Device and method for multi-energy field induced atomic-scale computer numerical control (CNC) machining in environmental atmosphere

Patent metadata

Field	Value
Publication number	US-12487578-B2
Application number	US-202519015374-A
Country	US
Kind code	B2
Filing date	Jan 9, 2025
Priority date	Mar 1, 2024
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

A device for multi-energy field induced atomic-scale CNC machining in an environmental atmosphere comprises an electromagnetic shielding chamber and a control mechanism, wherein an environmental chamber is arranged in the electromagnetic shielding chamber, a workpiece platform is arranged at the bottom of the environmental chamber, and a nanotool driven by a nanotool actuator is arranged at the top of the environmental chamber, and a gas inlet and a gas outlet which are connected to the environmental chamber are formed in the electromagnetic shielding chamber; and the control mechanism is used for controlling the workpiece platform and the nanotool actuator and applying energy fields including a force field, a temperature field, an electric field, an optical field and a magnetic field. The device has the advantages of atomic precision, high efficiency, low cost and good universality.

First claim

What is claimed is:

1 . A device for computer numerical control (CNC) machining in an environmental atmosphere, comprising an electromagnetic shielding chamber and a control mechanism, wherein an environmental chamber is formed in the electromagnetic shielding chamber, a workpiece platform is arranged at a bottom of the environmental chamber, and a nanotool driven by a nanotool actuator is arranged at a top of the environmental chamber, the workpiece platform is configured to place a workpiece and to allow the workpiece to move in an X-axis direction and a Y-axis direction, the nanotool actuator is used for controlling the nanotool to move above the workpiece platform in the X-axis direction, the Y-axis direction and a Z-axis direction, a gas inlet and a gas outlet which are connected to the environmental chamber are formed in the electromagnetic shielding chamber, an active medium is delivered into the environmental chamber via the gas inlet, and exhaust gas is discharged from the environmental chamber via the gas outlet; and the control mechanism is used for controlling the workpiece platform and the nanotool actuator; the environment chamber is equipped with an xyz-axis piezoceramic scanner tube configured to generate a force field; a heating stage configured to generate a temperature field; a signal generator and a power amplifier configured to generate an electric field; a combined laser device, a collimator and an optical fiber coupler configured to generate an optical field; and an electromagnet configured to generate a magnetic field;
a force range of the force field is 0˜100 μN; a temperature range of the temperature field is 0˜500° C.; a voltage between the workpiece and the nanotool is within −100 V˜+100 V; a waveband of the optical field is from an ultraviolet band to an infrared band, and a power range of the optical field is 10 mW˜10 W; the magnetic field between the workpiece and the nanotool ranges from −10 T to 10 T, a temperature in the environmental chamber is maintained at 0° C.˜500° C., and a relative humidity in the environmental chamber is controlled to 30% ˜80%; the nanotool is made from one or more material selected from a group consisting of nickel, gold, silver, platinum, palladium, cobalt molybdenum oxide, titanium oxide, cerium oxide, zinc oxide; the active medium is one or more selected from a group consisting of metal cyclopentadienyl, metal β-2 ketone, metal amide; the workpiece is made of diamond.

2 . The device according to claim 1 , wherein the workpiece platform comprises a vibration isolation platform, an xy-axis motor motion platform and the heating stage which are sequentially arranged from bottom to top, the vibration isolation platform is used for reducing vibrations, the xy-axis motor motion platform is used for driving the workpiece to move in the X-axis direction and the Y-axis direction, and the heating stage is used for applying the temperature field.

3 . The device according to claim 2 , wherein the nanotool actuator comprises a z-axis motor motion platform, the xyz-axis piezoceramic scanner tube and a tool fixture which are sequentially arranged from top to bottom; the tool fixture is used for clamping the nanotool; the xyz-axis piezoceramic scanner tube is used for driving the nanotool to move in the X-axis direction, the Y-axis direction and the Z-axis direction to realize fine positioning of the nanotool and applying the force field to a surface of the workpiece by means of the nanotool; and the z-axis motor motion platform is used for driving the nanotool to move in the Z-axis direction to realize coarse positioning of the nanotool.

4 . The device according to claim 3 , wherein the control mechanism comprises:
a motor motion controller, used for controlling the xy-axis motor motion platform and the z-axis motor motion platform; a piezoceramic motion controller, used for controlling the xyz-axis piezoceramic scanner tube; and an energy field controller, used for changing the force field, the temperature field, the electric field, the optical field and the magnetic field in the environmental chamber.

5 . The device according to claim 4 , wherein the control mechanism further comprises a temperature and humidity controller used for controlling an environment in the environmental chamber.

6 . The device according to claim 1 , wherein a three-way valve is connected to the gas inlet, three channels of the three-way valve are respectively connected to two active medium sources and an inert gas source, and mass flow controllers are arranged in the three channels respectively.

7 . A method CNC machining in an environmental atmosphere using on the device according to claim 1 , comprising the following steps:
S1, fixing the workpiece on the workpiece platform, controlling temperature and humidity fields in the environmental chamber by the control mechanism, and moving the nanotool to a machining position by the control mechanism; and S2: cyclically feeding the active medium into the environmental chamber; and controlling, by the control mechanism, the force field, the electric field, the optical field and the magnetic field in the environmental chamber to induce the formation of chemical bonds between the nanotool, the active medium and surface atoms of the workpiece, weaken chemical bond strength between the surface atoms and sublayer atoms of the workpiece or strengthen the binding between medium atoms and the surface atoms of the workpiece; and controlling, by the control mechanism, the movement of the nanotool, which causes the chemical bonds between the surface atoms and sublayer atoms of the workpiece to break and remove the surface atoms, or causes the medium atoms to be deposited on the surface atoms of the workpiece; the nanotool is made of one or more material selected from a group consisting of nickel, gold, silver, platinum, palladium, cobalt molybdenum oxide, titanium oxide, cerium oxide, zinc oxide; the active medium is one or more selected from a group consisting of metal cyclopentadienyl, metal β-2 ketone, metal amide; the workpiece is made of diamond; a force range of the force field is 0-100 μN; a temperature range of the temperature field is 0˜500° C.; a voltage between the workpiece and the nanotool is within −100 V˜+100 V; a waveband of the optical field is from an ultraviolet band to an infrared band, and a power range of the optical field is 10 mW˜10 W; the magnetic field between the workpiece and the nanotool ranges from −10 T to +10 T; a temperature in the environmental chamber is maintained at 0° C.˜500° C., and a relative humidity in the environmental chamber is controlled to 30% ˜80%.

Assignees

• Univ Zhejiang

Inventors

• Zhu Wule
• Sun Qi
• Wu Sidong
• Jia Bingchun
• Wang Jingyuan
• Gao Wei
• Han Fang
• Xue Caoyang
• Zhao Xiang
• Zhang Weijian
• Ju Bingfeng

Classifications

• H05K9/0001

  Rooms or chambers (anechoic chambers G01R29/0821) · CPC title

• G05B2219/49124

  Determine clamping position from equipment specification and machining shape · CPC title

• G05B2219/31379

  Leader monitors controllers, updates production progress, allocates resources · CPC title

• G05B19/21

  using an incremental digital measuring device · CPC title

• Y02P70/10

  Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working · CPC title