Method for detecting environmental parameter in semiconductor fabrication facility
US-11892382-B2 · Feb 6, 2024 · US
US12547192B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12547192-B2 |
| Application number | US-202418632250-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 10, 2024 |
| Priority date | Apr 11, 2023 |
| Publication date | Feb 10, 2026 |
| Grant date | Feb 10, 2026 |
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A pressure regulator for fluids is described. The pressure regulator (100) has a main body (108) including a control valve (112,113) actuated by a control element (119) responding to a pressure signal generated by sensor means (118) to maintain a set pressure in the transfer line. The main body (108), the control valve (112,113), the control element (119) and the sensor means (118) are contained in an interior space (124) enclosed by a housing (123). A pressure below atmospheric pressure prevails in the interior space (124).
Opening claim text (preview).
The invention claimed is: 1 . A pressure regulator for fluids, wherein the pressure regulator comprises: a main body including a control valve actuated by a control element responding to a pressure signal generated by sensor means to maintain a set pressure in a transfer line, wherein the main body, the control valve, the control element and the sensor means are contained in an interior space enclosed by a housing, and wherein the transfer line is a multiwalled transfer line, wherein the housing is connected with an outer tube of the multiwalled transfer line such that a space enclosed between the outer tube and an inner tube of the multiwalled transfer line is fluidly connected with the interior space of the housing such that a pressure below atmospheric pressure prevails in the interior space. 2 . The pressure regulator according to claim 1 , wherein the interior space and the ring space are evacuated. 3 . The pressure regulator according to claim 1 , wherein the pressure regulator is enclosed in a gas-tight envelope whose interior is filled with a gas whose boiling point is below the fluid temperature. 4 . The pressure regulator according to claim 1 , wherein the pressure regulator is installed between an upstream section and a downstream section of the transfer line. 5 . The pressure regulator according to claim 1 , wherein the sensor means is a membrane. 6 . The pressure regulator according to claim 5 , wherein the sensor means further comprise a spring exerting a spring force on the membrane, wherein the spring is contained in the housing of the pressure regulator. 7 . The pressure regulator according to claim 6 , wherein the pressure regulator is provided with a pressure means, which exerts adjustable forces on the spring so that different set pressures of the pressure regulator can be selected.
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