Torsion pump and apparatus for supplying chemical liquid

Patent metadata

Field	Value
Publication number	US-12460627-B2
Application number	US-202218068023-A
Country	US
Kind code	B2
Filing date	Dec 19, 2022
Priority date	Dec 21, 2021
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

The present invention provides a pump for supplying a liquid. The pump comprises: a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and a driver configured to provide a rotational force such that the hose is wound around the drum.

First claim

What is claimed is:

1 . A torsion pump, comprising:
a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet forming an open path from the chemical liquid inlet to the chemical liquid outlet through the hose, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and a driver configured to provide a rotational force such that the hose is wound around the drums, wherein the tube member includes
a first flange configured to support one end of the drum; and
a second flange configured to support another end of the drum,
wherein one end of the hose is connected to the first flange, and another end of the hose is connected to the second flange, wherein the second flange is connected to the driver and rotated, wherein the driver further includes a compensation member configured to compensate for a vertical length deformation caused by a twisting operation of the tube member, wherein the compensation member includes a bell screw, and wherein the second flange can rotate and move up and down on the ball screw.

2 . The torsion pump of claim 1 , wherein
the first flange is provided with the chemical liquid inlet, and a first inner flow path connecting the chemical liquid inlet and the one end of the hose, and the second flange is provided with the chemical liquid outlet and a second inner flow path connecting the chemical liquid outlet and the another end of the hose.

3 . The torsion pump of claim 2 , wherein the tube member is provided with a plurality of hoses, and the hoses are wound in the same direction, and
the hoses are provided with a chemical liquid from different chemical liquid sources and are combined into one hose before discharging the chemical liquid to the chemical liquid outlet.

4 . The torsion pump of claim 1 , wherein the hose is provided while being wound around the drum in a coil shape.

5 . The torsion pump of claim 1 , wherein the hose is wound around the drum in a coil shape by a winding operation of the driver.

6 . The torsion pump of claim 1 , further comprising a sealing case provided between the first flange and the second flange such that the drum and the hose are blocked from an external environment.

7 . The torsion pump of claim 6 , wherein an interior of the sealing case is filled with incompressible fluid, and the sealing case is provided in the form of bellows.

8 . The torsion pump of claim 1 , wherein the drum is made of a flexible material, and
the drum provides an inner space connecting the chemical liquid inlet and the chemical liquid outlet, and is twisted by a rotation of a second flange, wherein the chemical liquid can be discharged through a volume change due to the twisting.

9 . An apparatus for supplying a chemical liquid, the apparatus comprising:
a pump configured to supply the chemical liquid to a nozzle that discharges the chemical liquid to a substrate; a trap tank in which the chemical liquid to be supplied from the pump to the nozzle is temporarily stored; a bottle containing the chemical liquid stored in the trap tank; a filter provided on a path through which the chemical liquid is supplied from the trap tank to the pump; wherein the pump includes
a tube member having at least one hose communicating with a chemical liquid inlet and a chemical liquid outlet forming an open path from the chemical liquid inlet to the chemical liquid outlet through the at least one hose, and a cylindrical drum provided to wind the at least one hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the at least one hose wound around the drum; and
a driver configured to provide a rotational force such that the at least one hose is wound around the drum,
wherein the tube member includes
a first flange configured to support one end of the drum; and
a second flange configured to support another end of the drum,

wherein one end of each of the at least one hose is connected to the first flange, and another end of each of the at least one hose is connected to the second flange,
wherein the second flange is connected to the driver and rotated,
wherein the driver further includes a compensation member configured to compensate for a vertical length deformation caused by a twisting operation of the tube member,
wherein the compensation member includes a ball screw, and
wherein the second flange can rotate and move up and down on the ball screw.

10 . The apparatus for supplying the chemical liquid of claim 9 , wherein the first flange is provided with the chemical liquid inlet, and a first inner flow path connecting the chemical liquid inlet and the one end of each of the at least one hose, and
the second flange is provided with the chemical liquid outlet and a second inner flow path connecting the chemical liquid outlet and the another end of each of the at least one hose.

11 . The apparatus for supplying the chemical liquid of claim 9 , wherein the at least one hose is provided while being wound around the drum in a coil shape, or is provided to be wound around the drum in a coil shape by a winding operation of the driver.

12 . The apparatus for supplying the chemical liquid of claim 9 , further comprising a sealing case provided between the first flange and the second flange such that the drum and the at least one hose are blocked from an external environment.

13 . The apparatus for supplying the chemical liquid of claim 12 , wherein an interior of the sealing case is filled with incompressible fluid, and the sealing case is provided in the form of bellows.

14 . The apparatus for supplying the chemical liquid of claim 9 , wherein the drum is made of a flexible material, and
the drum provides an inner space connecting the chemical liquid inlet and the chemical liquid outlet, and is twisted by a rotation of a second flange, wherein the chemical liquid can be discharged through a volume change due to the twisting.

15 . A torsion pump, comprising:
a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet forming an open path from the chemical liquid inlet to the chemical liquid outlet through the hose, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and a driver configured to provide a rotational force such that the hose is wound around the drum, wherein the tube member includes a first flange configured to support one end of the drum; and a second flange configured to support another end of the drum and connected to the driver and then rotated, and the torsion pump further comprises a sealing case provided between the first flange and the second flange such that the drum and the hose are blocked from an external environment, wherein one end of the hose is connected to the first flange, and another end of the hose is connected to the second flange, the first flange is provided with the chemical liquid inlet, and a first inner flow path connecting the chemical liquid inlet and the one end of the hose, and the second flange is provided with the chemical liquid outlet, and a second inner flow path connecting the chemical liquid outlet and the another end of the hose, wherein the driver further includes a compensation member configured to compensate for a vertical length deformation caused by a twisting operation of the tube member, wherein the co

Assignees

• Semes Co Ltd

Inventors

• Son Young Jun

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• F04B23/02

  having reservoirs · CPC title

• F04B53/20

  Filtering · CPC title

• F04B17/03

  driven by electric motors · CPC title

• F04B43/09

  Pumps having electric drive · CPC title