Polygon mirror

Patent metadata

Field	Value
Publication number	US-12517347-B2
Application number	US-202217713316-A
Country	US
Kind code	B2
Filing date	Apr 5, 2022
Priority date	Apr 16, 2021
Publication date	Jan 6, 2026
Grant date	Jan 6, 2026

Abstract

A polygon mirror that includes a top surface, a bottom surface, and a plurality of reflective surfaces disposed between the top surface and the bottom surface. Each reflective surface of the plurality of reflective surfaces forms an angle θ with an adjacent reflective surface. Additionally, each reflective surface of the polygon mirror has an RMS surface roughness of about 1.5 nm or less.

First claim

What is claimed is:

1 . A polygon mirror comprising:
a top surface and a bottom surface; and a plurality of reflective surfaces disposed between the top surface and the bottom surface, each reflective surface of the plurality of reflective surfaces forming an angle θ with an adjacent reflective surface, wherein each reflective surface has an RMS surface roughness of about 1.5 nm or less, and wherein the polygon mirror has a density of less than about 2.7 g/cc.

2 . The polygon mirror of claim 1 , wherein the RMS surface roughness is about 1.0 nm or less.

3 . The polygon mirror of claim 2 , wherein the RMS surface roughness is about 0.5 nm or less.

4 . The polygon mirror of claim 1 , wherein the polygon mirror is formed of a glass, glass ceramic, or ceramic material.

5 . The polygon mirror of claim 4 , wherein the polygon mirror is formed of silica glass.

6 . The polygon mirror of claim 5 , wherein the polygon mirror is formed of silica glass with 90 wt. % or more of silica.

7 . The polygon mirror of claim 5 , wherein the polygon mirror is formed of aluminosilicate glass, alkali aluminosilicate glass, alkaline aluminosilicate glass, borosilicate glass, boro-aluminosilicate glass, alkali aluminoborosilicate glass, alkaline aluminoborosilicate glass, or combinations thereof.

8 . The polygon mirror of claim 5 , wherein the polygon mirror is formed of high purity fused silica glass.

9 . The polygon mirror of claim 1 , wherein the density is about 2.5 g/cc or less.

10 . The polygon mirror of claim 9 , wherein the density is about 2.2 g/cc or less.

11 . The polygon mirror of claim 1 , wherein the plurality of reflective surfaces each comprise a reflective coating.

12 . The polygon mirror of claim 11 , wherein the reflective coating is configured to reflect light in the IR, NIR, or visible wavelengths.

13 . The polygon mirror of claim 12 , wherein the reflective coating comprises aluminum, sapphire, gold, silver, chrome, copper, nickel, titanium, or combinations thereof.

14 . The polygon mirror of claim 12 , wherein the reflective coating comprises dielectric layers of alternating layers of low and high refractive index materials.

15 . The polygon mirror of claim 11 , wherein the reflective coating has a reflectance of about 99% or more across the IR, NIR, and visible wavelength spectrum.

16 . The polygon mirror of claim 1 , further comprising a blocking coating disposed on the reflective surfaces.

17 . The polygon mirror of claim 16 , wherein the blocking coating comprises Al, Au, Ag, Cr, Si, CrON, or combinations thereof.

18 . The polygon mirror of claim 1 , wherein the angle θ is in a range from about 60° to about 120°.

19 . The polygon mirror of claim 18 , wherein the angle θ is about 90°.

Assignees

• Corning Inc

Inventors

• Bhatia Vikram
• Katare Ravikumar Gopalrao
• Mukhtar Imran
• Park Sang Ki

Classifications

• G01S7/4817

  relating to scanning · CPC title

• G01S17/931

  of land vehicles · CPC title

• G02B5/09

  Multifaceted or polygonal mirrors {, e.g. polygonal scanning mirrors; Fresnel mirrors} · CPC title

• G02B26/129 Primary

  Systems in which the scanning light beam is repeatedly reflected from the polygonal mirror · CPC title

• G02B26/12 Primary

  using multifaceted mirrors · CPC title