Limiting-current type gas sensor and fabrication method of the same, and sensor network system
US-2017122898-A1 · May 4, 2017 · US
US12480909B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12480909-B2 |
| Application number | US-202318567660-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 14, 2023 |
| Priority date | Mar 17, 2022 |
| Publication date | Nov 25, 2025 |
| Grant date | Nov 25, 2025 |
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A solid electrolyte assembly includes a substrate, a solid electrolyte, and a first electrode and a second electrode. The solid electrolyte has oxide ion conductivity, and the first electrode is located under the solid electrolyte and contains a porous material. The first electrode has only one oxygen diffusion path that is formed overlapping the substrate and the solid electrolyte. When Sr represents the smallest cross-sectional area that is a cross-sectional area of the oxygen diffusion path at a location where the area of a cross section of the first electrode taken perpendicularly to an oxygen diffusing direction is smallest in a portion of the oxygen diffusion path where the oxygen diffusion path overlaps the substrate and the solid electrolyte in a plan view of the solid electrolyte assembly, and Sp represents the area of a region where the first electrode and the second electrode overlap each other in a plan view of the solid electrolyte, Sr/Sp is from 1×10 −7 to 6.9×10 −4 .
Opening claim text (preview).
The invention claimed is: 1 . A solid electrolyte assembly comprising: a substrate; a solid electrolyte disposed on or above the substrate; and a first electrode and a second electrode that are arranged opposed to each other via the solid electrolyte, wherein the solid electrolyte has oxide ion conductivity, at least a portion of the first electrode is located between the substrate and the solid electrolyte and contains a porous material, in a plan view of the solid electrolyte assembly, the first electrode has only one oxygen diffusion path that is formed overlapping the substrate and the solid electrolyte, and the solid electrolyte assembly satisfies the condition that Sr/Sp is from 1.0×10 −7 to 6.9×10 −4 , wherein Sr represents a smallest cross-sectional area that is a cross-sectional area of the oxygen diffusion path at a location where an area of a cross section of the first electrode taken perpendicularly to an oxygen diffusing direction is smallest in a portion of the oxygen diffusion path where the oxygen diffusion path overlaps the substrate and the solid electrolyte in the plan view of the solid electrolyte assembly, and Sp represents an area of a region where the first electrode and the second electrode overlap each other in a plan view of the solid electrolyte. 2 . The solid electrolyte assembly according to claim 1 , wherein the oxygen diffusion path has a trapezoidal or rectangular cross-sectional shape when taken along a thickness direction of the oxygen diffusion path at the location where the oxygen diffusion path has the smallest cross-sectional area Sr. 3 . The solid electrolyte assembly according to claim 1 , wherein, in the plan view of the solid electrolyte, the first electrode has a shape including a circular portion or a polygonal portion. 4 . The solid electrolyte assembly according to claim 1 , wherein the first electrode contains a metal oxide, and a porosity ρ 0 of the first electrode is from 1.0% to 50%. 5 . The solid electrolyte assembly according to claim 4 , wherein a proportion of the metal oxide in the first electrode is from 1.0 to 60 vol %. 6 . The solid electrolyte assembly according to claim 1 , wherein the first electrode is in contact with the substrate made of silicon. 7 . The solid electrolyte assembly according to claim 1 , wherein a thickness of the first electrode is from 10 to 2000 nm. 8 . The solid electrolyte assembly according to claim 1 , wherein an average pore size of the first electrode is from 5 to 200 nm. 9 . The solid electrolyte assembly according to claim 1 , wherein the first electrode contains at least one of platinum group elements, gold, and alloys containing these elements. 10 . The solid electrolyte assembly according to claim 1 , wherein the solid electrolyte is made of a ceramic containing at least one selected from the group consisting of a composite oxide containing lanthanum and silicon, yttrium-stabilized zirconia, samarium-doped ceria, gadolinium-doped ceria, lanthanum gallate, and yttrium-doped bismuth oxide. 11 . A solid electrolyte assembly comprising: a substrate; a solid electrolyte disposed on or above the substrate; and a first electrode and a second electrode that are arranged opposed to each other via the solid electrolyte, wherein the solid electrolyte has oxide ion conductivity, at least a portion of the first electrode is located between the substrate and the solid electrolyte and contains a porous material, in a plan view of the solid electrolyte assembly, the first electrode has a plurality of oxygen diffusion paths that are formed overlapping the substrate and the solid electrolyte, and the solid electrolyte assembly satisfies the condition that ΣSr/Sp is from 1.0×10 −7 to 6.9×10 −4 , wherein Sr represents a smallest cross-sectional area that is a cross-sectional area of each oxygen diffusion path at a location where an area of a cross section of the first electrode taken perpendicularly to an oxygen diffusing direction is smallest in a portion of each oxygen diffusion path where each oxygen diffusion path overlaps the substrate and the solid electrolyte in the plan view of the solid electrolyte assembly, and ΣSr represents a sum total of the smallest cross-sectional areas Sr of each oxygen diffusion path, and Sp represents an area of a region where the first electrode and the second electrode overlap each other in a plan view of the solid electrolyte. 12 . The solid electrolyte assembly according to claim 11 , wherein each oxygen diffusion path has a trapezoidal or rectangular cross-sectional shape when taken along a thickness direction of each oxygen diffusion path at the location where each oxygen diffusion path has the smallest cross-sectional area Sr. 13 . The solid electrolyte assembly according to claim 11 , wherein, in the plan view of the solid electrolyte, the first electrode has a shape including a circular portion or a polygonal portion. 14 . The solid electrolyte assembly according to claim 11 , wherein the first electrode contains a metal oxide, and a porosity ρ 0 of the first electrode is from 1.0% to 50%. 15 . The solid electrolyte assembly according to claim 14 , wherein a proportion of the metal oxide in the first electrode is from 1.0 to 60 vol %. 16 . The solid electrolyte assembly according to claim 11 , wherein the first electrode is in contact with the substrate made of silicon. 17 . The solid electrolyte assembly according to claim 11 , wherein a thickness of the first electrode is from 10 to 2000 nm. 18 . The solid electrolyte assembly according to claim 11 , wherein an average pore size of the first electrode is from 5 to 200 nm. 19 . The solid electrolyte assembly according to claim 11 , wherein the first electrode contains at least one of platinum group elements, gold, and alloys containing these elements. 20 . The solid electrolyte assembly according to claim 11 , wherein the solid electrolyte is made of a ceramic containing at least one selected from the group consisting of a composite oxide containing lanthanum and silicon, yttrium-stabilized zirconia, samarium-doped ceria, gadolinium-doped ceria, lanthanum gallate, and yttrium-doped bismuth oxide.
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