Method of storing high purity alkyl tin compounds

Patent metadata

Field	Value
Publication number	US-12545693-B2
Application number	US-202318389294-A
Country	US
Kind code	B2
Filing date	Nov 14, 2023
Priority date	Jun 2, 2022
Publication date	Feb 10, 2026
Grant date	Feb 10, 2026

Abstract

Monoalkyl tin triamide compounds having purity of at least about 99 mol % and the chemical formula RSn(NMe 2 ) 3 are described. R 1 is selected from R A , R B , and R C ; R A is a primary alkyl group having about 1 to 10 carbon atoms, R B is a secondary alkyl group having about 3 to 10 carbon atoms, and R C is a tertiary alkyl group having about 3 to 10 carbon atoms; each R 2 is independently an alkyl group having about 1 to 10 carbon atoms; and a content of R 1 Sn(NR 2 2 ) 2 (N(R 2 )CH 2 NR 2 2 ) is less than about 1 mol %. Methods for synthesizing, purifying, and storing these compounds are also provided. The monoalkyl tin compounds may be used for the formation of high-resolution EUV lithography patterning precursors and are attractive due to their high purity and minimal concentration of dialkyl tin and other tin impurities.

First claim

We claim:

1 . A method of storing a sample of a monoalkyltin triamide compound having formula (3) and having a purity of at least 99 mol %:

wherein a content of a compound having a formula (5) is less than 0.2 mol % with respect to the compound of formula (3):

the method comprising storing the sample of the monoalkyltin triamide compound having formula (3) substantively without light exposure and at a temperature of less than 30° C.

2 . The method according to claim 1 , wherein the sample of monoalkyltin triamide compound having formula (3) is stored for three days to one year.

3 . The method according to claim 1 , wherein the sample of monoalkyltin triamide compound having formula (3) undergoes substantively no decomposition after a storage time of three days to one year.

4 . The method according to claim 1 , wherein the content of the compound having formula (5) in the sample of monoalkyltin triamide compound having formula (3) is less than 0.05 mol %.

5 . The method according to claim 2 , wherein the sample of monoalkyltin triamide compound having formula (3) undergoes substantively no decomposition after the storage time of three days to one year.

6 . The method according to claim 2 , wherein the content of the compound having formula (5) in the sample of monoalkyltin triamide compound having formula (3) is less than 0.05 mol %.

7 . The method according to claim 1 , wherein a content of a dialkyl bis(dialkylamino)tin having formula (2) is less than 1 mol %:
R 1 2 Sn(NR 2 2 ) 2   (2)
wherein R 1 is isopropyl and R 2 is methyl.

8 . The method according to claim 1 , wherein a total content of tetrakis(dialkylamino)tin is less than 1 mol %.

9 . The method according to claim 1 , wherein a content of a tetraalkyl tin compound is less than 1 mol %.

10 . The method according to claim 1 , wherein an APHA color of the sample is less than 20.

Assignees

• Gelest Inc
• Mitsubishi Chem Corp

Inventors

• Yang Li
• Hioki Yuta

Classifications

• C07F7/2296

  Purification, stabilisation, isolation · CPC title

• C07F7/2284 Primary

  Compounds with one or more Sn-N linkages · CPC title