Ceramic heater and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-12538388-B2
Application number	US-202017767032-A
Country	US
Kind code	B2
Filing date	Jan 7, 2020
Priority date	Oct 22, 2019
Publication date	Jan 27, 2026
Grant date	Jan 27, 2026

Abstract

The present invention relates to a ceramic heater with improved reliability, the ceramic heater including: a heater body having a mesh type high-frequency electrode, and an electrode rod connecting member being in contact with a lower surface of the high-frequency electrode; and a heater support mounted on a lower portion of the heater body and configured to support the heater body, in which the electrode rod connecting member is in area contact with one surface of the high-frequency electrode.

First claim

What is claimed is:

1 . A ceramic heater comprising:
a heater body having a mesh type high-frequency electrode comprising multiple wires and an electrode rod connecting member being in contact with a lower surface of the high-frequency electrode; and a heater support mounted on a lower portion of the heater body and configured to support the heater body, wherein the high frequency electrode has a horizontal cross-sectional portion to be in area contact with the electrode rod connecting member and formed on at least one portion of the high-frequency electrode, and wherein, in the high-frequency electrode, a wire thickness of at least a first portion of the high-frequency electrode where the horizontal cross-sectional portion is formed is smaller than a wire thickness of a second portion of the high-frequency electrode where the horizontal cross-sectional portion is not formed.

2 . The ceramic heater of claim 1 , wherein the high frequency electrode includes a plurality of wire type metals arranged in a first direction and a plurality of wire type metals arranged in a second direction perpendicular to the first direction.

3 . The ceramic heater of claim 1 , wherein the horizontal cross-sectional portion is formed by processing one surface of the high-frequency electrode.

4 . The ceramic heater of claim 3 , wherein a thickness of a portion removed by processing one surface of the high-frequency electrode is ⅕ to ½ of an overall thickness of the high-frequency electrode.

5 . The ceramic heater of claim 3 , wherein a method of processing one surface of the high-frequency electrode includes a polishing method and a rolling method.

6 . The ceramic heater of claim 1 , wherein the horizontal cross-sectional portion is equal to or larger than an area of a contact surface of the electrode rod connecting member.

7 . The ceramic heater of claim 1 , wherein the horizontal cross-sectional portion is formed at a position of the high-frequency electrode corresponding to a position of the electrode rod connecting member.

8 . The ceramic heater of claim 1 , wherein the electrode rod connecting member is attached to the horizontal cross-sectional portion of the high-frequency electrode through a brazing process.

9 . The ceramic heater of claim 1 , wherein a contact area between the high-frequency electrode and the electrode rod connecting member is equal to or larger than a predetermined critical value.

Assignees

• Mico Ceram Ltd

Inventors

• Chae Je Ho

Classifications

• H05B2203/017

  Manufacturing methods or apparatus for heaters · CPC title

• H05B3/143 Primary

  applied to semiconductors, e.g. wafers heating (H05B3/0047 takes precedence) · CPC title

• H05B3/03 Primary

  Electrodes · CPC title

• H05B3/688

  Fabrication of the plates (for single-step processes see the appropriate subclass, e.g. in B23C, sub-section metallurgy) · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title