Method of manufacturing nano gap sensor using residual stress and nano gap sensor manufactured thereby
US-2016341688-A1 · Nov 24, 2016 · US
US12498286B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12498286-B2 |
| Application number | US-202217962704-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 10, 2022 |
| Priority date | Jun 16, 2022 |
| Publication date | Dec 16, 2025 |
| Grant date | Dec 16, 2025 |
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A gas leak detecting method includes a test article preparation operation of preparing a test article that includes a first coupling region, in which a second component is coupled to one side of a first component, and a second coupling region, in which a third component is coupled to one side of the second component, a test article arrangement operation of arranging the test article in an inner space of a body unit, and a sealing inspection operation of examining a gas discharged from the inner space and inspecting whether or not the first coupling region or the second coupling region is sealed. In the test article arrangement operation, each of the first coupling region and the second coupling region is located inside the inner space.
Opening claim text (preview).
The invention claimed is: 1 . A gas leak detecting method comprising: a test article preparation operation comprising: preparing a test article that comprises a first coupling region, in which a second component is coupled to one side of a first component; and a test article arrangement operation of arranging the test article in an inner space of a body unit; and a sealing inspection operation comprising: examining a gas discharged from the inner space; and inspecting whether the first coupling region or the second coupling region is sealed; wherein in the test article arrangement operation, the first coupling region is located inside the inner space; wherein a pipe member, in which a flow path is formed to communicate with the inner space, is inserted into and fixed to the body unit, and wherein the sealing inspection operation, further comprises inspecting whether a gas discharged from the inner space and flowing in the flow path is present. 2 . The gas leak detecting method of claim 1 , wherein the test article further comprises a second coupling region, in which a third component is coupled to one side of the second component, and wherein in the test article arrangement operation, the second coupling region is located inside the inner space. 3 . The gas leak detecting method of claim 2 , wherein the body unit comprises a silicone material, and wherein in the test article arrangement operation, the body unit is provided in contact with the test article so that the first coupling region and the second coupling region are sealed from the outside. 4 . The gas leak detecting method of claim 2 , wherein in the test article arrangement operation, a minimum cross-sectional area of the flow path is greater than a minimum cross-sectional area of a space between the test article and an inner surface of the body unit defining the inner space. 5 . The gas leak detecting method of claim 2 , wherein in the sealing inspection operation, whether the first coupling region or the second coupling region is sealed is inspected by using a reaction member provided on an inner surface of the pipe member defining the flow path, wherein the reaction member changes color when reacting with a certain gas. 6 . The gas leak detecting method of claim 2 , wherein in the sealing inspection operation, whether the first coupling region is sealed is inspected in a state in which the first coupling region communicates with the flow path while the second coupling region is disconnected from the flow path. 7 . The gas leak detecting method of claim 6 , wherein in the sealing inspection operation, the second coupling region is disconnected from the flow path by moving a blocking member that is movable in a space between the test article and an inner surface of the body unit defining the inner space. 8 . The gas leak detecting method of claim 2 , wherein the test article further comprises a third coupling region, in which a fourth component is coupled to one side of the first component, and a fourth coupling region, in which a fifth component is coupled to one side of the fourth component, and the inner space comprises a first inner space and a second inner space spaced apart from the first inner space, wherein in the test article arrangement operation, the first coupling region and the second coupling region are located in the first inner space, and the third coupling region and the fourth coupling region are located in the second inner space. 9 . The gas leak detecting method of claim 8 , wherein a first pipe member, in which a first flow path is formed to communicate with the first inner space, and a second pipe member, in which a second flow path is formed to communicate with the second inner space, are inserted into and coupled to the body unit, wherein the sealing inspection operation further comprises inspecting whether a gas discharged from the first inner space and flowing in the first flow path is present, and inspecting whether a gas discharged from the second inner space and flowing in the second flow path is present. 10 . A gas leak detecting device comprising: a test article to be inspected for leakage of a gas, the test article comprising a first coupling region in which a second component is coupled to one side of a first component; a body unit in which an inner space is formed to accommodate the test article; and a measurement member configured to measure the gas; wherein the first coupling region is located in the inner space; further comprising a pipe member inserted into the body unit, the pipe member having the flow path communicating with the inner space, and wherein the measurement member is connected to the pipe member. 11 . The gas leak detecting device of claim 10 , further comprising a reaction member which is provided on an inner surface of the pipe member defining the flow path, and wherein the reaction member has changes color when reacting with a certain gas. 12 . The gas leak detecting device of claim 11 , wherein the test article further comprises a second coupling region in which a third component is coupled to one side of the second component; wherein the test article further comprises a third coupling region, in which a fourth component is coupled to one side of the first component, and a fourth coupling region, in which a fifth component is coupled to one side of the fourth component, and the inner space comprises a first inner space and a second space spaced apart from the first space, and wherein the first coupling region and the second coupling region are located in the first inner space, and the third coupling region and the fourth coupling region are located in the second inner space. 13 . The gas leak detecting device of claim 12 , wherein the pipe member comprises: a first pipe member having a first flow path configured to communicate with the first inner space; and a second pipe member having a second flow path configured to communicate with the second inner space. 14 . The gas leak detecting device of claim 13 , further comprising a connection pipe member having one side connected to the first pipe member and the second pipe member, and an other side connected to the measure member. 15 . The gas leak detecting device of claim 10 , wherein the pipe member protrudes from the body unit. 16 . A gas leak detecting device comprising: a test article to be inspected for leakage of a gas, the test article comprising a first coupling region in which a second component is coupled to one side of a first component; a body unit in which an inner space is formed to accommodate the test article; and a measurement member configured to measure the gas; wherein the first coupling region is located in the inner space; and wherein the test article further comprises a second coupling region in which a third component is coupled to one side of the second component. 17 . The gas leak detecting device of claim 16 , further comprising a blocking member provided in a space between the test article and an inner surface of the body unit defining the inner space of the body unit, wherein the blocking member is movable in a space between the first coupling region and the second coupling region. 18 . The gas leak detecting device of claim 17 , wherein the blocking member comprises: a convex region having a shape that is convex outward; and a concave region on the opposite side from the convex region, the concave region having a shape that is concave toward the convex region. 19 . The gas
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