Hash overhead hoist transport rail system and methods of operating the same

Patent metadata

Field	Value
Publication number	US-12463072-B2
Application number	US-202217586448-A
Country	US
Kind code	B2
Filing date	Jan 27, 2022
Priority date	Jun 17, 2021
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

First claim

What is claimed is:

1 . An automated material handling system (AMHS) for a semiconductor fabrication facility (FAB), comprising:
a network of rails; a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails; a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table; and a hash rail connected to and overlapping the turn table, wherein the hash rail is configured to rotate about the axis with the turn table, wherein the hash rail includes a first portion and a second portion each having a pi shape (π).

2 . The AMHS of claim 1 , further comprising:
a first power supply connected to the network of rails; and a second power supply connected to the hash rail, wherein the first power supply and second power supply are electrically disconnected from each other.

3 . The AMHS of claim 1 , wherein each of the first and second portions of the hash rail includes a first curved portion, a second curved portion, and a straight portion connected to ends of the first and second curved portions.

4 . The AMHS of claim 1 , further comprising a plurality of sensors disposed along at least a portion of the hash rail, wherein the plurality of sensors is configured to sense an alignment of the turn table.

5 . The AMHS of claim 1 , wherein the network of rails includes:
a plurality of first rails extending a first direction; and a plurality of second rails extending a second direction substantially perpendicular to the first direction, wherein the hash rail is disposed between the plurality of first rails and the plurality of second rails.

6 . The AMHS of claim 5 , wherein the network of rails includes a first inner loop rail disposed between two adjacent first rails of the plurality of first rails, and a second inner loop rail disposed between two adjacent second rails of the plurality of second rails.

7 . The AMHS of claim 5 , wherein the first rails includes first, second, third, and fourth portions disposed parallel to one another, wherein the vehicle is configured to move along the first and second portions in the first direction, and the vehicle is configured to move along the third and fourth portions in a third direction opposite the first direction,
wherein the first and second portions are connected to each other through a first diagonal portion, and the third and fourth portions are connected to each other through a second diagonal portion.

8 . The AMHS of claim 1 , wherein the sample carrier is configured to store one or more wafers having a about 300 mm, about 390 mm, about 400 mm, or about 500 mm radius.

9 . A method of operating an automated material handling system (AMHS), comprising:
moving a vehicle along a first fixed rail toward a first hash rail fixed to a first turn table, the vehicle configured to hold a sample carrier that stores one or more samples; rotating the first hash rail about an axis extending substantially perpendicular to a surface of the first turn table; and moving the vehicle through the first hash rail from a first end of the first hash rail towards a second end of the first hash rail, the first and second ends of the first hash rail being opposite each another, wherein the first hash rail includes a first portion and a second portion each having a pi shape (π) that assists the vehicle in changing directions.

10 . The method of claim 9 , further comprising:
after moving the vehicle through the first hash rail, moving the vehicle from the second end of the first hash rail to a second fixed rail extending in a first direction; moving the vehicle to a second hash rail fixed to a second turn table; and moving the vehicle through the second hash rail to a third fixed rail extending in a second direction different than the first direction.

11 . The method of claim 9 , wherein the first fixed rail includes first and second portions disposed parallel to one another, and wherein the method further comprises, before the vehicle moves to the first hash rail, moving the vehicle from the first portion of the first fixed rail to the second portion of the first fixed rail.

12 . The method of claim 9 , further comprising:
supplying power to the first turn table and the first hash rail using a first power supply; and supplying power to the first fixed rail using a second power supply, the first and second power supplies being electrically disconnected from each other.

13 . The method of claim 9 , further comprising:
sensing, with one or more sensors disposed along at least apportion of the first hash rail, an alignment of the first turn table with respect to the first fixed rail.

14 . The method of claim 13 , further comprising controlling the turn table and the hash rail using artificial intelligence (AI) based on the sensed alignment.

15 . The method of claim 14 , further comprising:
controlling the first turn table, based on the AI, to rotate the first turn table.

16 . The method of claim 9 , wherein each of the first and second portions of the hash rail includes a first curved portion, a second curved portion, and a straight portion connected to ends of the first and second curved portions.

17 . A method of operating an automated material handling system (AMHS), comprising:
moving a vehicle along a first fixed rail toward a first hash rail fixed to a first turn table, the vehicle configured to hold a sample carrier that stores one or more samples; rotating the first hash rail about an axis extending substantially perpendicular to a surface of the first turn table; moving the vehicle along a curved portion of the hash rail; and moving the vehicle along a second fixed rail that extends in a second direction different than the first fixed rail, wherein the first hash rail includes a first portion and a second portion each having a pi shape (π) that assists the vehicle in changing directions, and wherein the curved portion is part of the pi shape (π).

18 . The method of claim 17 , further comprising:
supplying power to the first turn table and the first hash rail using a first power supply; and supplying power to the first fixed rail using a second power supply, the first and second power supplies being electrically disconnected from each other.

19 . The method of claim 17 , further comprising:
sensing, with one or more sensors disposed along at least apportion of the first hash rail, an alignment of the first turn table with respect to the first and second fixed rails; and controlling the turn table and the hash rail using artificial intelligence (AI) based on the sensed alignment.

20 . The method of claim 17 , wherein the sample carrier is configured to store one or more wafers having a radius of about 300 mm, about 390 mm, about 400 mm, or about 500 mm.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Li Guancyun
• Chang Ching-Jung
• Tung Chi-Feng
• Shen Hsiang Yin

Classifications

• H10P72/3216

  using a general scheme of a conveying path within a factory · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3214

  by means of a cart or a vehicle · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title