Connecting and disconnecting a cooling loop from a refrigeration system

Patent metadata

Field	Value
Publication number	US-12480694-B2
Application number	US-202218556170-A
Country	US
Kind code	B2
Filing date	Apr 21, 2022
Priority date	Apr 23, 2021
Publication date	Nov 25, 2025
Grant date	Nov 25, 2025

Abstract

A control system for controlling the flow of refrigerant includes: an inlet valve configured to selectively isolate or couple a supply path for supplying refrigerant from a refrigeration system with an inlet of a cooling loop; an outlet valve configured to selectively isolate or couple a return path for returning refrigerant to the refrigeration system with an outlet of the cooling loop; a refrigerant collection valve configured to selectively isolate or couple a refrigerant collection path for collecting refrigerant for the refrigeration system with the cooling loop; a pressure sensor for determining a pressure of refrigerant in the cooling loop; an input for receiving cooling loop disconnect and connect commands; and control circuitry configured to receive signals from the pressure sensor and the commands from the input and to generate control signals for controlling the opening and closing of the inlet, outlet and refrigerant collection valves in response thereto.

First claim

The invention claimed is:

1 . A control system for controlling the flow of refrigerant between a refrigeration system and a cooling loop within a semiconductor processing chamber such that leakage of refrigerant is inhibited when connecting or disconnecting said refrigeration system from said cooling loop, said control system comprising:
an inlet valve configured to selectively isolate or couple a supply path for supplying refrigerant from said refrigeration system with an inlet of said cooling loop; an outlet valve configured to selectively isolate or couple a return path for returning refrigerant to said refrigeration system with an outlet of said cooling loop; a compressor that compresses refrigerant provided to the supply path; a refrigerant collection valve configured to selectively isolate or couple a refrigerant collection path to said cooling loop, the collection path providing a path from said cooling loop to said compressor; a pressure sensor for determining a pressure of refrigerant in said cooling loop; an input for receiving cooling loop disconnect and connect commands; and control circuitry configured to receive signals from said pressure sensor and said commands from said input and to generate control signals for controlling the opening and closing of said inlet, outlet and refrigerant collection valves in response thereto, wherein said control circuitry is configured in response to receipt of said cooling loop disconnect command to: control said inlet valve and said outlet valve such that they are closed; control said refrigerant collection valve to be open; and direct the refrigerant from the cooling loop, through the collection valve and into the collection path while the inlet valve and the outlet valve are closed and the collection valve is open.

2 . The control system according to claim 1 , wherein said control circuitry is further configured in response to receipt of said cooling loop disconnect command to:
after a predetermined time determine whether a pressure in said cooling loop is increasing by more than a predetermined amount and if not generate an indication that said cooling loop may be safely disconnected from said refrigeration system.

3 . The control system according to claim 2 , wherein the control circuitry stores the refrigerant in the collection path by running said compressor while said collection valve is open.

4 . The control system according to claim 2 , further comprising a pump, said pump being configured to pump refrigerant from said cooling loop along said refrigerant collection path wherein the control circuitry stores the refrigerant in the collection path by running said pump.

5 . The control system according to claim 4 , said collection path comprises a buffer volume and the control system further comprises a further valve configured to selectively isolate or couple said refrigerant collection path with said compressor, said control circuitry being configured to control said further valve to be closed prior to activating said pump, such that on activation said pump pumps said refrigerant from said cooling loop into said buffer volume.

6 . The control system according to claim 1 , said control system further comprising a return path valve configured to selectively isolate or couple said return path with said compressor, said control circuitry being configured to control said return path valve to be closed when controlling said inlet valve and said outlet valve to be closed.

7 . The control system according to claim 1 , said control system further comprising a bypass valve configured to selectively isolate or couple a warmer refrigerant bypass path for supplying warmer refrigerant from said compressor, said control circuitry being configured to control said bypass valve to be closed when controlling, said inlet valve and said outlet valve to be closed.

8 . The control system according to claim 1 , said control system comprising a trace gas source and a trace gas valve configured to selectively isolate or couple said trace gas source with said cooling loop, said control circuitry being configured to control said trace gas valve.

9 . The control system according to claim 1 , said control system comprising an exhaust valve to selectively isolate or couple said cooling loop with a pump, said control circuitry being configured to control said exhaust valve.

10 . The control system according to claim 8 further comprising:
an exhaust valve to selectively isolate or couple said cooling loop with a pump, said
control circuitry being configured to control said exhaust valve, wherein said control system is configured in response to receipt of a cooling loop connect command to:

control said inlet valve, outlet valve, refrigerant collection valve and exhaust valve such that they are closed;
control said trace gas valve to open such that trace gas from said trace gas source flows into said cooling loop;
determine a pressure in said cooling loop and in response to said pressure rising to or above a predetermined leak test value:
control said trace gas valve to close;
after a predetermined time, determine whether said pressure in said cooling loop is decreasing by more than a predetermined leak test amount and if not:
control said exhaust valve to open such that trace gas from said cooling loop is evacuated;
determine a pressure in said cooling loop and in response to said pressure falling to or below a predetermined exhaust value:
control said exhaust valve to close;
determine a pressure in said cooling loop and in response to said pressure increasing by less than a predetermined leakage amount indicating that said cooling loop is correctly connected to said refrigeration system.

11 . The control system according to claim 10 , further comprising a buffer volume on said refrigerant collection path and a further valve configured to selectively isolate or couple said refrigerant collection path with said compressor, said control circuitry being configured to control said further valve to be closed prior to activating said pump, such that on activation said pump pumps said refrigerant from said cooling loop into said buffer volume, said control system being configured in response to said indication that said cooling loop is correctly connected to said refrigeration system to open said further valve and after a predetermined time to close said further valve prior to starting said refrigeration system.

12 . The control system according to claim 10 , said control system being configured in response to an indication to start said refrigeration system to:
control said refrigerant collection valve, trace gas valve and exhaust valve to be closed; control said inlet valve and said outlet valve to open; and to activate said compressor.

13 . A refrigeration system for supplying refrigerant to a cooling loop in a semiconductor processing chamber, said refrigeration system comprising:
the compressor; the supply path for supplying refrigerant from said compressor to said cooling loop; a return path for receiving refrigerant from said cooling loop and returning said refrigerant to said compressor; at least one heat exchanger for exchanging heat between said supply path and return path; and a control system according to claim 1 .

14 . A method of controlling a flow of refrigerant between a refrigeration system and a cooling loop within a semiconductor processing chamber such that leakage of refrigerant is inhibited when disconnecting said refrigeration system from said cooling loop, said method comprising:
controlling a compressor in said refrigeration system t

Assignees

• Edwards Vacuum Llc

Inventors

• Kale Kaustubh

Classifications

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• F25B2700/19

  Pressures · CPC title

• F25B2600/2515

  Flow valves · CPC title

• F25B2500/221

  Preventing leaks from developing · CPC title

• F25B2345/003

  Control issues for charging or collecting refrigerant to or from a cycle · CPC title