Nanoscale thermometry

Patent metadata

Field	Value
Publication number	US-12523540-B2
Application number	US-202118040194-A
Country	US
Kind code	B2
Filing date	Jun 29, 2021
Priority date	Aug 6, 2020
Publication date	Jan 13, 2026
Grant date	Jan 13, 2026

Abstract

A nanoscale temperature detector including a diamond sensing probe with a transverse dimension of at least 200 nanometres and a sensing tip-having a curvature radius of less than 100 nanometres, less than 10 nanometres or less than 1 nanometre, and a plurality of colour centres, whose emission count rate show temperature-sensitive features. The diamond sensing probe has a transverse dimension of at least 200 nanometres and is connected to a to a detector system by means of a mounting structure. A thermal isolation barrier thermally decouples the sensing probe from the detector system.

First claim

The invention claimed is:

1 . A nanoscale temperature detector comprising
a diamond sensing probe with a sensing tip having a curvature radius (R) of less than 100 nanometres, or less than 10 nanometres, or less than 1 nanometre, and comprising up to 100 ppm colour centres, whose emission count rate show temperature-sensitive features,
wherein the diamond sensing probe is configured to optically guide a light emitted by the colour centres,
wherein the diamond sensing probe has a transverse dimension of at least 200 nanometres, the nanoscale temperature detector further comprising
a mounting structure connectable to a detector system, and a thermal isolation barrier thermally decoupling the sensing probe from said detector system.

2 . The nanoscale temperature detector of claim 1 , whereby the plurality of colour centres are NV (nitrogen-vacancy) defects whose electron spin resonance spectra show temperature-sensitive features.

3 . The nanoscale temperature detector of claim 1 , wherein the colour centres are distributed across the sensing probe.

4 . The nanoscale temperature detector of claim 1 , wherein the colour centres are localised in a region with a separation distance from the tip no more than 1 micrometre.

5 . The nanoscale temperature detector of claim 1 , wherein the sensing probe is connected to a diamond holding structure.

6 . The nanoscale temperature detector of claim 1 , wherein the sensing probe is formed of a single crystal diamond material.

7 . The nanoscale temperature detector of claim 5 , wherein the sensing probe and said diamond holding structure are formed of a single crystal diamond material.

8 . The nanoscale temperature detector of claim 1 , wherein the shape of the sensing probe features a conical or pyramidal shape with a sharp apex, and a sidewall inclination angle between 0° and 45°.

9 . The nanoscale temperature detector of claim 7 , wherein the shape of the sensing probe features a conical or pyramidal shape with a sharp apex and a sidewall inclination angle between 0° and 45°.

10 . The nanoscale temperature detector of claim 5 , wherein the thermal isolation barrier consists of the same single crystal diamond material as the diamond holding structure featuring structural impediments to thermal conduction, such as a decreased thickness or decreased width, or a phononic structure, or an isotopically modulated diamond structure, or a porous structure, or a grid structure, or other suitable changes in structure.

11 . The nanoscale temperature detector of claim 1 , wherein the thermal isolation barrier consists of a material with low thermal conductivity, such as quartz or a low-density material.

12 . A method of manufacturing the nanoscale temperature detector according to claim 1 , comprising a series of lithography and dry etching, commonly known as “plasma etching”, steps to shape the diamond crystal in the desired shape, produce the sensor probe containing NV centres and release the shape from the diamond host.

13 . A detector system comprising a nanoscale temperature detector of claim 1 , further comprising
an optical excitation source configured to excite the colour centres a microwave source configured to direct microwaves towards the colour centres the mounting structure to positioning the sensing probe in relation to a heat source sample an optical detector capable of measuring the light emitted by the colour centres.

14 . A detector system according to claim 13 , wherein the optical excitation source is a laser or an LED tuneable to a wavelength less than 575 nm, typically a wavelength of 515 nm or 532 nm.

15 . A detector system according to claim 13 , wherein the optical detector is a confocal microscope 9 integrated in a scanning atomic force microscope (AFM).

16 . A method employing the detector system according to claim 13 comprising:
movably positioning the sensor tip in proximity of or in contact with the surface of a heat source,
applying one or more optical pulse generated by the optical excitation source to the colour centres to polarize the ground electronic spin state,
applying continuously or a plurality of microwave pulses to the colour centres of the sensing probe to alter the spin population,
measuring the spin-state-dependent fluorescence rate of the colour centres,
determining the temperature of the heat-source based on the measured spin-state-dependent emission photon count rate.

17 . The nanoscale temperature detector of claim 1 , whereby the plurality of colour centres are NV (nitrogen-vacancy) defects whose electron spin resonance spectra show a temperature-dependent zero-field splitting of its ground electronic spin state.

18 . The nanoscale temperature detector of claim 1 , wherein the shape of the sensing probe features a conical or pyramidal shape with a maximum transversal dimension between 200 nanometres and 500 nanometres, and a sidewall inclination angle between 5° and 30°.

19 . The nanoscale temperature detector of claim 7 , wherein the shape of the sensing probe features a conical or pyramidal shape with a maximum transversal dimension between 200 nanometres and 500 nanometres, and a sidewall inclination angle between 5° and 30°.

Assignees

• Qnami Ag
• Centre Nat Rech Scient
• Univ Montpellier

Inventors

• Munsch Mathieu
• Maletinsky Patrick
• Favaro De Oliveira Felipe
• Tanos Rana
• Jacques Vincent
• Robert-Philip Isabelle

Classifications

• G01N27/283

  Means for supporting or introducing electrochemical probes · CPC title

• G01K2211/00

  Thermometers based on nanotechnology · CPC title

• G01K11/20

  using thermoluminescent materials (G01K11/32 takes precedence) · CPC title

• G01K11/12

  using changes in colour, translucency or reflectance · CPC title

• G01K1/14 Primary

  Supports; Fastening devices; Arrangements for mounting thermometers in particular locations · CPC title