Particle detector for detecting charged particles

Patent metadata

Field	Value
Publication number	US-12461008-B2
Application number	US-202117906128-A
Country	US
Kind code	B2
Filing date	Mar 8, 2021
Priority date	Mar 13, 2020
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

The invention relates to a particle detector, comprising: a measuring electrode for measuring charged particles, a detection device for detecting the charged particles measured by the measuring electrode, and an evaluation device for determining the number of charged particles detected by the detection device. The detection device has a charge amplifier for converting a charge signal generated by the charged particles into a voltage signal and an amplifier device for amplifying the voltage signal.

First claim

The invention claimed is:

1 . A particle detector comprising:
a measuring electrode for measuring charged particles, a detection device for detecting the charged particles measured by the measuring electrode, and an evaluation device for determining the number of charged particles detected by the detection device, characterized in that the detection device has a charge amplifier for converting a charge signal generated on the measuring electrode by the charged particles into a voltage signal and an amplifier device for amplifying the voltage signal to form an amplified voltage signal; wherein the evaluation device is designed to evaluate the amplified voltage signal in order to determine the number of charged particles detected by determining a voltage difference between a first voltage of the amplified voltage signal before a collision time of the charged particles at the measuring electrode and a second voltage of the amplified voltage signal after the collision time.

2 . The particle detector according to claim 1 , wherein the evaluation device is designed to filter the amplified voltage signal in order to increase the signal-to-noise ratio.

3 . The particle detector according to claim 1 , wherein the evaluation device is designed to determine the amplified voltage signal after the collision time at a sampling time in order to determine the voltage difference, for which the following applies: 3/f 0 <t s,i <4.5/f 0 , wherein f 0 denotes a resonance frequency of the charge amplifier.

4 . The particle detector according to claim 1 , wherein the charge amplifier is a low-noise charge amplifier which has a signal-to-noise ratio greater than 10 dB in a predetermined frequency interval.

5 . The particle detector according to claim 1 , wherein the charge amplifier has a phase margin of at least 45°, preferably of at least 60°.

6 . The particle detector according to claim 1 , wherein the amplifier device has an amplification factor which is adjustable by means of the evaluation device as a function of the voltage signal.

7 . The particle detector according to claim 6 , wherein the amplification factor is adjustable over at least four decades, preferably over at least five decades.

8 . The particle detector according to claim 1 , wherein the measuring electrode is designed as a Faraday cup.

9 . The particle detector according to claim 1 , further comprising: an extraction device for extracting the charged particles.

10 . The particle detector according to claim 9 , further comprising: a particle guide device for guiding the charged particles from the extraction device to the measuring electrode.

11 . The particle detector according to claim 9 , wherein the extraction device and/or the particle guide device are designed to filter the charged particles.

12 . A particle detector comprising:
a measuring electrode for measuring charged particles, a detection device comprising:
a charge amplifier configured to convert a charge signal on the measuring electrode into a voltage signal;
an amplifier for amplifying the voltage signal to form an amplified voltage signal; and
an evaluation device configured to evaluate the amplified voltage signal around a collision time of the charged particles at the measuring electrode in order to determine the number of charged particles detected by the detection device by determining a voltage difference between a first voltage of the amplified voltage signal before a collision time of the charged particles at the measuring electrode and a second voltage of the amplified voltage signal after the collision time.

Assignees

• Leybold Gmbh

Inventors

• Aliman Michel
• Laue Alexander

Classifications

• G01N2015/1024

  Counting particles by non-optical means · CPC title

• H01J49/025 Primary

  Detectors specially adapted to particle spectrometers (data acquisition H01J49/0036; detectors per se G01T, e.g. G01T1/28, G01T1/29) · CPC title

• H01J49/0036

  Step by step routines describing the handling of the data generated during a measurement · CPC title

• G01N2015/0046

  in gas, e.g. smoke · CPC title

• G01N15/0656 Primary

  using electric, e.g. electrostatic methods or magnetic methods (by investigating individual particles G01N15/1031, G01N15/12) · CPC title