Measurement system and checking method

Patent metadata

Field	Value
Publication number	US-12460914-B2
Application number	US-202318336468-A
Country	US
Kind code	B2
Filing date	Jun 16, 2023
Priority date	Jul 13, 2022
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

In a measurement system, a processor sets, on the basis of three-dimensional data, a movement route to be taken by a hand part to cause a contact to follow the surface of an object to be measured in such a manner that a reaction force detected by a force sensor becomes a predetermined value. The processor causes the contact to follow the surface of the object to be measured while adjusting the reaction force to become a predetermined value, and acquires a path taken by the hand part having moved. The processor acquires the roughness of the surface of the object to be measured from the contact during a period in which the contact is caused to follow the surface. The processor measures the dimension of the object to be measured on the basis of the path and at least one of the movement route and the three-dimensional data.

First claim

The invention claimed is:

1 . A measurement system comprising:
a contact configured to detect roughness of a surface of an object to be measured; a hand part to which the contact is attached; a robot arm supporting the hand part so as to allow a position and posture of the hand part to be changed; a force sensor configured to, when the contact is pressed against the surface of the object to be measured, detect a reaction force from the surface of the object to be measured to the contact; and a control device including a storage section storing three-dimensional data on a three-dimensional shape of the object to be measured and one or more processors, the one or more processors carrying out: a route setting process of, on a basis of the three-dimensional data, setting a movement route to be taken by the hand part to cause the contact to follow the surface of the object to be measured in such a manner that the reaction force detected by the force sensor becomes a predetermined value; a first acquisition process of actually causing the contact to follow the surface of the object to be measured while adjusting the reaction force detected by the force sensor to become the predetermined value, and acquiring a path taken by the hand part which has actually moved; a second acquisition process of acquiring the roughness of the surface of the object to be measured from the contact during a period in which the contact is actually caused to follow the surface of the object to be measured in the first acquisition process; and a dimension measurement process of measuring a dimension of the object to be measured on a basis of the path and at least one selected from the group consisting of the movement route and the three-dimensional data.

2 . The measurement system according to claim 1 , wherein
the force sensor is capable of detecting the reaction force for each of respective magnitudes of force exerted in directions if three axes orthogonal to each other and respective magnitudes of moment about the three axes, and in the first acquisition process, while causing the contact to follow the surface of the object to be measured, the one or more processors: adjust the posture of the hand part so that a normal direction of the surface of the object to be measured becomes parallel to a direction of one axis among the three axes; adjust the position of the hand part so that a magnitude of reaction force exerted in the direction of one axis and magnitude of moment about the one axis each become the predetermined value; and acquire the path taken by the hand part which has actually moved.

3 . The measurement system according to claim 1 , wherein
the contact includes: a detection section configured to detect the roughness of the surface of the object to be measured; and a housing section configured to, while the contact is not pressed against the surface of the object to be measured, cause at least part of the detection section to protrude outside the housing section and, while the contact is pressed against the surface of the object to be measured, cause the detection section to be held in the housing section, and when the contact is pressed against the surface of the object to be measured, the force sensor detects the reaction force from the surface of the object to be measured to the housing section.

4 . The measurement system according to claim 1 , wherein, in the dimension measurement process, the dimension of the object to be measured is measured on the basis of an amount of deviation between the movement route and the path and the three-dimensional data.

5 . The measurement system according to claim 1 , wherein
the three-dimensional data further includes information on the roughness of the surface of the object to be measured, and the one or more processors further carry out: a first checking process of checking whether a difference between the roughness of the surface of the object to be measured that has been acquired in the second acquisition process during the acquiring of the path in the first acquisition process and the roughness of the surface of the object to be measured based on the three-dimensional data is within a predetermined range; and a second checking process of checking whether a difference between the dimension of the object to be measured that has been subjected to the measurement in the dimension measurement process and a dimension based on the three-dimensional data is within a predetermined range.

6 . The measurement system according to claim 1 , wherein the object to be measured is a target material used in a thin film manufacturing process or a plastic molded product.

Assignees

• Sintokogio Ltd

Inventors

• Tanaami Yoshikane
• Hayashi Miyuki

Classifications

• B25J19/02

  Sensing devices · CPC title

• G01B5/0004

  Supports (G01B5/025 takes precedence) · CPC title

• B25J13/085

  Force or torque sensors (B25J13/082, B25J13/084 take precedence) · CPC title

• B25J11/00

  Manipulators not otherwise provided for · CPC title

• B25J9/161

  Hardware, e.g. neural networks, fuzzy logic, interfaces, processor · CPC title