Vacuum coating device for uniformly distributing metal steam by using guide plate type structure

Patent metadata

Field	Value
Publication number	US-12534795-B2
Application number	US-202118016412-A
Country	US
Kind code	B2
Filing date	Jul 21, 2021
Priority date	Jul 21, 2020
Publication date	Jan 27, 2026
Grant date	Jan 27, 2026

Abstract

Disclosed in the present invention is a vacuum coating device for uniformly distributing metal steam by using a guide plate type structure. The vacuum coating device comprises a crucible, wherein an induction heater for heating molten metal in the crucible to form metal steam is arranged outside of the crucible. A top of the crucible is connected to a flow distribution tank body by means of a metal steam pipeline. A horizontal core rod and a pressure stabilizing plate are arranged inside the flow distribution tank body. The core rod is located below the pressure stabilizing plate. A coating nozzle is arranged at the top of the flow distribution tank body. An induction coil is arranged on the outer side of the flow distribution tank body. A pressure regulating valve is arranged on the metal steam pipeline. A plurality of axial heating holes are provided inside the core rod, resistance wires are arranged inside the heating holes, and a primary guide plate, a secondary guide plate and a tertiary guide plate are arranged on the surface of the core rod; and a buffer groove is provided on the inner wall of the flow distribution tank body, and the buffer groove corresponds to the core rod in position. According to the present invention, when high-temperature steam makes contact with a low-temperature steel plate, a uniform coating is formed on the surface of the steel plate.

First claim

The invention claimed is:

1 . A vacuum coating device for uniformly distributing a metal steam, comprising:
a crucible, wherein a first induction heater for heating a molten metal in the crucible to form the metal steam is arranged outside the crucible, wherein a top of the crucible is connected to a flow distribution tank body by a metal steam pipeline; a core rod and a pressure stabilizing plate which extend in a horizontal direction and are inside the flow distribution tank body, wherein the core rod is located below the pressure stabilizing plate; a coating nozzle on a top of the flow distribution tank body; a second induction heater outside the flow distribution tank body; a pressure regulating valve on the metal steam pipeline; wherein one or more heating holes extending in an axial direction of the core rod and are formed inside the core rod; a resistance wire inside the heating holes, wherein a primary guide plate, a secondary guide plate and a tertiary guide plate are arranged on a surface of the core rod; wherein the primary guide plate is arranged towards the metal steam pipeline; wherein the secondary guide plate is arranged on an outer side of the primary guide plate; wherein the tertiary guide plate is arranged on an outer side of the secondary guide plate; and a buffer groove formed in an inner wall of the flow distribution tank body, wherein the buffer groove corresponds to the core rod in position.

2 . The vacuum coating device according to claim 1 , wherein the buffer groove is arranged opposite to the core rod in the horizontal direction such that the buffer groove corresponds to the core rod in position.

3 . The vacuum coating device according to claim 1 , wherein the outer side of the primary guide plate is a side of the primary guide plate facing away from an orifice of the metal steam pipeline in a circumferential direction of the core rod; and
the outer side of the secondary guide plate is a side of the secondary guide plate facing away from the orifice of the metal steam pipeline in the circumferential direction of the core rod.

4 . The vacuum coating device according to claim 1 , wherein the core rod has a circular, elliptical, trapezoidal or rectangular cross-section.

5 . The vacuum coating device according to claim 1 , wherein a length of the primary guide plate is less than a length of the secondary guide plate; and the length of the secondary guide plate is less than a length of the tertiary guide plate.

6 . The vacuum coating device according to claim 5 , wherein the secondary guide plate and the tertiary guide plate are each provided with opening holes arranged at equal intervals.

7 . The vacuum coating device according to claim 6 , wherein when a pressure of the metal steam in the metal steam pipeline is 1000-100000 Pa,
L 1 /L 3 =0.2-0.4, wherein L 1 is the length of the primary guide plate and L 3 is the length of the tertiary guide plate, L 2 /L 3 =0.4-0.7 wherein L 2 is the length of the secondary guide plate, h=2-6 mm, wherein h is a length of each opening hole in the secondary guide plate or each opening hole in the tertiary guide plate, d=8-15 mm, wherein d is a distance between adjacent opening holes in the secondary guide plate or between adjacent opening holes in the tertiary guide plate, and wherein a power of the resistance wire is 8-20 KW/m2.

8 . The vacuum coating device according to claim 7 ,
wherein when the pressure of the metal steam in the metal steam pipeline is 50000-100000 Pa, L 1 /L 3 =0.3-0.4, L 2 /L 3 =0.6-0.7, h=2-4 mm, d=12-15 mm, and the power of the resistance wire is 15-20 KW/m2; wherein when the pressure of the metal steam in the metal steam pipeline is 10000-50000 Pa, L 1 /L 3 =0.25-0.3, L 2 /L 3 =0.5-0.6, h=3-5 mm, d=10-12 mm, and the power of the resistance wire is 10-15 KW/m2; and wherein when the pressure of the metal steam in the metal steam pipeline is 1000-10000 Pa, L 1 /L 3 =0.2-0.25, L 2 /L 3 =0.4-0.5, h=4-6 mm, d=8-10 mm, and the power of the resistance wire is 8-10 KW/m2.

9 . The vacuum coating device according to claim 8 , wherein the pressure stabilizing plate is set to be of a porous structure, and wherein a ratio of a total hole area S total hole area of the pressure stabilizing plate to an airflow channel area S outlet at an outlet of the coating nozzle is greater than or equal to 0.1, such that
S total hole area /S outlet ≥0.1.

10 . The vacuum coating device according to claim 9 , wherein the holes in the pressure stabilizing plate are circular, square or triangular shape.

11 . The vacuum coating device according to claim 10 , wherein the holes in the pressure stabilizing plate extend in a straight or curved line.

12 . The vacuum coating device according to claim 6 , wherein as a pressure of the metal steam in the metal steam pipeline is increased,
a value of L 1 /L 3 is increased, wherein L 1 is the length of the primary guide plate and L 3 is the length of the tertiary guide plate, a value of L 2 /L 3 is increased, wherein L 2 is the length of the secondary guide plate, a value of h is reduced, wherein h is a length of each opening hole in the secondary guide plate or each opening hole in the tertiary guide plate, a value of d is increased, wherein d is a distance between adjacent opening holes in the secondary guide plate or between adjacent opening holes in the tertiary guide plate, and wherein a power of the resistance wire is increased.

13 . The vacuum coating device according to claim 12 ,
wherein when the pressure of the metal steam in the metal steam pipeline is 50000-100000 Pa, L 1 /L 3 =0.3-0.4, L 2 /L 3 =0.6-0.7, h=2-4 mm, d=12-15 mm, and the power of the resistance wire is 15-20 KW/m2; wherein when the pressure of the metal steam in the metal steam pipeline is 10000-50000 Pa, L 1 /L 3 =0.25-0.3, L 2 /L 3 =0.5-0.6, h=3-5 mm, d=10-12 mm, and the power of the resistance wire is 10-15 KW/m2; wherein when the pressure of the metal steam in the metal steam pipeline is 1000-10000 Pa, L 1 /L 3 =0.2-0.25, L 2 /L 3 =0.4-0.5, h=4-6 mm, d=8-10 mm, and the power of the resistance wire is 8-10 KW/m2.

14 . The vacuum coating device according to claim 1 , wherein an angle between the primary guide plate and the secondary guide plate is 15°-45°, and an angle between the secondary guide plate and the tertiary guide plate is 20°-45°.

15 . The vacuum coating device according to claim 1 , wherein an outlet of the coating nozzle is set to be of a slit type or a porous type;
wherein an airflow channel area at the outlet of the coating nozzle is S outlet ; an airflow channel area at an interface of the top of the crucible and the metal steam pipeline is S inlet , wherein a ratio of S outlet to S inlet is greater than or equal to 0.05, such that S outlet /S inlet ≥0.05.

16 . The vacuum coating device according to claim 15 , wherein the coating nozzle is of the slit type and has a straight or curved profile; or wherein the coating nozzle is of the porous type, and has a rectangular, circular or trapezoidal profile.

17 . The vacuum coating device according to claim 1 , wherein the core rod is connected to the flow distribution tank body by means of threads or inlaying.

Assignees

• Baoshan Iron & Steel

Inventors

• Ren Sanbing
• Li Shanqing
• Fan Junfei
• Xiong Fei
• Jin Xiaoli

Classifications

• C23C14/562

  for coating elongated substrates · CPC title

• C23C14/26

  by resistance or inductive heating of the source · CPC title

• C23C14/16 Primary

  on metallic substrates or on substrates of boron or silicon · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• C23C14/24 Primary

  Vacuum evaporation · CPC title