Optical alignment in a test system

Patent metadata

Field	Value
Publication number	US-12535523-B2
Application number	US-202418440167-A
Country	US
Kind code	B2
Filing date	Feb 13, 2024
Priority date	Feb 13, 2024
Publication date	Jan 27, 2026
Grant date	Jan 27, 2026

Abstract

An example test system includes a probe card configured to contact a device under test (DUT); a module including a first optical connector configured to contact a second optical connector on the DUT, with the first optical connector being for a fiber optic cable; and a motion system configured to move into, and out of, contact with the module. When the motion system is in contact with the module, the motion system is configured to move the module relative to the DUT in order to align the first optical connector to the second optical connector.

First claim

What is claimed is:

1 . A test system comprising:
a probe card configured to move relative to a device under test (DUT); a module connected to optical fibers, the module being associated with the probe card and being configured to move relative to the probe card and the DUT; and a motion system configured to move into, and out of, contact with the module, wherein, when the motion system is in contact with the module, the motion system is configured to move the module relative to the probe card and the DUT in order to align the optical fibers to the DUT and to create an optical connection between the optical fibers and the DUT.

2 . The test system of claim 1 , wherein the motion system is configured for electrical control or for pneumatic control.

3 . The test system of claim 1 , wherein the motion system comprises robotics configured to operate in multiple degrees of freedom.

4 . The test system of claim 1 , wherein the motion system is configured to move the module so as to move the optical fibers by single-digit millimeters or by less than one millimeter.

5 . The test system of claim 1 , wherein the module comprises a first plate, the first plate comprising indentations; and
wherein the motion system comprises a motor and a second plate, the second plate comprising protrusions configured to engage the indentations to enable movement of the module relative to the probe card and the DUT.

6 . The test system of claim 5 , wherein the motion system is configured to move the second plate towards first plate to cause the protrusions to engage the indentations.

7 . The test system of claim 5 , wherein the first plate comprises three indentations and the second plate comprises three protrusions to engage respective ones of the three indentations.

8 . The test system of claim 4 , wherein a cross-section of the module is substantially “T” shaped.

9 . The test system of claim 5 , further comprising:
one or more springs between the first plate and the probe card, the one or more springs biasing the first plate above the probe card and enabling movement of the module in multiple degrees of freedom.

10 . The test system of claim 1 , further comprising:
a probe head connected to the probe card, the probe head comprising electrical connections configured to contact corresponding electrical connections on the DUT.

11 . The test system of claim 1 , wherein the optical fibers are part of a fiber optic cable that is routed through the module.

12 . The test system of claim 10 , further comprising:
a test instrument configured to test the DUT through the optical connection and a fiber optic cable, the fiber optic cable comprising a second connector configured to connect to, and to disconnect from, a backplane of the test system.

13 . The test system of claim 1 , wherein the module comprises a first structure; and
wherein the motion system comprises a motor and a second structure, the first structure and the second structure being magnetically attracted to each other to create connection of the first structure and the second structure in order to enable movement of the module relative to the probe card and the DUT.

14 . The test system of claim 1 , wherein the module comprises a first structure; and
wherein the motion system comprises a motor and a second structure, the first structure and the second structure comprising components to implement a mechanical latch to hold the first structure and the second structure in order to enable movement of the module relative to the probe card and the DUT.

15 . The test system of claim 1 , wherein the module comprises a first structure;
wherein the motion system comprises a motor and a second structure; and wherein at least one of the first structure or the second structure comprises a suction device configured to apply suction to hold the first structure and the second structure together in order to enable movement of the module relative to the probe card and the DUT.

16 . The test system of claim 1 , further comprising silicon in which the optical fibers are set.

17 . The test system of claim 1 , further comprising glass in which the optical fibers are set.

18 . The test system of claim 1 , further comprising:
a control system configured to execute a test program to control movement of the motion system to control movement of the module relative to the probe card and the DUT.

19 . The test system of claim 1 , wherein the DUT comprises a silicon photonic device on a semiconductor wafer or a semiconductor package.

20 . The test system of claim 1 , wherein the motion system is configured to move the module in six degrees of freedom.

21 . The test system of claim 20 , wherein the motion system is configured to move the module in degrees of freedom comprising: forward/backward, up/down, left/right, yaw, pitch, and roll.

22 . The test system of claim 1 , comprising:
multiple instances of the module, each instance of the module for aligning a respective set of optical fibers to a respective DUT; wherein the motion system is configured to move into contact with each instance of the module and to move each instance of the module relative to the respective DUT.

23 . The test system of claim 1 , comprising:
multiple instances of the module, each instance of the module for aligning a respective set of optical fibers to a respective DUT; and multiple instances of the motion system, each instance of motion system being configured to move into contact with each respective instance of the module and to move each respective instance of the module relative to the respective DUT.

24 . A method performed on a test system, the method comprising:
causing a motion system to come into contact with a module, the module being connected to optical fibers and being configured for movement relative to a probe card and a device under test (DUT), where movement of the motion system is automated; controlling the motion system to move the module to cause the optical fibers to align to the DUT and to create an optical connection between the optical fibers and the DUT; and testing the DUT though a fiber optic path that includes the optical connection.

25 . The method of claim 24 , wherein controlling the motion system is performed to move the module so as to move the optical fibers by single-digit millimeters or by less than one millimeter.

26 . The method of claim 24 , wherein controlling the motion system is performed to move the module in six degrees of freedom relative to the DUT.

27 . The method of claim 24 , wherein the DUT comprises a silicon photonic device on a semiconductor wafer or a semiconductor package.

Assignees

• Teradyne Inc

Inventors

• Lewinnek David W
• Silva Isaac N
• Fisher Brandon R
• Hehir Brendan

Classifications

• G01R31/2887

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R1/07342

  the body of the probe being at an angle other than perpendicular to test object, e.g. probe card · CPC title

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title