Method for manufacturing a plurality of resonators in a wafer
US-11709431-B2 · Jul 25, 2023 · US
US12481248B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12481248-B2 |
| Application number | US-202418941193-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 8, 2024 |
| Priority date | Dec 19, 2023 |
| Publication date | Nov 25, 2025 |
| Grant date | Nov 25, 2025 |
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There is provided a method for manufacturing a batch of horological balance springs ( 2 a), the average of whose stiffnesses lies within a predetermined range, and the method includes forming in a wafer the horological balance springs ( 2 b, 2 c) with dimensions that differ from the dimensions required to obtain the batch of horological balance springs ( 2 a), the average of whose stiffnesses lies within the predetermined range, determining the stiffnesses of the systems, computing a dimensional correction to be applied to the horological balance springs, and modifying the dimensions of the horological balance springs ( 2 b, 2 c) formed, on the basis of a dimensional correction computed to obtain the batch of horological balance springs ( 2 a).
Opening claim text (preview).
The invention claimed is: 1 . A method for manufacturing a batch of horological balance springs ( 2 a ), comprising an average stiffness within a predetermined range, which method comprises the following steps of: a) forming, in a wafer ( 1 ), horological balance springs ( 2 b , 2 c ), of the batch of horological balance springs ( 2 a ), with dimensions that differ from dimensions required to obtain the batch of horological balance springs ( 2 a ) comprising the average stiffness within said predetermined range; b) forming, in the wafer ( 1 ), systems ( 3 ) for indicating a reference stiffness for determining stiffnesses of the batch of horological balance springs ( 2 a ); c) determining the stiffnesses of said systems ( 3 ) formed; d) computing a dimensional correction to be applied to the horological balance springs ( 2 b , 2 c ) formed, on the basis of the determined stiffnesses of said systems ( 3 ); and e) modifying the dimensions of the horological balance springs ( 2 b , 2 c ) formed, on the basis of a dimensional correction computed to obtain the batch of horological balance springs ( 2 a ), the average of whose stiffnesses lies within said predetermined range, wherein the systems ( 3 ) comprise a first system ( 3 ) and a second system ( 3 ), wherein the horological balance springs ( 2 b , 2 c ) comprise a first horological balance spring ( 2 b , 2 c ) and a second horological balance spring ( 2 b , 2 c ), and wherein forming, in the wafer ( 1 ), the systems ( 3 ) comprises: arranging the first system ( 3 ) closer to the first horological balance spring ( 2 b , 2 c ) than to any other of the horological balance springs ( 2 b , 2 c ), and arranging the second system ( 3 ) closer to the second horological balance spring ( 2 b , 2 c ) than to any other of the horological balance springs ( 2 b , 2 c ). 2 . The method according to claim 1 , wherein forming the horological balance springs ( 2 b , 2 c ) and forming said systems ( 3 ) are carried out by deep reactive-ion etching. 3 . The method according to claim 1 , wherein forming the systems ( 3 ) comprises forming a system ( 3 ), of the systems ( 3 ), in the wafer ( 1 ) and closer to a first one of the horological balance springs ( 2 b , 2 c ) than to a second one of the horological balance springs ( 2 b , 2 c ). 4 . The method according to claim 1 , wherein forming said systems ( 3 ) comprises forming, in the wafer ( 1 ), a plurality of groups of oscillating elements ( 10 ), each group of the groups of oscillating elements ( 10 ) constituting each of said systems ( 3 ) respectively, and each group surrounding a respective one of the horological balance spring ( 26 , 2 c ) in the wafer ( 1 ). 5 . The method according to claim 1 , wherein forming said systems ( 3 ) comprises forming, in the wafer ( 1 ), a plurality of oscillating elements ( 10 ) each of which is arranged closer to respective ones of the horological balance spring ( 2 b , 2 c ) than others of the horological balance springs ( 2 b , 2 c ). 6 . The method according to claim 1 , wherein determining the stiffnesses comprises estimating at least one resonant frequency of each of the systems ( 3 ). 7 . The method according to claim 1 , wherein determining the stiffnesses comprises estimating at least one resonant frequency of each of the systems ( 3 ) by an electronic device executing an algorithm for computing stiffness on a basis of the resonant frequency. 8 . The method according to claim 1 , wherein determining the stiffnesses comprises estimating at least one resonant frequency of each of the systems ( 3 ) by an electronic device executing an algorithm for computing stiffness on a basis of the resonant frequency, wherein the stiffness is any of a stiffness of an oscillating element ( 10 ) of the systems ( 3 ), a first average stiffness of all of a plurality of oscillating elements ( 10 ) of the systems ( 3 ), and a second average stiffness of less than all of the plurality of oscillating elements ( 10 ) of the systems ( 3 ). 9 . The method according to claim 1 , wherein the computing the dimensional correction comprises determining, from the stiffnesses of said systems ( 3 ), a thickness (e) of material to be added to or removed from at least one dimension of the horological balance spring ( 2 b , 2 c ) of the batch of horological balance springs ( 2 a ). 10 . The method according to claim 1 , wherein at least one of the systems ( 3 ) comprises an oscillating element ( 10 ) that is in a shape of a tuning fork. 11 . The method according to claim 1 , wherein the systems ( 3 ) comprise a plurality of first systems ( 3 ), including the first system ( 3 ), and a plurality of second systems ( 3 ), including the second system ( 3 ), and wherein forming, in the wafer ( 1 ), the systems ( 3 ) comprises: arranging the plurality of first systems ( 3 ) closer to the first horological balance spring ( 2 b , 2 c ) than to any other of the horological balance springs ( 2 b , 2 c ), and arranging the plurality of second systems ( 3 ) closer to the second horological balance spring ( 2 b , 2 c ) than to any other of the horological balance springs ( 2 b , 2 c ). 12 . The method according to claim 11 , wherein the first systems ( 3 ) and the second systems ( 3 ) each comprise a plurality of oscillating elements ( 10 ).
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