Electrode for a discharge chamber
US-2020328074-A1 · Oct 15, 2020 · US
Prolonged life laser chamber electrode and laser having same
US12489266B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12489266-B2 |
| Application number | US-201917272999-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 28, 2019 |
| Priority date | Sep 20, 2018 |
| Publication date | Dec 2, 2025 |
| Grant date | Dec 2, 2025 |
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- Title
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Abstract
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Disclosed is an electrode for a laser chamber comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.
First claim
Opening claim text (preview).
The invention claimed is: 1 . An electrode for a laser chamber, the electrode being one of an upper electrode and a lower electrode between which electrical discharges cause lasing gas discharges, the electrode comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy. 2 . An electrode for a laser chamber as claimed in claim 1 wherein the first metal is cobalt. 3 . An electrode for a laser chamber as claimed in claim 1 wherein the second metal is copper. 4 . An electrode for a laser chamber as claimed in claim 1 wherein the first metal is cobalt and the second metal is copper. 5 . An electrode for a laser chamber as claimed in claim 4 wherein the alloy is CoCu (5-15 wt %). 6 . An electrode for a laser chamber as claimed in claim 5 wherein the alloy is Co90Cu10 wt %. 7 . An anode configured to be used in a laser discharge chamber, the anode comprising an alloy of cobalt and copper. 8 . An anode as claimed in claim 7 wherein the alloy comprises Co90Cu10 wt %. 9 . An anode as claimed in claim 7 wherein the alloy comprises CoCu (5-15 wt %). 10 . An electrode for a laser chamber, the electrode being one of an upper electrode and a lower electrode between which electrical discharges cause lasing gas discharges, the electrode comprising cobalt as a primary constituent and copper as a secondary constituent. 11 . An electrode for a laser chamber as claimed n claim 10 wherein the alloy is CoCu (5-15 wt %). 12 . An electrode for a laser chamber as claimed in claim 11 wherein the alloy is Co90Cu10 wt %.
Assignees
Inventors
Classifications
transversely excited (H01S3/0975 takes precedence) · CPC title
Alloys based on copper · CPC title
with copper as the next major constituent · CPC title
comprising an excimer or exciplex · CPC title
- C22C19/07Primary
based on cobalt · CPC title
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- What does patent US12489266B2 cover?
- Disclosed is an electrode for a laser chamber comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.
- Who is the assignee on this patent?
- Cymer LLC
- What technology area does this patent fall under?
- Primary CPC classification C22C19/07. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Dec 02 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).