Etchant

Patent metadata

Field	Value
Publication number	US-12492340-B2
Application number	US-202318179919-A
Country	US
Kind code	B2
Filing date	Mar 7, 2023
Priority date	Mar 21, 2022
Publication date	Dec 9, 2025
Grant date	Dec 9, 2025

Abstract

An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; a first compound; and water, wherein the first compound is a compound containing: a sulfonic group, a sulfonic acid group, or a combination thereof; and an amine group, and an interfacial permeation inhibition index (Y) of the etchant is a value of at least about 0.10 and not more than about 0.35, the interfacial permeation inhibition index (Y) being a value calculated by Equation 1. The description of Equation 1 is as in the specification.

First claim

What is claimed is:

1 . An etchant comprising:
persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid;
a first compound; and water,
wherein the first compound is a compound comprising:
a sulfonic group, a sulfonic acid group, or a combination thereof; and
an amine group, and

an interfacial permeation inhibition index (Y) of the etchant is a value of at least about 0.10 and not more than about 0.35, the interfacial permeation inhibition index (Y) being a value calculated by <Equation 1>:
Y= 1.4×10 −4 ×M ( X 1)+1.3×10 −4 ×M ( X 2)+1.45×10 −3 ×M ( X 3)+1.5×10 −5 ×M ( X 1)× M ( X 2)+1.6×10 −3 ×M ( X 1)× M ( X 3)+6.5×10 −4 ×M ( X 2)× M ( X 3),  Equation 1

wherein, in Equation 1,
M(X1) indicates wt % of the first compound with respect to 100 wt % in total of the etchant,
M(X2) indicates wt % of the chlorine-containing compound with respect to 100 wt % in total of the etchant, and
M(X3) indicates wt % of the water with respect to 100 wt % in total of the etchant.

2 . The etchant of claim 1 , wherein the persulfate comprises ammonium persulfate, sodium persulfate, potassium persulfate, or one or more combinations thereof.

3 . The etchant of claim 1 , wherein the persulfate is ammonium persulfate.

4 . The etchant of claim 1 , wherein the fluorine-containing compound comprises aluminum fluoride, sodium fluoride, potassium fluoride, ammonium bifluoride, sodium bifluoride, potassium bifluoride, or one or more combinations thereof.

5 . The etchant of claim 1 , wherein the chlorine-containing compound comprises hydrochloric acid, sodium chloride, potassium chloride, ammonium chloride, iron (III) chloride, sodium perchlorate, potassium perchlorate, ethanesulfonyl chloride, methanesulfonyl chloride, or one or more combinations thereof.

6 . The etchant of claim 1 , wherein the cyclic amine compound comprises 5-aminotetrazole, imidazole, indole, purine, pyrazole, pyridine, pyrimidine, pyrrole, pyrrolidine, pyrroline, 5-methyltetrazole, 1-methyl-5-aminotetrazole, 1-ethyl-5-aminotetrazole, or one or more combinations thereof.

7 . The etchant of claim 1 , wherein the inorganic acid comprises nitric acid, sulfuric acid, phosphoric acid, phosphorous acid, or one or more combinations thereof.

8 . The etchant of claim 1 , wherein the first compound is a compound comprising a sulfonic group and an amine group, or is a compound comprising a sulfonic acid group and an amine group.

9 . The etchant of claim 1 , wherein the amine group is —NH 2 .

10 . The etchant of claim 1 , wherein the first compound is a compound represented by Formula 1:

wherein, in Formula 1, L 1 and L 2 are each independently single bond, *—O—*′, *—S—*′, a C 1 -C 20 alkylene group unsubstituted or substituted with at least one R 10a , a C 2 -C 20 alkenylene group unsubstituted or substituted with at least one R 10a , a C 3 -C 60 carbocyclic group unsubstituted or substituted with at least one R 10a , or a C 1 -C 60 heterocyclic group unsubstituted or substituted with at least one R 10a ,
a1 and a2 are each independently one of an integer from 0 to 3,
R 1 , Z 1 , and Z 2 are each independently hydrogen, deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a nitro group, a C 1 -C 60 alkyl group unsubstituted or substituted with at least one R 10a , a C 2 -C 60 alkenyl group unsubstituted or substituted with at least one R 10a , a C 2 -C 60 alkynyl group unsubstituted or substituted with at least one R 10a , a C 1 -C 60 alkoxy group unsubstituted or substituted with at least one R 10a , a C 3 -C 60 carbocyclic group unsubstituted or substituted with at least one R 10a , a C 1 -C 60 heterocyclic group unsubstituted or substituted with at least one R 10a , a C 6 -C 60 aryloxy group unsubstituted or substituted with at least one R 10a , a C 6 -C 60 arylthio group unsubstituted or substituted with at least one R 10a , —N(Q 1 )(Q 2 ), —B(Q 1 )(Q 2 ), —P(Q 1 )(Q 2 ), or —C(═O)(Q 1 ), but R 1 is not hydrogen,
Z 1 and Z 2 are optionally linked to each other via a single bond, a C 1 -C 5 alkylene group unsubstituted or substituted with at least one R 10a , or a C 2 -C 5 alkenylene group unsubstituted or substituted with at least one R 10a , to form a C 8 -C 60 polycyclic group unsubstituted or substituted with at least one R 10a , and
R 10a is deuterium (-D), —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, or a nitro group;
a C 1 -C 60 alkyl group, a C 2 -C 60 alkenyl group, a C 2 -C 60 alkynyl group, or a C 1 -C 60 alkoxy group, each being unsubstituted or substituted with deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a nitro group, a C 3 -C 60 carbocyclic group, a C 1 -C 60 heterocyclic group, a C 6 -C 60 aryloxy group, a C 6 -Coo arylthio group, —Si(Q 11 )(Q 12 )(Q 13 ), —N(Q 11 )(Q 12 ), —B(Q 11 )(Q 12 ), —C(═O)(Q 11 ), —S(═O) 2 (Q 11 ), —P(═O)(Q 11 )(Q 12 ), or one or more combinations thereof;
a C 3 -C 60 carbocyclic group, a C 1 -C 60 heterocyclic group, a C 6 -C 60 aryloxy group, or a C 6 -C 60 arylthio group, each being unsubstituted or substituted with deuterium, —F, —Cl, —Br, —I, a hydroxyl group, a cyano group, a nitro group, a C 1 -C 60 alkyl group, a C 2 -C 60 alkenyl group, a C 2 -C 60 alkynyl group, a C 1 -C 60 alkoxy group, a C 3 -C 60 carbocyclic group, a C 1 -C 60 heterocyclic group, a C 6 -C 60 aryloxy group, a C 6 -C 60 arylthio group, —Si(Q 21 )(Q 22 )(Q 23 ), —N(Q 21 )(Q 22 ), —B(Q 21 )(Q 22 ), —C(═O)(Q 21 ), —S(═O) 2 (Q 21 ), —P(═O)(Q 21 )(Q 22 ), or one or more combinations thereof; or
—Si(Q 31 )(Q 32 )(Q 33 ), —N(Q 31 )(Q 32 ), —B(Q 31 )(Q 32 ), —C(═O)(Q 31 ), —S(═O) 2 (Q 31 ), or —P(═O)(Q 31 )(Q 32 ), and
wherein Q 1 to Q 3 , Q 11 to Q 13 , Q 21 to Q 23 , and Q 31 to Q 33 are each independently: hydrogen; deuterium; —F; —Cl; —Br; —I; a hydroxyl group; a cyano group; a nitro group; a C 1 -C 60 alkyl group; a C 2 -C 60 alkenyl group; a C 2 -C 60 alkynyl group; a C 1 -C 60 alkoxy group; or a C 3 -C 60 carbocyclic group or a C 1 -C 60 heterocyclic group, each being unsubstituted or substituted with deuterium, —F, a cyano group, a C 1 -C 60 alkyl group, a C 1 -C 60 alkoxy group, a phenyl group, a biphenyl group, or one or more combinations thereof.

11 . The etchant of claim 10 , wherein L 1 and L 2 are each independently a single bond, *—O—*′, or *—S—*′;
a C 1 -C 20 alkylene group, a C 2 -C 20 alkenylene group, or a C 2 -C 20 alkynylene group, each being unsubstituted or substituted with deuterium, —F, —Cl, —Br, —I, —CD 3 , —CD 2 H, —CDH 2 , —CF 3 , —CF 2 H, —CFH 2 , a hydroxyl group, a cyano group, a nitro group, a cyclopentyl group, a cyclohexyl group, a phenyl group, a naphthyl group, a pyridinyl group, a pyrimidinyl group, or one or more combinations thereof; or
a cyclopentylene group, a cyclohexylene group, a phenylene group, a naphthylene group, a pyridinylene group, or a pyrimidinylene group, each being unsubstituted or substituted with deuterium, —F, —Cl, —Br, —I, —CD 3 , —CD 2 H, —CDH 2 , —CF 3 , —CF 2 H, —CFH 2 , a hydroxyl group, a cyano group, a nitro group, a C 1 -C 20 alkyl group, a C 2 -C 20 alkenyl group, a C 2 -C 20 alkynyl group, a C 1 -C 20 alkoxy group, a cyclopentyl group, a cyclohexyl group, a phenyl group, a naphthyl group, a pyridinyl group, a pyrimidinyl group, or one or more combinations thereof.

12 . The etchant of claim 10 , wherein R 1 is:
deuterium or a hydroxyl group; a C 1 -C 20 alkyl group, a C

Assignees

• Samsung Display Co Ltd
• Dongwoo Fine Chem Co Ltd

Inventors

• Yang Shinhyuk
• Kim Beomsoo
• Cho Hyeonsu
• Kim Jeehoon
• Yoon Youngjin
• Lee Eunwon
• Kang Donghan
• Park Jihun
• Huh Jongmoo

Classifications

• C09K13/06

  with organic material · CPC title

• C09K13/08 Primary

  containing a fluorine compound · CPC title