Coated tool

Patent metadata

Field	Value
Publication number	US-12508663-B2
Application number	US-202218269299-A
Country	US
Kind code	B2
Filing date	Feb 9, 2022
Priority date	Feb 12, 2021
Publication date	Dec 30, 2025
Grant date	Dec 30, 2025

Abstract

A coated tool of the present invention includes a base material; and a hard coating film on the base material. The hard coating film is a nitride or carbonitride which contains aluminum (Al) of 65 atomic % or more and 90 atomic % or less and titanium (Ti) of 10 atomic % or more and 35 atomic % or less with respect to a total amount of metal (including metalloid) elements, and have a face-centered cubic structure. In the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (111) plane of the face-centered cubic structure, the hard coating film have a maximum intensity Ia in the α angle range of 80° to 90° and an intensity in the α angle range of 0° to 70° is 30% or less of the Ia.

First claim

The invention claimed is:

1 . A coated tool comprising:
a base material; and a hard coating film on the base material, wherein the hard coating film is a film deposited by arc ion plating or sputtering, the hard coating film is a nitride or carbonitride which contains aluminum (Al) of 65 atomic % or more and 90 atomic % or less and titanium (Ti) of 10 atomic % or more and 35 atomic % or less with respect to a total amount of metal (including metalloid) elements, and have a face-centered cubic structure, and wherein, in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (111) plane of the face-centered cubic structure, the hard coating film have a maximum intensity Ia in the α angle range of 80° to 90° and an intensity in the α angle range of 0° to 70° is 30% or less of the Ia.

2 . The coated tool according to claim 1 ,
wherein the intensity in the α angle range of 0° to 70° is 20% or less of the Ia.

3 . The coated tool according to claim 1 ,
wherein in the hard coating film, a peak intensity of the (111) plane of face-centered cubic lattice structure exhibits maximum intensity in the intensity profile of an X-ray diffraction or limited field diffraction pattern of transmission electron microscopy.

4 . The coated tool according to claim 1 ,
wherein the hard coating film has no peaks other than in the α angle range of 80° to 90° in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (111) plane of the face-centered cubic lattice structure.

5 . The coated tool according to claim 1 ,
wherein in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (200) plane of the face-centered cubic lattice structure of the hard coating film, the maximum intensity Ib is exhibited in the α angle range of 20° to 50°.

6 . The coated tool according to claim 1 ,
wherein in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (200) plane of the face-centered cubic lattice structure of the hard coating film, no peaks are exhibited other than in the α angle range of 20° to 50°.

7 . The coated tool according to claim 1 ,
wherein the hard coating film contains 0.20 atomic % or less of argon (Ar) with respect to a total amount of metal and non-metallic elements.

8 . The coated tool according to claim 1 ,
wherein the hard coating film has compressive residual stress.

9 . The coated tool according to claim 1 ,
wherein the hard coating film has 5 or less droplets having a circular equivalent diameter of 1 μm or more per 100 μm 2 in cross-sectional observation.

10 . The coated tool according to claim 2 ,
wherein in the hard coating film, a peak intensity of the (111) plane of face-centered cubic lattice structure exhibits maximum intensity in the intensity profile of an X-ray diffraction or limited field diffraction pattern of transmission electron microscopy.

11 . The coated tool according to claim 2 ,
wherein the hard coating film has no peaks other than in the α angle range of 80° to 90° in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (111) plane of the face-centered cubic lattice structure.

12 . The coated tool according to claim 3 ,
wherein the hard coating film has no peaks other than in the α angle range of 80° to 90° in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (111) plane of the face-centered cubic lattice structure.

13 . The coated tool according to claim 2 ,
wherein in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (200) plane of the face-centered cubic lattice structure of the hard coating film, the maximum intensity Ib is exhibited in the α angle range of 20° to 50°.

14 . The coated tool according to claim 3 ,
wherein in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (200) plane of the face-centered cubic lattice structure of the hard coating film, the maximum intensity Ib is exhibited in the α angle range of 20° to 50°.

15 . The coated tool according to claim 2 ,
wherein in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (200) plane of the face-centered cubic lattice structure of the hard coating film, no peaks are exhibited other than in the α angle range of 20° to 50°.

16 . The coated tool according to claim 3 ,
wherein in the X-ray intensity distribution of the α axis of the positive pole figure with respect to the (200) plane of the face-centered cubic lattice structure of the hard coating film, no peaks are exhibited other than in the α angle range of 20° to 50°.

17 . The coated tool according to claim 2 ,
wherein the hard coating film contains 0.20 atomic % or less of argon (Ar) with respect to a total amount of metal and non-metallic elements.

18 . The coated tool according to claim 3 ,
wherein the hard coating film contains 0.20 atomic % or less of argon (Ar) with respect to a total amount of metal and non-metallic elements.

19 . The coated tool according to claim 2 ,
wherein the hard coating film has compressive residual stress.

20 . The coated tool according to claim 2 ,
wherein the hard coating film has 5 or less droplets having a circular equivalent diameter of 1 μm or more per 100 μm 2 in cross-sectional observation.

Assignees

• Moldino Tool Engineering Ltd
• Oerlikon Surface Solutions Ag Pfaffikon

Inventors

• Sasaki Tomoya
• Kubota Kazuyuki
• YALAMANCHILI Kumar
• Kurapov Denis
• Kalss Wolfgang

Classifications

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• C23C14/0664

  Carbonitrides · CPC title

• C23C14/0617

  AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi · CPC title

• C23C14/022

  by means of bombardment with energetic particles or radiation · CPC title

• B23C2224/36

  Titanium nitride · CPC title