Transistor structure with reduced leakage current and adjustable on/off current

Patent metadata

Field	Value
Publication number	US-12507432-B2
Application number	US-202318111899-A
Country	US
Kind code	B2
Filing date	Feb 21, 2023
Priority date	Apr 19, 2019
Publication date	Dec 23, 2025
Grant date	Dec 23, 2025

Abstract

A transistor structure includes a gate, a spacer, a channel region, a first concave, and a first conductive region. The gate is above a silicon surface. The spacer is above the silicon surface and at least covers a sidewall of the gate. The channel region is under the silicon surface. The first conductive region is at least partially formed in the first concave, wherein a conductive region of a neighborhood transistor structure next to the transistor structure is at least partially formed in the first concave.

First claim

What is claimed is:

1 . A transistor structure comprising:
a substrate with a semiconductor surface; a gate above the semiconductor surface; a spacer above the semiconductor surface and covering a sidewall of the gate; a channel region, wherein at least part of the channel region is under the gate; a concave formed based on the semiconductor surface; a first insulation layer formed in the concave; a first conductive region electrically coupled to one terminal of the channel region, wherein the first conductive region is above the first insulation layer; a second conductive region electrically coupled to another terminal of channel region; and a metal plug filled in the concave, wherein the metal plug at least contacts to a most lateral side of the first conductive region.

2 . The transistor structure in claim 1 , wherein the transistor structure is an asymmetric transistor, a first doping concentration profile of the first conductive region along a first extension direction is different from a second doping concentration profile of the second conductive region along a second extension direction.

3 . The transistor structure in claim 1 , wherein the transistor structure is an asymmetric transistor, a structure between the gate and the first conductive region is different from a structure between the gate and the second conductive region.

4 . The transistor structure in claim 1 , wherein the transistor structure is an asymmetric transistor, the first conductive region comprises a first lower part under the silicon surface and the second conductive region comprises a second lower part under the silicon surface, and a thickness of the first lower part is different from a thickness of the second lower part.

5 . The transistor structure in claim 1 , wherein the transistor structure is an asymmetric transistor, a width of the one terminal of the channel region next to the first conductive region is different from a width of the another terminal of the channel region next to the second conductive region.

6 . The transistor structure in claim 1 , wherein the transistor structure is an asymmetric transistor, a material of the first conductive region is different from a material of the second conductive region.

7 . A transistor structure comprising:
a substrate with an original surface; a channel region; a gate region above the channel region; a shallow trench isolation region; a first conductive region between the gate region and the shallow trench isolation region, the first conductive region electrically contacted to the channel region; and a metal region between the gate region and the shallow trench isolation region; wherein a most lateral side and a top side of the first conductive region contact to the metal region.

8 . The transistor structure in claim 7 , further comprising a concave under the original surface, wherein at least part of the first conductive region is disposed in the concave, and at least part of the metal region is disposed in the concave.

9 . The transistor structure in claim 8 , wherein an isolator is disposed in the concave and under a bottom of the first conductive region, and the isolator comprises a lateral portion on the bottom pf the concave and a upward portion underneath the bottom of the first conductive region, wherein a top surface of the lateral portion of the isolator is lower than a top surface of the upward portion of the isolator.

10 . A transistor structure comprising:
a gate above a silicon surface; a spacer covering a sidewall of the gate; a channel region, wherein at least part of the channel region is under the gate and the spacer; and a first conductive region formed between the spacer and a side insulation layer, and extending upward along and contacting to the spacer, wherein a part of a sidewall of the first conductive region is covered by the side insulation layer, and the first conductive region comprises a first upper part, a second upper part and a lower part, wherein the first upper part and the second upper part contact to the spacer, and the lower part contacts to the channel region and is positioned on the bottom insulation layer; wherein a bottom insulation layer is formed in a first concave and the first conductive region is positioned on the bottom insulation layer.

11 . The transistor structure of claim 10 , wherein the first conductive region is partially formed in the first concave and the side insulation layer is partially formed in the first concave.

12 . The transistor structure of claim 10 , further comprising a contact region at least partially formed in the first concave, wherein the second upper part of the first conductive region contacts with the contact region, and the first upper part and the lower part of the first conductive region are separated from the contact region by the side insulation layer.

13 . The transistor structure of claim 10 , wherein the first conductive region comprises silicon, silicon-carbide (SiC), or silicon-germanium (SiGe).

14 . A transistor structure comprising:
a gate above a silicon surface; a spacer covering a sidewall of the gate; a channel region, wherein at least part of the channel region is under the gate and the spacer; a first conductive region formed between the spacer and a side insulation layer, and extending upward along and contacting to the spacer, wherein a part of a sidewall of the first conductive region is covered by the side insulation layer; a second conductive region partially formed in a second concave; another side insulation layer partially formed in the second concave; and another contact region partially formed in the second concave; wherein the second conductive region comprises a first upper part, a second upper part and a lower part, the lower part of the second conductive region contacts to the channel region, the second upper part of the second conductive region contacts with the another contact region, and the first upper part and the lower part of the second conductive region are separated from the another contact region by the another side insulation layer.

15 . The transistor structure of claim 14 , further comprising another spacer covering another sidewall of the gate, wherein a length of the channel region is not less than a sum of lengths of the gate, the spacer, and the another spacer.

16 . The transistor structure of claim 15 , wherein the spacer and the another spacer are re-growth spacers.

17 . The transistor structure of claim 15 , further comprising an LDD zone positioned underneath the spacer.

Assignees

• Etron Tech Inc
• Invent And Collaboration Laboratory Pte Ltd

Inventors

• Lu chao-chun
• Huang Li-Ping

Classifications

• H10D62/371

  Inactive supplementary semiconductor regions, e.g. for preventing punch-through, improving capacity effect or leakage current · CPC title

• H10D30/603

  having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS] · CPC title

• H10D30/601

  having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  (lightly doped source or drain extensions for TFTs H10D30/6715) · CPC title

• H10D30/62

  Fin field-effect transistors [FinFET] · CPC title

• H10D64/021

  using multiple gate spacer layers, e.g. bilayered sidewall spacers · CPC title