Traversing robot with multiple end effectors

Patent metadata

Field	Value
Publication number	US-12544935-B2
Application number	US-202418805775-A
Country	US
Kind code	B2
Filing date	Aug 15, 2024
Priority date	Jan 27, 2022
Publication date	Feb 10, 2026
Grant date	Feb 10, 2026

Abstract

An apparatus includes a platform configured to traverse a stationary base along a motion path; a drive coupled to the platform; and a movable arm assembly. The movable arm assembly includes a pivoting base connected to the drive, first and second linkages connected to the pivoting base, each linkage having links connected via rotary joints and each link having at least one end-effector. The platform is configured to traverse the stationary base along a motion path in two opposing directions and the drive and the movable arm assembly are configured to cause independent and simultaneous movement and transfer of substrates from at least one of a first substrate holding area, a second substrate holding area, a third substrate holding area, or a fourth substrate holding area into or from a respective substrate workstation.

First claim

What is claimed is:

1 . An apparatus, comprising:
a platform configured to traverse a stationary base along a motion path; a drive coupled to the platform; and a movable arm assembly, comprising,
a pivoting base connected to the drive,
a first linkage connected to the pivoting base, the first linkage comprising a first link coupled to the pivoting base through a first rotary joint, the first link comprising a first end-effector having at least a first substrate holding area,
a second linkage connected to the pivoting base, the second linkage comprising a second link coupled to the pivoting base through a second rotary joint, the second link comprising a second end-effector having at least a second substrate holding area, and
a third linkage connected to the pivoting base, the third linkage comprising a third link coupled to the pivoting base through a third rotary joint, the third link comprising a third end-effector having at least a third substrate holding area,
wherein the first rotary joint, the second rotary joint, and the third rotary joint are substantially coaxial and offset from an axis at which the pivoting base is connected to the drive;
wherein the platform is configured to traverse the stationary base along a motion path in two opposing directions and wherein the drive and the movable arm assembly are configured to cause independent and simultaneous movement and transfer of substrates from at least one of the first substrate holding area, the second substrate holding area, or the third substrate holding area into or from a respective substrate workstation positioned along the motion path; and wherein at least one motor for moving at least one of the first linkage, the second linkage, or the third linkage is located in the pivoting base.

2 . The apparatus of claim 1 , wherein the pivoting base is configured to be rotatable about the axis at which the pivoting base is connected to the drive at a point that is substantially at a geometric center of the pivoting base.

3 . The apparatus of claim 1 , wherein the pivoting base is configured to be rotatable simultaneously with an extension of at least one of the first end-effector, the second end-effector, or the third end-effector to the respective substrate workstation.

4 . The apparatus of claim 1 , wherein the drive includes or is associated with a controller.

5 . The apparatus of claim 4 , wherein the controller comprises at least one processor and at least one memory including one or more computer programs configured to cause a movement of the platform to traverse the stationary base along the motion path.

6 . A method, comprising,
providing a platform configured to traverse a stationary base along a motion path; providing a drive coupled to the platform; and connecting a pivoting base of a movable arm assembly to the drive,
wherein a first linkage of the mobile arm assembly is connected to the pivoting base, the first linkage comprising a first link coupled to the pivoting base through a first rotary joint, the first link comprising a first end-effector having at least a first substrate holding area,
wherein a second linkage of the mobile arm assembly is connected to the pivoting base, the second linkage comprising a second link coupled to the pivoting base through a second rotary joint, the second link comprising a second end-effector having at least a second substrate holding area, and
wherein a third linkage of the mobile arm assembly is connected to the pivoting base, the third linkage comprising a third link coupled to the pivoting base through a through a third rotary joint, the third link comprising a third end-effector having at least a third substrate holding area,
wherein the first rotary joint, the second rotary joint, and the third rotary joint are substantially coaxial and offset from an axis at which the pivoting base is connected to the drive;
wherein the platform is configured to traverse the stationary base along a motion path in two opposing directions and wherein the drive and the movable arm assembly are configured to cause independent and simultaneous movement and transfer of substrates from at least one of the first substrate holding area, the second substrate holding area, or the third substrate holding area into a respective substrate workstation; and wherein at least one motor for moving at least one of the first linkage, the second linkage, or the third linkage is located in the pivoting base.

7 . The method of claim 6 , wherein the pivoting base is configured to be rotatable about the axis at which the pivoting base is connected to the drive at a point that is substantially at a geometric center of the pivoting base.

8 . The method of claim 6 , wherein the pivoting base is configured to be rotatable simultaneously with an extension of at least one of the first end-effector, the second end-effector, or the third end-effector to the respective substrate workstation.

9 . The method of claim 8 , wherein the pivoting base is configured to be rotatable simultaneously with a simultaneous extension of the first end-effector to a first of the respective substrate workstations and at least one of the second end-effector to a second of the respective substrate workstations or the third end-effector to a third of the respective substrate workstations.

10 . The method of claim 6 , further comprising providing a controller associated with or included in the drive.

11 . The method of claim 10 , wherein the controller comprises at least one processor and at least one memory including one or more computer programs configured to cause a movement of the platform to traverse the stationary base along the motion path.

12 . A method, comprising:
placing a first substrate on a first substrate holding area of a first end-effector, placing a second substrate on a second substrate holding area of a second end-effector, and placing a third substrate on a third substrate holding area of a third end-effector, wherein the first end-effector, the second end-effector, and the third end-effector form a portion of a movable arm assembly comprising a pivoting base connected to a drive, wherein the movable arm assembly further comprises,
a pivoting base connected to the drive,
a first linkage connected to the pivoting base, the first linkage comprising a first link coupled to the pivoting base through a first rotary joint, the first link comprising the first end-effector having at least the first substrate holding area,
a second linkage connected to the pivoting base, the second linkage comprising a second link coupled to the pivoting base through a second rotary joint, the second link comprising the second end-effector having at least the second substrate holding area, and
a third linkage connected to the pivoting base, the third linkage comprising a third link coupled to the pivoting base through a third rotary joint, the third link comprising the third end-effector having at least the third substrate holding area,
wherein the first rotary joint, the second rotary joint, and the third rotary joint are substantially coaxial and offset from an axis at which the pivoting base is connected to the drive; and
moving the platform on the stationary base along a motion path in two opposing directions and moving the drive and the movable arm assembly to cause independent and simultaneous movement and transfer of substrates from at least one of the first substrate holding area, the second substrate holding area, or the third substrate holding area into or from a respective substrate workstation; and moving the movable arm assembly using at least one motor located in the pivoting base.

Assignees

• Persimmon Tech Corporation

Inventors

• Hosek Martin
• Wilkas Scott

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• B25J9/0096

  co-operating with a working support, e.g. work-table · CPC title

• B25J9/1641

  compensation for backlash, friction, compliance, elasticity in the joints · CPC title

• B25J9/106

  with articulated links · CPC title