Mapping device and substrate accommodation state determination method

Patent metadata

Field	Value
Publication number	US-12549835-B2
Application number	US-202318381117-A
Country	US
Kind code	B2
Filing date	Oct 17, 2023
Priority date	Oct 19, 2022
Publication date	Feb 10, 2026
Grant date	Feb 10, 2026

Abstract

The load port includes a FOUP configured to accommodate a plurality of substrates in multiple stages, cameras configured to image each of the substrates accommodated in the FOUP and including a low-magnification camera with a wide horizontal angle of view and a high-magnification camera with a narrow horizontal angle of view, and a CPU configured to detect the accommodation state of each of the substrates based on the imaging data acquired from the low-magnification camera and the high-magnification camera, respectively.

First claim

What is claimed is:

1 . A mapping device comprising:
a mounting table configured to mount a container that accommodates a plurality of substrates in multiple stages; an imaging device configured to image each of the substrates accommodated in the container, and including a first imaging device and a second imaging device having a narrower horizontal angle of view and higher magnification than the first imaging device; and a controller configured to detect an accommodation state of each of the substrates based on first imaging data and second imaging data acquired from the first imaging device and the second imaging device, respectively, wherein the imaging device is configured to image each of the substrates from an opening of the container, wherein the container has a plurality of poles provided in each stage and configured to support each of the substrates in each stage by the plurality of poles, and wherein the imaging device has a horizontal angle of view capable of imaging the plurality of poles.

2 . The mapping device of claim 1 , wherein the imaging device is provided on a door that moves up and down over the opening of the container from a fully closed state to a fully open state.

3 . The mapping device of claim 2 , wherein the first imaging device is configured to image a vicinity of the plurality of poles except for one pole located at an outermost position, and
wherein the second imaging device is configured to image a vicinity of the one pole located at the outermost position.

4 . A mapping device comprising:
a mounting table configured to mount a container that accommodates a plurality of substrates in multiple stages; an imaging device configured to image each of the substrates accommodated in the container, and including a first imaging device and a second imaging device having a narrower horizontal angle of view and higher magnification than the first imaging device; and a controller configured to detect an accommodation state of each of the substrates based on first imaging data and second imaging data acquired from the first imaging device and the second imaging device, respectively, wherein the container has a plurality of poles provided in each stage and configured to support each of the substrates in each stage by the plurality of poles, wherein the imaging device has a horizontal angle of view capable of imaging the plurality of poles, wherein the first imaging device is configured to image a vicinity of the plurality of poles except for one pole located at an outermost position, and wherein the second imaging device is configured to image a vicinity of the one pole located at the outermost position.

5 . A substrate accommodation state determination method in which a substrate accommodated in a container is imaged by a first imaging device and a second imaging device to determine an accommodation state of the substrate, the first imaging device configured to image a first region, the second imaging device configured to image a second region narrower than the first region at a higher magnification than the first imaging device, the method comprising:
a first state detection step of detecting a crossed state of the substrate existing in the first region based on a data acquired by the first imaging device; a second state detection step of detecting a crossed state of the substrate existing in the second region and a thickness of the substrate based on a data acquired by the second imaging device; and an accommodation state determination step of determining an accommodation state of the substrate based on detection results of the first state detection step and the second state detection step, wherein the first imaging device and the second imaging device are configured to image the substrate from an opening of the container.

6 . The mapping device of claim 1 , wherein the first imaging device images a plurality of detection regions arranged along a horizontal direction.

7 . The method of claim 5 , wherein the first imaging device images a plurality of detection regions arranged along a horizontal direction.

Assignees

• Sinfonia Technology Co Ltd

Inventors

• Sato Keigo
• Miyashita Yuji
• Yasuda Katsumi

Classifications

• H10P72/57

  Mask-wafer alignment · CPC title

• H10P72/53 Primary

  using optical controlling means · CPC title

• H10P72/0608

  of substrates stored in a container, a magazine, a carrier, a boat or the like · CPC title

• G06T7/0004

  Industrial image inspection · CPC title

• G06T2207/30148

  Semiconductor; IC; Wafer · CPC title