Sensitive film for nanomechanical sensor using poly(2,6-diphenyl-p-phenylene oxide), nanomechanical sensor having said sensitive film, method for coating said sensitive film on nanomechanical sensor, and method for restoring sensitive film of said nanomechanical sensor

Patent metadata

Field	Value
Publication number	US-12517036-B2
Application number	US-202017605342-A
Country	US
Kind code	B2
Filing date	Apr 14, 2020
Priority date	Apr 26, 2019
Publication date	Jan 6, 2026
Grant date	Jan 6, 2026

Abstract

The present invention provides a nanomechanical sensor unsusceptible to water vapor, due to very low sensitivity to water vapor, that may interfere with measurement. In an embodiment of the present invention, as a sensitive film material of a nanomechanical sensor such as a surface stress sensor, poly(2,6-diphenyl-p-phenylene oxide) is utilized that is used for adsorption/concentration of a substance present in a trace amount in water or air, and represented by Formula (1) wherein n represents an integer of 1 or more. As can be seen from graphs showing changes over time of response signals in a case where a gas to be measured containing acetone, ethanol, and the like and nitrogen are alternately supplied to the surface stress sensor cyclically, it was confirmed that in the sensitive film of the present invention, adsorption/desorption of the components in the gas to be measured significantly occurs in response to the cyclic change, but the sensitivity to water is very low.

First claim

The invention claimed is:

1 . A method of using a sensitive film for a measurement using a nanomechanical sensor, the method comprising:
coating, on the nanomechanical sensor, a solution in which a material containing a compound represented by Formula (1) is dissolved in a solvent so that the sensitive film is formed,

wherein n represents an integer of 1 or more, wherein:
the material is selected based on its particle size and/or particle size distribution, and
during coating the solution, the temperature of the nanomechanical sensor is controlled such that adsorption and/or desorption characteristics of the sensitive film are controlled, and
performing the measurement using the nanomechanical sensor, wherein:
a sample gas containing a component as a target to be measured and a purge gas are alternately and/or cyclically supplied to the nanomechanical sensor, wherein a temperature of the sample gas and the purge gas is set to a predetermined temperature and a temperature of a measurement system is adjusted to the predetermined temperature so that the temperature of the sample gas and the purge gas is maintained until each of the sample gas and the purge gas is supplied to the nanomechanical sensor, and
during supplying the sample gas at the predetermined temperature, the compound adsorbs the component from the sample gas, and, during supplying the purge gas at the predetermined temperature, the compound desorbs the component, wherein, with respect to a plurality of different sample gases, a relative sensitivity of the sensitive film changes depending on the adsorption and/or desorption characteristics of the sensitive film.

2 . The method according to claim 1 , wherein the solution is coated on the nanomechanical sensor with an inkjet method.

3 . The method according to claim 1 , wherein the solvent is trichloroethylene.

4 . The method according to claim 1 , wherein the temperature of the nanomechanical sensor is kept at 20° C. to 100° C.

5 . The method according to claim 1 , wherein the measurement is performed using an output signal from the nanomechanical sensor resulting from adsorption and desorption of the component to and from the sensitive film comprising the compound on the nanomechanical sensor, wherein, with respect to the plurality of different sample gases, an output signal waveform changes depending on the adsorption and/or desorption characteristics of the sensitive film.

6 . The method according to claim 5 , wherein the measurement is performed using both an output signal during supplying the sample gas at the predetermined temperature and an output signal during supplying the purge gas at the predetermined temperature.

7 . The method according to claim 1 , further comprising, after performing the measurement using the nanomechanical sensor, a step of raising a temperature of the sensitive film of the nanomechanical sensor to a temperature from 200° C. to 400° C.

8 . The method according to claim 1 , wherein the nanomechanical sensor is a surface stress sensor.

9 . The method according to claim 8 , wherein, during coating the solution, a substrate temperature of the surface stress sensor is controlled such that adsorption and/or desorption characteristics of the sensitive film are controlled.

10 . The method according to claim 9 , wherein the substrate temperature of the surface stress sensor is kept at 20° C. to 100° C.

11 . The method according to claim 10 , wherein the substrate temperature of the surface stress sensor is kept at 20° C. to 80° C.

Assignees

• Nat Inst Materials Science

Inventors

• Yoshikawa Genki
• SHIBA Kota

Classifications

• C08J2371/12

  Polyphenylene oxides · CPC title

• C08J5/18

  Manufacture of films or sheets · CPC title

• C08J7/0427

  with only one layer of a composition containing a polymer binder (with more layers C08J7/042) · CPC title

• C08L71/12

  Polyphenylene oxides · CPC title

• G01L1/18

  using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material · CPC title