Wafer-level 3d integration of high voltage optical transformer
US-2022375910-A1 · Nov 24, 2022 · US
US12464848B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12464848-B2 |
| Application number | US-202218057131-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 18, 2022 |
| Priority date | Dec 30, 2021 |
| Publication date | Nov 4, 2025 |
| Grant date | Nov 4, 2025 |
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A solar cell device includes a supporting substrate, and an epitaxial active structure that is disposed on the supporting substrate. The epitaxial active structure has a bottom surface adjacent to the supporting substrate and a top surface opposite to the bottom surface, and is formed with an isolation section that extends from the top surface to the bottom surface. A method for producing the solar cell device is also disclosed.
Opening claim text (preview).
What is claimed is: 1 . A solar cell device, comprising: a supporting substrate; an epitaxial active structure disposed on said supporting substrate; grid lines; busbars extending across said grid lines; and an electrode pad having a block shape, said electrode pad being connected to said busbars and adapted to connect said busbars to an external device, wherein said epitaxial active structure has a bottom surface adjacent to said supporting substrate, a top surface opposite to said bottom surface and a periphery connected between said bottom surface and said top surface, and is formed with an isolation section extending from said top surface to said bottom surface, wherein said epitaxial active structure is divided into a first active section and a second active section by said isolation section, wherein said electrode pad is disposed on said first active section of said epitaxial active structure opposite to said supporting substrate, and is adjacent to said isolation section of said epitaxial active structure, wherein said second active section is separated from and located adjacent to said electrode pad, is closer to a portion of said periphery relative to said electrode pad, and has a block shape when viewed in a direction from said top surface to said bottom surface of said epitaxial active structure, wherein said isolation section extends between said electrode pad and said portion of said periphery of said epitaxial structure and extends further in a lateral direction to terminate at said portion of said periphery so that said portion of said periphery is isolated from a remaining portion of said periphery and so that said second active action is bounded by said isolation section and said portion of said periphery, a width of said second active action in an extension direction of said grid lines being smaller than a width of said electrode pad in said extension direction, a length of said second active action in a transverse direction transverse to said extension direction being not larger than a length of said electrode pad in said transverse direction, and wherein no block-shaped electrode pad is formed on said second active section. 2 . The solar cell device as claimed in claim 1 , wherein said epitaxial active structure is a single junction structure. 3 . The solar cell device as claimed in claim 1 , wherein said epitaxial active structure is a multi-junction structure. 4 . The solar cell device as claimed in claim 1 , wherein said supporting substrate is a flexible substrate. 5 . The solar cell device as claimed in claim 1 , wherein said top surface of said epitaxial active structure has a first surface region on said first active section and a second surface region on said second active section, a difference in height between said first and second surface regions being less than 1 μm. 6 . The solar cell device as claimed in claim 1 , wherein a width of said isolation section is not less than 100 μm, and is less than a width of said second active section. 7 . The solar cell device as claimed in claim 1 , wherein said isolation section is in the form of a recess. 8 . A method for producing a solar cell device, comprising the steps of: (a) providing a growth substrate; (b) forming a stopping layer on the growth substrate by metal organic chemical vapor deposition; (c) epitaxially growing an epitaxial active structure on the stopping layer, and the epitaxial active structure including a contact layer contacting with the stopping layer; (d) connecting a surface of the epitaxial active structure that faces away from the stopping layer with a supporting substrate, so as to transfer the epitaxial active structure to the supporting substrate; (e) removing the growth substrate and the stopping layer to expose the contact layer of the epitaxial active structure; (f) patterning the epitaxial active structure to form an isolation section and at least one dicing line by an etching process, the isolation section extending from a top surface to a bottom surface of the epitaxial active structure such that the epitaxial active structure is divided into a first active section and a second active section by the isolation section; (g) coating a photoresist layer on the contact layer of the epitaxial active structure, and patterning the photoresist layer, such that a portion of the contact layer is exposed from the patterned photoresist layer; (h) depositing a metal material on the patterned photoresist layer and the portion of the contact layer, and removing the patterned photoresist layer such that a first portion of the metal material that is deposited on the patterned photoresist layer is removed, and such that a second portion of the metal material, which is formed on the portion of the contact layer, serves as an electrode pad; (i) removing another portion of the contact layer that is exposed from the electrode pad; (j) forming a reflection reducing layer on a surface of the epitaxial active structure that faces in a direction away from the supporting substrate, so as to obtain a solar cell laminate including the supporting substrate, the epitaxial active structure having the isolation section and the at least one dicing line formed in step (f), the reflection reducing layer, and the electrode pad; and (k) dicing the solar cell laminate along the dicing line that is formed on the epitaxial active structure to obtain the solar cell device, wherein the isolation section extends between the electrode pad and a portion of a periphery of the epitaxial active structure and extends further in a lateral direction to terminate at the portion of the periphery so that the portion of the periphery is divided and isolated from a remaining portion of the periphery and so that said second active action is bounded by said isolation section and said portion of said periphery, a width of said second active action in an extension direction of grid lines of the solar cell device being smaller than a width of said electrode pad in said extension direction, a length of said second active action in a transverse direction transverse to said extension direction being not larger than a length of said electrode pad in said transverse direction, wherein the second active section is separated from and located adjacent to said electrode pad, closer to the periphery of the epitaxial active structure relative to said electrode pad, and has a block shape when viewed in a direction from said top surface to said bottom surface of said epitaxial active structure; and wherein no block-shaped electrode pad is formed on said second active section. 9 . The method as claimed in claim 8 , wherein in the step (d), the epitaxial active structure and the supporting substrate are connected by at least one of an adhesive process and a bonding process. 10 . The method as claimed in claim 8 , wherein in the step (f), the etching process is selected from the group consisting of dry etching, wet etching, and a combination thereof. 11 . The solar cell device as claimed in claim 1 , wherein said second active section is partially surrounded by said isolation section. 12 . The solar cell device as claimed in claim 11 , wherein said isolation section is partially surrounded by said first active section. 13 . The solar cell device as claimed in claim 1 , wherein said isolation section is partially surrounded by said first active section. 14 . The solar cell device as claimed in claim 1 , wherein said second active section extends along only a part of said periphery of said solar cell device. 15 . The method as claimed in cl
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