Ammonia abatement for improved roughing pump performance
US-2023034561-A1 · Feb 2, 2023 · US
US12546015B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12546015-B2 |
| Application number | US-202318307120-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 26, 2023 |
| Priority date | Apr 26, 2023 |
| Publication date | Feb 10, 2026 |
| Grant date | Feb 10, 2026 |
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A fluoride ion cleaning system includes a retort for cleaning at least one component via a working fluid supplied to the retort, a post-retort subsystem for processing a post-retort fluid stream exiting the retort at a first temperature, and a scrubber downstream from the post-retort subsystem. The post-retort subsystem includes a separator in flow communication with the retort. The separator includes an inlet for receiving the post-retort fluid stream from the retort and an outlet for the post-retort fluid stream exiting the separator. The post-retort subsystem also includes a cooling device for selectively cooling the post-retort fluid stream to a second temperature, the second temperature being lower than the first temperature. The second temperature enables particulate to be separated from the post-retort fluid stream within the separator.
Opening claim text (preview).
What is claimed is: 1 . A fluoride ion cleaning system comprising: a retort for cleaning at least one component via a working fluid supplied to the retort; a post-retort subsystem for processing a post-retort fluid stream exiting the retort at a first temperature, the post-retort subsystem comprising: a separator in flow communication with the retort, the separator comprising an inlet for receiving the post-retort fluid stream from the retort and an outlet for the post-retort fluid stream exiting the separator; and a cooling device for selectively cooling the post-retort fluid stream to a second temperature, the second temperature being lower than the first temperature, wherein the second temperature enables particulate to be separated from the post-retort fluid stream within the separator; and a scrubber downstream from the post-retort subsystem for receiving the post-retort fluid stream discharged from the separator, wherein the separator of the post-retort subsystem includes an interior that is free of any filtration media including liquid-based filtration media and is configured to receive the separated particulate. 2 . The fluoride ion cleaning system of claim 1 , wherein the cooling device of the post-retort subsystem comprises at least one of cooling coils and a cooling jacket circumscribing the separator to facilitate cooling the post-retort fluid stream to the second temperature. 3 . The fluoride ion cleaning system of claim 1 , wherein the cooling device of the post-retort subsystem comprises a cooling fluid injection device for injecting cooling fluid into the separator to facilitate cooling the post-retort fluid stream to the second temperature. 4 . The fluoride ion cleaning system of claim 3 , wherein the cooling fluid comprises hydrogen fluoride (HF), argon (Ar), hydrogen (H 2 ), or nitrogen (N 2 ). 5 . The fluoride ion cleaning system of claim 1 , wherein the separator comprises a cyclone separator that facilitates separating the particulate from the post-retort fluid stream at the second temperature via velocity-driven separation. 6 . The fluoride ion cleaning system of claim 1 , wherein the separator comprises a gravity separator that facilitates separating the particulate from the post-retort fluid stream at the second temperature via gravity-driven separation. 7 . The fluoride ion cleaning system of claim 1 , wherein the inlet and the outlet of the separator are thermally coupled to facilitate heat transfer between the post-retort fluid stream entering the separator and the post-retort fluid stream exiting the separator. 8 . The fluoride ion cleaning system of claim 1 , wherein the post-retort subsystem further comprises a heating device for selectively heating the post-retort fluid stream exiting the separator to a third temperature that is higher than the second temperature. 9 . The fluoride ion cleaning system of claim 8 , wherein the heating device of the post-retort subsystem comprises at least one of heating coils and a heating jacket coupled about the outlet of the separator to facilitate heating the post-retort fluid stream exiting the separator to the third temperature. 10 . The fluoride ion cleaning system of claim 1 , wherein the post-retort subsystem is downstream from the retort for processing a first portion of the post-retort fluid stream, the fluoride ion cleaning system further comprising a by-pass channel that selectively channels a second portion of the post-retort fluid stream to bypass the post-retort subsystem. 11 . A fluoride ion cleaning system comprising a retort for cleaning at least one component via a working fluid supplied to the retort, and a post-retort subsystem for processing a post-retort fluid stream exiting the retort at a first temperature, the post-retort subsystem comprising: a separator in flow communication with the retort, the separator comprising an inlet for receiving the post-retort fluid stream from the retort and an outlet for the post-retort fluid stream exiting the separator; and a cooling device for selectively cooling the post-retort fluid stream to a second temperature, the second temperature being lower than the first temperature, wherein the second temperature enables particulate to be separated from the post-retort fluid stream within the separator; wherein the fluoride ion cleaning system further comprises a controller coupled in communication with the cooling device, wherein the controller is configured to selectively adjust operations of the cooling device to change the working fluid to the second temperature based on a first setpoint corresponding to the second temperature and at least one operating parameter of the fluoride ion cleaning system, and wherein the separator of the post-retort subsystem includes an interior that is free of any filtration media including liquid-based filtration media and is configured to receive the separated particulate. 12 . The fluoride ion cleaning system of claim 11 , wherein the at least one operating parameter comprises a condition of the post-retort fluid stream upstream from the post-retort subsystem. 13 . The fluoride ion cleaning system of claim 11 , wherein the at least one operating parameter comprises a control scheme of the fluoride ion cleaning system. 14 . The fluoride ion cleaning system of claim 11 , wherein the post-retort subsystem further comprises a heating device for selectively heating the post-retort fluid stream exiting the separator to a third temperature that is higher than the second temperature, and wherein the controller is coupled in communication with the heating device and is configured to control the heating device based on a second setpoint corresponding to the third temperature. 15 . The fluoride ion cleaning system of claim 14 , wherein the controller is further configured to control the heating device based on a measured temperature of the post-retort fluid stream upstream from the post-retort subsystem. 16 . The fluoride ion cleaning system of claim 14 , wherein the controller is further configured to control the heating device based on the at least one operating parameter of the fluoride ion cleaning system.
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