Sintering press and pressure sintering method for producing a sintered connection by means of the sintering press

Patent metadata

Field	Value
Publication number	US-12485481-B2
Application number	US-202418944775-A
Country	US
Kind code	B2
Filing date	Nov 12, 2024
Priority date	Oct 23, 2019
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

A sintering press for producing a sintered connection between a first connection partner and a second connection partner disposed thereabove, having a suction-fixing installation for fixing the first connection partner, having a compression piece which is disposed above the suction-fixing installation. The sintering press for producing the sintered connection is configured for converging the compression piece and the suction-fixing installation relative to one another and for mutually compressing the first connection partner and the second connection partner, wherein the suction-fixing installation on the side thereof that faces the compression piece has first suction openings, wherein the suction-fixing installation, when the first connection partner is disposed above the first suction openings, by generating a negative pressure at the first suction openings, is configured for suctioning the first connection partner and, on account thereof, for fixing the latter in relation to the suction-fixing installation. The invention furthermore relates to a pressure sintering method for producing a sintered connection by the sintering press.

First claim

What is claimed is:

1 . A pressure sintering method for producing a sintered connection between a first connection partner ( 5 ) and a second connection partner ( 6 ), said method comprising the following steps in succession:
providing a sintering press ( 1 ) for producing a sintered connection between said first connection partner ( 5 ) and said second connection partner ( 6 ) that is disposed above said first connection partner ( 5 ), said sintering press ( 1 ) further comprising:
a suction-fixing installation ( 3 ) for fixing the first connection partner ( 5 ), having a compression piece ( 10 ) which is disposed above the suction-fixing installation ( 3 );
wherein when the first connection partner ( 5 ) and the second connection partner ( 6 ) are disposed between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) and wherein the sintering press ( 1 ) is configured to converge the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another,
the suction-fixing installation ( 3 ) on a side ( 3 a ) thereof that faces the compression piece ( 10 ) has a plurality of first suction openings ( 9 , 9 ′) that align with a plurality of passage ducts ( 16 ) running through a workpiece carrier ( 17 ) and a plurality of second suction openings ( 15 ) that run below the workpiece carrier ( 17 );
the suction-fixing installation ( 3 ), when the first connection partner ( 5 ) is disposed above the plurality of first suction openings ( 9 ), by means of generating a negative pressure at the plurality of first suction openings ( 9 ), is configured for suctioning the first connection partner ( 5 ) and for fixing the plurality of first suction openings ( 9 ) in relation to the suction-fixing installation ( 3 );
a frame element ( 29 ) that encircles the first connection partner ( 5 ) and is movable in relation to the workpiece carrier ( 17 ) in a normal direction (N 1 ) of the side ( 3 a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ) is disposed on the workpiece carrier ( 17 );
the frame element ( 29 ) on the side thereof that faces the suction-fixing installation ( 3 ) has a plurality of ventilation trenches ( 29 a ) which run through the frame element ( 29 ) in the direction perpendicular to the normal direction (N 1 ) of the side ( 3 a ) of the suction-fixing installation ( 3 ) that faces the compression piece ( 10 ); and
the first connection partner ( 5 ) is disposed directly on the workpiece carrier ( 17 ) that has said plurality of passage ducts ( 16 ) so that the first connection partner ( 5 ) is above the plurality of passage ducts ( 16 ), and the workpiece carrier ( 17 ) is disposed directly on the suction-fixing installation ( 3 ) and the plurality of passage ducts ( 16 ) are in alignment with the first suction openings ( 9 ) and are perpendicular to the plurality of ventilation trenches ( 29 a );
the suction-fixing installation ( 3 ) disposed below the workpiece carrier ( 17 ) has negative pressure line duct systems ( 20 , 21 ) that provide a negative pressure at the first suction openings ( 9 , 9 ′) and also at the second suction openings ( 15 );
and
conducting the following steps;
a) disposing between the compression piece ( 10 ) and the suction-fixing installation ( 3 ) the first connection partner ( 5 ) conjointly with the second connection partner ( 6 ) disposed above the first connection partner ( 5 ), and placing a sintering material ( 7 ) to be sintered between the first connection partner ( 5 ) and the second connection partner ( 6 ), wherein the first connection partner ( 5 ) is disposed above the plurality of first suction openings ( 9 );
a-1) disposing a film portion ( 4 a ) of a film ( 4 ) on the first connection partner(S) and the second connection partner ( 6 );

b) fixing the first connection partner ( 5 ) in relation to the suction-fixing installation ( 3 ) by suctioning the first connection partner ( 5 ) and generating a negative pressure at the plurality of first suction openings ( 9 );
c) impinging the first connection partner ( 5 ) and the second connection partner ( 6 ) and the sintering material ( 7 ) with a pressure by converging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another, wherein the first connection partner ( 5 ) and the second connection partner ( 6 ) are mutually compressed, and impinging the sintering material ( 7 ) with a temperature, and converting the sintering material ( 7 ) by impingement with pressure and temperature to a sintered metal;
d) diverging the compression piece ( 10 ) and the suction-fixing installation ( 3 ) relative to one another;
d-1) removing the film portion ( 4 a ) from the first connection partner ( 5 ) and the second connection partner ( 6 );

e) releasing the first connection partner ( 5 ) in relation to the suction-fixing installation ( 3 ) by reinstating a gas pressure prevailing above the first connection partner ( 5 ) at the plurality of first suction openings ( 9 ) and at the plurality of ventilation trenches ( 29 a ).

Assignees

• Semikron Elektronik Gmbh & Co Kg

Inventors

• Birkicht Dominic
• Heinrich Juri
• Franz Thomas
• Ludwig Rudi
• Kraft Silke
• Michaelsen Erik
• Weickmann Johannes

Classifications

• H10W72/07141

  Means for applying energy, e.g. ovens or lasers · CPC title

• H10W72/07331

  Connecting techniques · CPC title

• H10W72/07332

  Compression bonding, e.g. thermocompression bonding · CPC title

• H10W72/07188

  Apparatus chuck · CPC title

• H10W72/07178

  Means for aligning · CPC title