Laser interferometer

Patent metadata

Field	Value
Publication number	US-12540898-B2
Application number	US-202318503406-A
Country	US
Kind code	B2
Filing date	Nov 7, 2023
Priority date	Nov 8, 2022
Publication date	Feb 3, 2026
Grant date	Feb 3, 2026

Abstract

Provided is a laser interferometer including: a laser light source configured to emit laser light; an optical modulator including a vibrator that has a light reflection surface and vibrates in response to a drive signal, the optical modulator being configured to overlap a modulation signal on the laser light by reflecting the laser light on the light reflection surface; and a photodetector configured to receive the laser light including a sample signal derived from an object and the modulation signal, and to output a light-receiving signal. When an inclination angle θ qom is defined by a normal line of the light reflection surface and an incident optical axis of the laser light incident on the light reflection surface, the following Relationship (1) is satisfied.

0[deg]<θ qom <5.7[deg]  (1)

First claim

What is claimed is:

1 . A laser interferometer comprising:
a laser light source configured to emit laser light; an optical modulator including a vibrator that has a light reflection surface and vibrates in response to a drive signal, the optical modulator being configured to overlap a modulation signal on the laser light by reflecting the laser light on the light reflection surface; and a photodetector configured to receive the laser light including a sample signal derived from an object and the modulation signal, and to output a light-receiving signal, wherein
0[deg]<θ qom <5.7[deg]  (1)

the above Relationship (1) is satisfied, where an inclination angle θ qom is defined by a normal line of the light reflection surface and an incident optical axis of the laser light incident on the light reflection surface.

2 . The laser interferometer according to claim 1 , wherein
0[deg]<0 qom <1.8[deg]  (2)
the inclination angle θ qom satisfies the above Relationship (2).

3 . The laser interferometer according to claim 2 , further comprising:
a light splitter configured to, after splitting the laser light emitted from the laser light source, irradiate the optical modulator with one part of the laser light and irradiate the object with another part of the laser light, and then mix the laser light that returns from the optical modulator with the laser light that returns from the object.

4 . The laser interferometer according to claim 3 , further comprising:
a light shield disposed between the laser light source and the light splitter, the light shield having an opening through which the laser light passes.

5 . The laser interferometer according to claim 2 , wherein

1
2

⁢

tan

-
1

⁢

(

ϕ
κ

L
q

+

λ

ϕ
κ

)

<

θ
qom

(
3
)

the above Relationship (3) is satisfied, where a wavelength of the laser light emitted from the laser light source is λ, an effective diameter of the laser light emitted from the laser light source is φ k , and a physical distance from a reference point of the effective diameter to the optical modulator is L q .

6 . The laser interferometer according to claim 5 , wherein
the inclination angle θ qom is set such that when a part of the laser light reflected by the light reflection surface returns to the reference point of the effective diameter, a ratio of an amount of return light that returns within a range of the effective diameter to an amount of the emission light within the range of the effective diameter is 0.16% or less.

7 . The laser interferometer according to claim 2 , wherein
0.26[deg]<θ qom <1.8[deg]  (5)
the inclination angle θ qom satisfies the above-Relationship (4) Relationship (5).

8 . The laser interferometer according to claim 1 , further comprising:
a light splitter configured to, after splitting the laser light emitted from the laser light source, irradiate the optical modulator with one part of the laser light and irradiate the object with another part of the laser light, and then mix the laser light that returns from the optical modulator with the laser light that returns from the object.

9 . The laser interferometer according to claim 8 , further comprising:
a light shield disposed between the laser light source and the light splitter, the light shield having an opening through which the laser light passes.

10 . The laser interferometer according to claim 1 , wherein

1
2

⁢

tan

-
1

⁢

(

ϕ
κ

L
q

+

λ

ϕ
κ

)

<

θ
qom

(
3
)

the above Relationship (3) is satisfied, where a wavelength of the laser light emitted from the laser light source is λ, an effective diameter of the laser light emitted from the laser light source is φ k , and a physical distance from a reference point of the effective diameter to the optical modulator is L q .

11 . The laser interferometer according to claim 10 , wherein
the inclination angle θ qom is set such that when a part of the laser light reflected by the light reflection surface returns to the reference point of the effective diameter, a ratio of an amount of return light that returns within a range of the effective diameter to an amount of the emission light within the range of the effective diameter is 0.16% or less.

12 . The laser interferometer according to claim 1 , wherein
0.26[deg]<θ qom <5.7[deg]  (4)
the inclination angle θ qom satisfies the above Relationship (4).

Assignees

• Seiko Epson Corp

Inventors

• Kitagawa Jun

Classifications

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N21/45 Primary

  using interferometric methods; using Schlieren methods · CPC title

• G01H9/00 Primary

  Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means · CPC title