus of claim 1 wherein the apparatus is selected from the group consisting of a LiDAR system and a heads-up display.

10 . A method for steering a light beam ( 118 ) in a pattern ( 400 or 600 ), the method comprising:
providing a beam scanner ( 100 ) that includes;
(i) first and second tethers ( 112 X) that are doubly resonant such that they are characterized by a first pair of resonances (R1X and R2X);
(ii) a stage ( 108 ) that is mechanically coupled between the first and second tethers;
(iii) an optical element ( 104 ) that is configured to direct the light beam, wherein the optical element is mechanically coupled with the stage; and
(iv) an actuator that is configured to impart a first motion on the scanning platform, wherein the first motion is selected from the group consisting of a rotation about a first axis (x axis) and a translation along a second axis (y axis);
establishing a first pair of frequencies (F1X and F2X) that are based on the first pair of resonances;
driving the actuator with a first drive signal (DSX) that includes the first pair of frequencies; and
receiving the light beam at the optical element.

11 . The method of claim 10 wherein the beam scanner is provided such that it further includes third and fourth tethers ( 112 Y) that are doubly resonant such that they are characterized by a second pair of resonances (R1Y and R2Y), the stage being mechanically coupled between the third and fourth tethers, and wherein the method further includes:
establishing a second pair of frequencies (F1Y and F2Y) that are based on the second pair of resonances; and
driving the actuator with a second drive signal (DSY) that includes the second pair of frequencies.

12 . The method of claim 10 further comprising steering the light beam such that the pattern has at least one dimension and is selected from the group consisting of a generalized dynamic Rhodonea pattern, a combined generalized dynamic Rhodonea and Lissajous pattern, and a non-Lissajous pattern.

13 . The method of claim 12 wherein the light beam is steered to scan a field of view having a shape selected from the group consisting of circular and elliptical.

14 . The method of claim 10 further comprising controlling the density of the pattern.

15 . The method of claim 10 wherein the beam scanner is provided such that it includes a scanning platform ( 102 ) formed via a process selected from the group consisting of MEMS-based fabrication and three-dimensional (3D) printing, the scanning platform including the stage and the first and second tethers.

Assignees

• Univ Leland Stanford Junior

Inventors

• Solgaard Olav
• Solgaard Jennifer

Classifications

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G01S7/4817

  relating to scanning · CPC title

• G02B26/101 Primary

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• B33Y80/00 Primary

  Products made by additive manufacturing · CPC title