View port for observing ingot growth process and ingot growth apparatus including same
US-2016319458-A1 · Nov 3, 2016 · US
US12540415B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12540415-B2 |
| Application number | US-202118248072-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 16, 2021 |
| Priority date | Oct 7, 2020 |
| Publication date | Feb 3, 2026 |
| Grant date | Feb 3, 2026 |
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An energy-saving ingot growing device is disclosed. The ingot growing device according to the present invention comprises: a chamber having provided therein a crucible heated by a heat source in order to melt silicon; a side surface insulating material provided inside the chamber so as to insulate the side surface of the crucible; and an observation part provided to penetrate the chamber and the side surface insulating material so that the inside of the crucible can be observed.
Opening claim text (preview).
The invention claimed is: 1 . An energy-saving device for growing an ingot, comprising: a chamber in which a crucible which is heated by a heat source in order to melt silicon is installed therein; a side surface insulating material which is installed inside the chamber so as to insulate the side surface of the crucible; an observation part which is installed to penetrate the chamber and the side surface insulating material such that an inside of the crucible can be observed; a reflector for covering an upper portion of the crucible; and an upper insulation material spaced apart from the side surface insulating material and located above the reflector, wherein the observation part is disposed between the reflector and the crucible, and penetrates the side surface insulating material located below the reflector. 2 . The energy-saving device of claim 1 , wherein the observation part comprises: a lens member for observing the inside of the crucible; and an extension member which penetrates the chamber and the side surface insulating material to extend into the chamber, and in which the lens member is installed at an inner end. 3 . The energy-saving device of claim 2 , further comprising: a cooling passage which is provided inside the extension member. 4 . The energy-saving device of claim 2 , further comprising: a gas passage which is provided on one side of the extension member and through which gas discharged into the lens member flows in order to clean the lens member. 5 . The energy-saving device of claim 2 , wherein the extension member is formed such that a length to be inserted into the chamber can be adjusted. 6 . The energy-saving device of claim 2 , wherein the extension member is formed such that an end to be inserted into the chamber is inclined in a downward direction. 7 . The energy-saving device of claim 1 , wherein in the reflector, an insulating material is provided over an entire body forming the reflector, except for a central portion where the ingot grows. 8 . The energy-saving device of claim 1 , wherein the upper insulation material is installed inside the chamber in a remaining portion of the upper portion of the crucible except for a central portion through which the ingot passes. 9 . The energy-saving device of claim 2 , wherein the observation part comprises a driving part for retractably operating the extension member toward the inside of the chamber. 10 . The energy-saving device of claim 9 , wherein the driving part comprises: a frame which is fixed to the chamber; a driving member which is installed to be linearly movable along a guide and fixed to one side of the extension member; and a driving cylinder having one end fixed to the frame and one end portion fixed to the driving member, and wherein as the driving cylinder is driven, the driving member moves forward and backward in the extension direction such that a length of the extension member entering the chamber is adjusted.
Silicon · CPC title
Crucibles or containers for supporting the melt · CPC title
using television detectors; using photo or X-ray detectors · CPC title
with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title
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