X-Y stage yaw correction method and X-Y stage

Patent metadata

Field	Value
Publication number	US-12544870-B2
Application number	US-202118267267-A
Country	US
Kind code	B2
Filing date	Dec 13, 2021
Priority date	Dec 14, 2020
Publication date	Feb 10, 2026
Grant date	Feb 10, 2026

Abstract

The technology disclosed in the present disclosure is a method for correcting a yaw of an X-Y stage, including: moving an XY moving body in an X-axis or Y-axis direction using an actuator; measuring a yaw, which is a rotational displacement of the moved XY moving body, using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data; and adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the X-Y stage.

First claim

What is claimed is:

1 . A method for correcting a yaw of an X-Y stage, comprising:
moving an XY moving body in an X-axis or Y-axis direction using an actuator; measuring a yaw data, which is a rotational displacement of the moved XY moving body, using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data; and adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the XY moving body stage.

2 . The method of claim 1 , further comprising:
moving the XY moving body again in the X-axis or Y-axis direction by adding the yaw correction flexure so as to simulate a degree of yaw suppression.

3 . The method of claim 1 ,
wherein the actuator is a piezo-electric (PZT) actuator.

4 . The method of claim 1 ,
wherein the sensor is a capacitance displacement sensor.

5 . The method of claim 1 ,
wherein the yaw correction flexure is a leaf-spring or hinge structure, and the leaf spring or hinge structure has a specific length, width, and thickness to have a stiffness corresponding to the rotational stiffness value to be corrected.

6 . A computer program stored on a medium comprising computer readable instructions configured to perform the operations of any claim among claims 1 to 5 .

Assignees

• Korea Inst Mach & Materials

Inventors

• Kang Dong Woo
• Kim Hyun Chang
• Kim Jaeyoung
• Kim Kyung Rok

Classifications

• B23Q2716/00

  Equipment for precise positioning of tool or work into particular locations · CPC title

• B23Q2210/002

  Flexures · CPC title

• H02N2/046

  for conversion into rotary motion · CPC title

• H02N2/0095

  producing combined linear and rotary motion, e.g. multi-direction positioners · CPC title

• F16M11/18

  with mechanism for moving the apparatus relatively to the stand · CPC title