Air pocket structures for promoting total internal reflection in a waveguide

Patent metadata

Field	Value
Publication number	US-12498581-B2
Application number	US-202418679328-A
Country	US
Kind code	B2
Filing date	May 30, 2024
Priority date	Dec 21, 2018
Publication date	Dec 16, 2025
Grant date	Dec 16, 2025

Abstract

Recesses are formed on a front side and a rear side of a waveguide. A solid porogen material is spun onto the front side and the rear side and fills the recesses. First front and rear cap layers are then formed on raised formations of the waveguide and on the solid porogen material. The entire structure is then heated and the solid porogen material decomposes to a porogen gas. The first front and rear cap layers are porous to allow the porogen gas to escape and air to enter into the recesses. The air maximizes a difference in refractive indices between the high-index transparent material of the waveguide and the air to promote reflection in the waveguide from interfaces between the waveguide and the air.

First claim

What is claimed:

1 . A method of manufacturing an optical system comprising:
securing a cap layer of a select transparent material to a waveguide of a high-index transparent material having front and rear sides by forming a stack that includes the waveguide, a solid porogen material and the cap layer, multiple cavities being defined between the cap layer and the waveguide, the cavities alternated with raised formations, with the solid porogen material in each cavity; heating the solid porogen material to a decomposition temperature wherein the solid porogen material turns into a sacrificial gas in each cavity; simultaneously removing the sacrificial gas from the cavities, wherein the select material of the cap layer is porous and the sacrificial gas outgasses through the select material of the cap layer; and simultaneously replacing the solid porogen material with an gaseous body in cavity, such that, if a source of ambient light is located on the front side of the waveguide, a beam of the ambient light transmits in the select transparent material of the cap layer, in the cavity holding the gaseous body and in the high-index transparent material of the waveguide, and if a beam of projected light is introduced to the waveguide, the beam of projected light is transmitted internally inside the waveguide by reflecting off walls of the waveguide defined by the cavities.

2 . The method of claim 1 , wherein the cap layer is a front cap layer located between the source of ambient light and the front side of the waveguide and the beam of the ambient light transmits sequentially through the select transparent material of the front cap layer, through the cavity holding the gaseous body and into the high-index transparent material of the waveguide.

3 . The method of claim 2 , wherein the select transparent material of the front cap layer is an anti-reflective material that increases absorption of the ambient light by the front surface of the waveguide and reduces reflection of the ambient light by the front surface of the waveguide.

4 . The method of claim 3 , wherein the high-index transparent material is one of high-index glass, high-index lithium niobate, lithium tantalite and silicon carbide.

5 . The method of claim 3 , wherein the high-index transparent material has a refractive index of at least 1.74.

6 . The method of claim 1 , wherein the gaseous body has an index of refraction of less than 1.3.

7 . The method of claim 1 , wherein the gaseous body is air with an index of refraction of 1.

8 . The method of claim 1 , wherein the solid porogen material decomposes at a decomposition temperature of between 120° C. and 230° C.

9 . The method of claim 1 , wherein the cap layer is made of SiOx having a thickness of at least 12 nm, wherein x is variable.

10 . The method of claim 1 , further comprising:
forming the front side of the waveguide to have a plurality of recesses and a plurality of raised formations, each raised formation being located between two of the recesses; and supporting first portions of the cap layer with the raised formations with second portions of the cap layer that are located between the first portions of the cap layer being located over the recesses so that a respective one of the cavities is defined by a respective one of the second portions of the cap layer and a respective one of the recesses in the front side of the waveguide.

11 . The method of claim 10 , wherein each recess has a depth and a width and the width is less than 300 microns.

12 . The method of claim 10 , wherein the recesses are imprinted on the front side.

13 . The method of claim 10 , further comprising:
conformally depositing a transparent layer on the front side of the waveguide.

14 . The method of claim 1 , wherein the cap layer is a front cap layer located between the source of ambient light and the front side of the waveguide and the cavity is a front cavity between the front cap layer and the front side of the waveguide, further comprising;
securing a rear cap layer of a select transparent material to the waveguide, a rear cavity being defined between the rear cap layer and the rear of the waveguide with a gaseous body in the rear cavity, such that, if a source of ambient light is located on the front side of the waveguide, a beam of the ambient light transmits in the high-index transparent material of the waveguide, in the rear cavity holding the gaseous body and in the select transparent material of the rear cap layer.

15 . The method of claim 1 , wherein the cap layer is a first cap layer and the select transparent material is a first select transparent material, further comprising:
securing a second cap layer of a second select transparent material to the first cap layer.

16 . The method of claim 15 , wherein the second cap layer is more rigid than the first cap layer.

17 . The method of claim 15 , wherein at least one of the select transparent materials of the cap layers is an anti-reflective material that increases absorption of the ambient light by the front surface of the waveguide and reduces reflection of the ambient light by the front surface of the waveguide.

18 . The method of claim 17 , further comprising:
forming a stack of cap layers having refractive indices that alter in magnitude.

19 . The method of claim 18 , wherein the cap layers are made of SiOx having a refractive index of 1.45 and TiOx having a refractive index between 2.2 and 2.3, wherein x is variable.

20 . An optical system comprising:
a waveguide of a high-index transparent material having front and rear sides; a cap layer of a select transparent material secured to the waveguide, multiple cavities being defined between the cap layer and the waveguide, the cavities alternated with raised formations; and a gaseous body in the cavity, such that, if a source of ambient light is located on the front side of the waveguide, a beam of the ambient light transmits in the select transparent material of the cap layer, in the cavity holding the gaseous body and in the high-index transparent material of the waveguide, and if a beam of projected light is introduced to the waveguide, the beam of projected light is reflected off walls of the waveguide defined by the cavities, wherein at least one of the select transparent materials of the cap layers is an anti-reflective material that increases absorption of the ambient light by the front surface of the waveguide and reduces reflection of the ambient light by the front surface of the waveguide, wherein the cap layers are made of SiOx having a refractive index of 1.45 and TiOx having a refractive index between 2.2 and 2.3, wherein x is variable.

Assignees

• Magic Leap Inc

Inventors

• Deng Xiaopei
• Singh Vikramjit
• Yang Shuqiang
• Luo Kang
• Pi Nai-Wen
• Xu Frank Y

Classifications

• G02B6/0011

  the light guides being planar or of plate-like form · CPC title

• G02B6/10

  of the optical waveguide type (G02B6/02, G02B6/24 take precedence; devices or arrangements for the control of light by electric, magnetic, electro-magnetic or acoustic means G02F1/00; transferring the modulation of modulated light G02F2/00; optical logic elements G02F3/00; optical analogue/digital converters G02F7/00) · CPC title

• G02B27/0081

  with means for altering, e.g. enlarging, the entrance or exit pupil · CPC title

• G02B2027/0174

  holographic · CPC title

• G02B6/13 Primary

  Integrated optical circuits characterised by the manufacturing method · CPC title