Electrostatic chuck device
US-2021268616-A1 · Sep 2, 2021 · US
Joined body and electrostatic chuck
US12528131B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12528131-B2 |
| Application number | US-202117922539-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 11, 2021 |
| Priority date | Jun 26, 2020 |
| Publication date | Jan 20, 2026 |
| Grant date | Jan 20, 2026 |
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- Title
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Abstract
Official abstract text for this publication.
A joined body includes a first member, a second member, and a joining portion disposed therebetween and joining the first member and the second member. The joining portion includes a first joining layer on a side toward the first member and formed of a first joining material, a second joining layer on a side toward the second member and formed of a second joining material, and a metal layer therebetween and having a plurality of holes communicating with one another. The metal layer includes a first-joining-material-impregnated layer on a side toward the first joining layer and in which the plurality of holes are impregnated with the first joining material, a second-joining-material-impregnated layer on a side toward the second joining layer and in which the plurality of holes are impregnated with the second joining material, and an unfilled hole layer therebetween and in which the plurality of holes are void.
First claim
Opening claim text (preview).
What is claimed is: 1 . A joined body comprising: a flat plate-shaped first member; a flat plate-shaped second member; and a joining portion disposed between the first member and the second member and joining the first member and the second member together, wherein the joining portion includes a first joining layer formed of a first joining material and disposed on a side toward the first member, a second joining layer formed of a second joining material and disposed on a…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H10P72/7624Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US12528131B2 cover?
- A joined body includes a first member, a second member, and a joining portion disposed therebetween and joining the first member and the second member. The joining portion includes a first joining layer on a side toward the first member and formed of a first joining material, a second joining layer on a side toward the second member and formed of a second joining material, and a metal layer the…
- Who is the assignee on this patent?
- Ngk Spark Plug Co, Niterra Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/7624. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 20 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).