CMP pad having ultra expanded polymer microspheres

Patent metadata

Field	Value
Publication number	US-12528152-B2
Application number	US-202217805037-A
Country	US
Kind code	B2
Filing date	Jun 2, 2022
Priority date	Jun 2, 2022
Publication date	Jan 20, 2026
Grant date	Jan 20, 2026

Abstract

A polishing pad for chemical mechanical polishing comprises a polishing layer which comprises a polymer matrix which is the reaction product of an isocyanate terminated oligomer or polymer, with a curative blend comprising two or more polyamine curatives wherein pores are present in the polymer matrix, such pores being formed by expansion of pre-expanded fluid filled polymeric microspheres such expansion occurring during reaction of the isocyanate terminated oligomer or polymer with the two or more curatives, wherein the polishing layer is characterized by one or more of a ratio of shear loss modulus (G″) at 104° C. to shear loss modulus (G″) at 150° C. of at least 5:1; and a specific gravity of the polishing layer is less than or equal to 95% of a calculated specific gravity for the isocyanate terminated oligomer or polymer, the curative blend and the pre-expanded fluid filled polymeric microspheres.

First claim

What is claimed is:

1 . A polishing pad for chemical mechanical polishing comprising:
a polishing layer which comprises a polyurethane matrix and 1.63 to 3.9 weight percent of pre-expanded fluid filled polymeric microspheres, the polyurethane matrix is the reaction product of an isocyanate-terminated oligomer or polymer with a curative blend comprising two or more polyamine curatives, wherein pores are present in the polyurethane matrix, such pores being formed by expansion of the pre-expanded fluid filled polymeric microspheres, wherein such expansion occurring during the reaction of the isocyanate-terminated oligomer or polymer with the two or more curatives, wherein
the curative blend comprises a mono-aromatic polyamine curative and a polyamine curative having two or more aromatic rings and wherein the mono-aromatic polyamine curative comprises, dimethylthiotoluenediamine, monomethylthiotoluenediamine, or both, and the polyamine curative having two or more aromatic rings comprises 4,4′-methylene-bis-o-chloroaniline, 4,4′-methylenebis-(3-chloro-2,6-diethylaniline), or both, wherein the mole ratio of the mono-aromatic polyamine curative to the polyamine curative having two or more aromatic rings is 25:75 to 75:25 and
wherein the polishing layer is characterized by
a ratio of shear loss modulus (G″) at 104° C. to shear loss modulus (G″) at 150° C. of about 9:1 to 22:1; and
an actual specific gravity of the polishing layer is less than or equal to 95% of a calculated specific gravity for the isocyanate-terminated oligomer or polymer, the curative blend and the pre-expanded fluid filled polymeric microspheres, and the actual specific gravity of the polishing layer is 0.55 to 0.9 g/cm 3 .

2 . The polishing pad of claim 1 wherein the polyurethane matrix has polyurethane soft segment domains and polyurea-polyurethane hard segment domains.

3 . The polishing pad of claim 1 wherein the polyamine curative having two or more aromatic rings is the 4,4′-methylene-bis-o-chloroaniline.

4 . The polishing pad of claim 1 wherein the isocyanate terminated oligomer or polymer includes a polyether, polyester, polyethylene glycol, polypropylene glycol, polycaprolactone, polycarbonate, or a combination thereof.

5 . The polishing pad of claim 1 wherein the mole ratio of the monoaromatic polyamine curative to the polyamine curative having two or more aromatic rings is 30:70 to 70:30.

6 . The polishing pad of claim 1 wherein the polishing layer has the actual specific gravity of 0.55 to 0.72 g/cm 3 .

7 . The polishing pad of claim 1 wherein the polishing layer has an average pore size is 10% greater than the pore size of the pre-expanded fluid filled polymeric microspheres.

8 . A method comprising providing a substrate comprising Tungsten, polishing the substrate using the polishing pad of claim 1 .

Assignees

• Rohm & Haas Elect Materials Cmp Holdings Inc

Inventors

• Chiou Nan-Rong

Classifications

• C08G18/3237

  aromatic (C08G18/3234 takes precedence) · CPC title

• B24D3/32

  for porous or cellular structure · CPC title

• C08G18/40

  High-molecular-weight compounds {(C08G18/2805 takes precedence)} · CPC title

• B24D3/28

  Resins {or natural or synthetic macromolecular compounds (B24D3/22 takes precedence)} · CPC title

• C08G18/10

  Prepolymer processes involving reaction of isocyanates or isothiocyanates with compounds having active hydrogen in a first reaction step · CPC title