Solid-state light steering system

Patent metadata

Field	Value
Publication number	US-12474476-B2
Application number	US-202017135902-A
Country	US
Kind code	B2
Filing date	Dec 28, 2020
Priority date	Dec 28, 2020
Publication date	Nov 18, 2025
Grant date	Nov 18, 2025

Abstract

In one example, a Light Detection and Ranging (LiDAR) module is provided. The LiDAR module comprises a semiconductor integrated circuit comprising a micro-electromechanical system (MEMS) formed on a surface of a silicon substrate, and a controller, the MEMS comprising a polygon assembly, the polygon assembly comprising: a polygon; a support structure connected to the polygon and forming a stack with the polygon along a rotation axis; a plurality of anchors formed on the surface of the substrate; and a plurality of actuators, each actuator of the plurality of actuators being connected between the support structure and an anchor of the plurality of actuators. The controller is configured apply a voltage across each actuator of the plurality of actuators, wherein the voltage causes each actuator to exert a torque on the support structure to rotate the polygon around the rotation axis by a target rotation angle.

First claim

What is claimed is:

1 . An apparatus, the apparatus being part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprising:
a semiconductor integrated circuit comprising a micro-electromechanical system (MEMS) formed on a surface of a silicon substrate, a light source providing collimated light along a first axis and a controller, the MEMS comprising a polygon assembly, the polygon assembly comprising: a polygon including at least three light reflecting facets tilted with respect to the first axis such that all three light reflecting facets receive the collimated light at the same time; a support structure connected to the polygon and forming a stack with the polygon along a rotation axis in the same direction as the first axis; an axial connection structure extending along the rotation axis, connecting the silicon substrate to the polygon, with the support structure connected to the axial connection structure between and separated from the silicon substrate and the polygon, such that the polygon and support structure are vertically separated along the rotation axis; wherein the support structure comprises a plurality of radial portions extending from the axial connection structure; wherein the light reflecting facets are tilted at a tilting angle to reflect light at an angle away from the first axis; a plurality of anchors formed on the surface of the substrate; and a plurality of actuators, each actuator of the plurality of actuators being connected between an end of one of the radial portions opposite another end of the radial portion connected to the axial portion and an anchor of the plurality of anchors, wherein the controller is configured to: determine a target rotation angle of the polygon around the rotation axis such that an aggregate field of view of the at least three facets provides 360 degrees of horizontal coverage; determine a voltage based on the target rotation angle; and apply the voltage across each actuator of the plurality of actuators, wherein the voltage causes each actuator to exert a torque on the support structure to rotate the polygon around the rotation axis by the target rotation angle to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.

2 . The apparatus of claim 1 , wherein the silicon substrate is a silicon-on-insulator (SOI) substrate.

3 . The apparatus of claim 2 , wherein the light reflecting facets are tilted at a tilting angle greater than 45 degrees.

4 . The apparatus of claim 1 , further comprising a fourth light reflecting facet.

5 . The apparatus of claim 4 , wherein the facets are tilted with respect to the surface of the substrate by a tilting angle based on a crystallographic orientation of the silicon substrate.

6 . The apparatus of claim 4 , wherein the tilting angle of the facets is 54.7 degrees.

7 . The apparatus of claim 1 , further comprising a plurality of optic fibers configured to:
generate collimated light rays from the light source; and project the collimated light rays towards one or more of the facets, to enable the one or more of the facets to reflect the collimated light rays.

8 . The apparatus of claim 7 , further comprising an optical coupler configured to:
receive the collimated light rays from the plurality of optical fibers; and project the collimated light rays onto the one or more of the facets at an incident angle to enable the one or more of the facets to reflect the collimated light rays along an axis perpendicular to the rotation axis.

9 . The apparatus of claim 1 , wherein the axial portion forms the stack with the polygon along the rotation axis; and
wherein each actuator is connected across one end of a radial portion of the plurality of radial portions and an anchor of the plurality of anchors.

10 . The apparatus of claim 9 , wherein the plurality of anchors is a plurality of first anchors;
wherein the apparatus further includes a plurality of second anchors formed on the surface of the substrate; and wherein each second anchor of the plurality of second anchors is connected to the one end of the radial portion of the plurality of radial portions via an elastic connection structure.

11 . The apparatus of claim 10 , wherein the elastic connection structure has a first degree of spring stiffness along a radial direction and a second degree of spring stiffness along a tangential direction; and
wherein the first degree of spring stiffness is higher than the second degree of spring stiffness.

12 . The apparatus of claim 11 , wherein the voltage is determined based on the second degree of spring stiffness.

13 . The apparatus of claim 11 , wherein the elastic connection structure comprises at least one of: a chevron spring, a folded beam spring, or a bending spring.

14 . The apparatus of claim 9 , wherein the axial portion is connected to the surface of the substrate via an elastic connection structure.

15 . The apparatus of claim 14 , wherein the elastic connection structure comprises a torsional bar.

16 . The apparatus of claim 1 , wherein each of the plurality of actuators comprises at least one of: an electrostatic actuator, an electromagnetic actuator, or a piezoelectric actuator.

17 . The apparatus of claim 16 , wherein the electrostatic actuator comprises a pair of angular comb drives.

18 . A method comprising:
determining a target rotation angle of a polygon around a rotation axis, wherein the polygon includes facets that are tilted with respect to a surface of a semiconductor substrate to reflect light, the polygon being part of a polygon assembly of a micro-electromechanical system (MEMS) formed on the surface of the semiconductor substrate, the polygon assembly further comprising a support structure connected to the polygon and forming a stack with the polygon along the rotation axis, an axial connection structure extending along the rotation axis, connecting the semiconductor substrate to the polygon, with the support structure connected to the axial connection structure between and separated from the semiconductor substrate and the polygon, such that the polygon and support structure are vertically separated along the rotation axis, wherein the support structure comprises a plurality of radial portions extending from the axial connection structure, a plurality of anchors formed on the surface of the substrate, and a plurality of actuators, each actuator of the plurality of actuators being connected between an end of one of the radial portions opposite another end of the radial portion connected to the axial portion and an anchor of the plurality of anchors; determining a voltage based on the target rotation angle; and applying the voltage across each actuator of the plurality of actuators, wherein the voltage causes each actuator to exert a torque on the support structure to rotate the polygon around the rotation axis by the target rotation angle.

19 . A non-transitory computer readable medium storing instructions that, when executed by a controller, causes the controller to perform: determining a target rotation angle of a polygon including at least three light reflecting facets around a rotation axis, with the angle being up to 120 degrees, such that an aggregate field of view of the at least three facets provides 360 degrees of horizontal coverage, the polygon being part of a polygon assembly of a micro-electromechanical system (MEMS) formed on a surface of a semiconductor substrate, the polygon assem

Assignees

• Beijing Voyager Tech Co Ltd

Inventors

• Lu Yue
• Wang Youmin
• Pan Anan

Classifications

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G02B26/121

  Mechanical drive devices for polygonal mirrors · CPC title

• G01S7/4817

  relating to scanning · CPC title

• G01S17/931 Primary

  of land vehicles · CPC title

• G02B26/123

  Multibeam scanners, e.g. using multiple light sources or beam splitters · CPC title