Active cooling of quartz enveloped heaters in vacuum

Patent metadata

Field	Value
Publication number	US-12464605-B2
Application number	US-202217583755-A
Country	US
Kind code	B2
Filing date	Jan 25, 2022
Priority date	Jan 25, 2022
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

A heater assembly that that is effective at maintaining heating lamps at acceptable temperatures is disclosed. The heater assembly utilizes radiative heat transfer to transfer unwanted heat buildup in the heating lamps to a cooling base. One or more high emissivity films are disposed between the heating lamps and the cooling base to facilitate heat transfer. Further, a reflective coating is applied to a portion of the heating lamps to reflect heat away from the cooling base. The heater assembly may be utilized in a high vacuum environment as it does not rely on convective cooling.

First claim

What is claimed is:

1 . A heater assembly, comprising:
one or more heating lamps, each having a filament encased in a tube; a cooling base, having one or more troughs; wherein each of the one or more heating lamps is disposed in a respective one of the one or more troughs, wherein a region where the heating lamp directly contacts the respective trough is referred to as a contact area; a reflective coating applied to the tube so as to reflect heat away from the contact area and toward a target to be heated; and a high emissivity film disposed between and in direct contact with the one or more heating lamps and the respective troughs in the contact area so as to enhance radiative heat transfer, wherein the high emissivity film is applied to the cooling base in the one or more troughs, such that the reflective coating is disposed between the filament and the high emissivity film.

2 . The heater assembly of claim 1 , wherein the reflective coating is applied to an interior surface of the tube, and a second high emissivity film is applied to an outer surface of the tube.

3 . The heater assembly of claim 1 , wherein the reflective coating is applied to an outer surface of the tube, and a second high emissivity film is applied on the reflective coating.

4 . The heater assembly of claim 1 , wherein the cooling base comprises a coolant inlet and a coolant outlet to allow a flow of coolant through the cooling base.

5 . The heater assembly of claim 1 , wherein the cooling base comprises an upper lamp housing having a bottom surface attached to a lower cooling base, wherein the troughs are disposed in a top surface of the upper lamp housing.

6 . The heater assembly of claim 1 , wherein the one or more heating lamps are bonded to the cooling base.

7 . The heater assembly of claim 6 , wherein the cooling base is made of quartz.

8 . The heater assembly of claim 1 , wherein 50% or less of an outer surface of the tube contacts the respective trough.

9 . The heater assembly of claim 1 , wherein the high emissivity film has an emissivity of at least 0.90.

10 . An ion implantation system, comprising the heater assembly of claim 1 , an ion source, a mass analyzer and an end station, wherein the heater assembly and a workpiece are disposed in the end station.

Assignees

• Applied Materials Inc

Inventors

• Moore Dursun
• Blake Julian G
• Bailey Hillman
• Strassner James D
• Forderhase Paul

Classifications

• H01J37/3171

  for ion implantation · CPC title

• H01J2237/31701

  Ion implantation · CPC title

• H01J2237/002

  Cooling arrangements · CPC title

• H05B3/44

  heating conductor arranged within rods or tubes of insulating material · CPC title

• H01J2237/2001

  Maintaining constant desired temperature · CPC title