Organic vapor jet printing system

Patent metadata

Field	Value
Publication number	US-12484429-B2
Application number	US-202318101416-A
Country	US
Kind code	B2
Filing date	Jan 25, 2023
Priority date	Jan 12, 2018
Publication date	Nov 25, 2025
Grant date	Nov 25, 2025

Abstract

Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.

First claim

We claim:

1 . A device for deposition of a material onto a substrate, the device comprising:
a nozzle block comprising a first depositor comprising:
a leading first rank comprising:
a leading portion of a first exhaust aperture;
a leading portion of a second exhaust aperture; and
a first delivery aperture disposed between the leading portion of the first exhaust aperture and the leading portion of the second exhaust aperture; wherein a shortest distance from the first delivery aperture to the leading portion of the first exhaust aperture is less than a shortest distance from the first delivery aperture to the leading portion of the second exhaust aperture;

a trailing second rank comprising:
a trailing portion of the first exhaust aperture;
a trailing portion of the second exhaust aperture; and
a second delivery aperture disposed between the trailing portion of the first exhaust aperture and the trailing portion of the second exhaust aperture; wherein a shortest distance from the second delivery aperture to the trailing portion of the second exhaust aperture is less than a shortest distance from the second delivery aperture to the trailing portion of the first exhaust aperture;

wherein the leading portion of the first exhaust aperture is separated from the trailing portion of the first exhaust aperture by a portion of the nozzle block; and wherein the leading portion of the second exhaust aperture is separated from the trailing portion of the second exhaust aperture by a portion of the nozzle block.

2 . The device of claim 1 , wherein the nozzle block comprises a plurality of depositors, each having a same arrangement of exhaust and delivery apertures as the first depositor.

3 . The device of claim 1 , wherein a center axis of the trailing portions of the first and second exhaust apertures is offset from a center axis of the leading portions of the first and second exhaust apertures by a distance φ, wherein φ>0.

4 . The device of claim 3 , wherein φ≤35 μm.

5 . The device of claim 1 , wherein the first delivery aperture has a flare width of 6-12 μm.

6 . The device of claim 5 , wherein the second delivery aperture has a flare width of 6-12 μm.

7 . The device of claim 1 , wherein, for any line drawn between and perpendicular to the leading portion of the first exhaust aperture and the leading portion of the second exhaust aperture, the line crosses only the first delivery aperture and not the second delivery aperture.

8 . The device of claim 7 , wherein, for any line drawn between and perpendicular to the trailing portion of the first exhaust aperture and the trailing portion of the second exhaust aperture, the line crosses only the second delivery aperture and not the first delivery aperture.

9 . The device of claim 1 , further comprising an external vacuum source in fluid communication with the first exhaust aperture and the second exhaust aperture.

10 . The device of claim 1 , wherein the first delivery aperture is trapezoidal.

11 . The device of claim 10 , wherein each portion of the first exhaust aperture and the second exhaust aperture is rectangular, and the longest edge of each portion of the first exhaust aperture and the second exhaust aperture is arranged along a direction of relative movement of the device and the substrate when the device is in operation.

12 . The device of claim 10 , wherein the second delivery aperture is trapezoidal.

13 . The device of claim 10 , wherein the first delivery aperture has an angle α between a long center axis of the first delivery aperture and a longest edge of the first delivery aperture, such that 1.1°≤α≤ 1.7°.

14 . The device of claim 13 , wherein the second delivery aperture has an angle θ between a long center axis of the second delivery aperture and a longest edge of the second delivery aperture, such that 1.1°≤θ≤1.7°.

15 . The device of claim 1 , further comprising a first delivery channel extending at least partially through the nozzle block and having a first end that forms the first delivery aperture;
wherein the first delivery channel is wider at a first portion of the first delivery channel than at a second portion of the first delivery channel, the first portion of the first delivery channel being closer to the first delivery aperture than the second portion of the first delivery channel, and wherein the first portion of the first delivery channel is in direct fluid communication with the first delivery aperture and the second portion of the first delivery channel is in direct fluid communication with the first portion of the first delivery channel.

16 . The device of claim 15 , further comprising a second delivery channel extending at least partially through the nozzle block and having a first end that forms the second delivery aperture;
wherein the second delivery channel is wider at a first portion than at a second portion, the first portion of the second delivery channel being closer to the second delivery aperture than the second portion of the second delivery channel, and wherein the first portion of the second delivery channel is in direct fluid communication with the second delivery aperture and the second portion of the second delivery channel is in direct fluid communication with the first portion of the second delivery channel.

17 . The device of claim 15 , wherein a side wall of the first portion of the first delivery channel forms an angle of 30-60° with the surface of the nozzle block.

Assignees

• Universal Display Corp

Inventors

• Mcgraw Gregory
• Quinn William E
• Kottas Gregg
• King Matthew
• Swedlove Benjamin
• TROJACKI Tomasz

Classifications

• C23C16/4551

  Jet streams · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/45563

  Gas nozzles · CPC title

• Y02E10/549

  Organic PV cells · CPC title

• H10K71/13 Primary

  using printing techniques, e.g. ink-jet printing or screen printing · CPC title