Method and apparatus for sputter deposition of target material to a substrate

Patent metadata

Field	Value
Publication number	US-12460300-B2
Application number	US-202017776590-A
Country	US
Kind code	B2
Filing date	Nov 10, 2020
Priority date	Nov 15, 2019
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

Apparatus for sputter deposition of target material to a substrate is disclosed. In one form, the apparatus includes a substrate guide arranged to guide a substrate along a curved path and a target portion spaced from the substrate guide and arranged to support target material. The target portion and the substrate guide define between them a deposition zone. The apparatus includes a confining arrangement including one or more magnetic elements arranged to provide a confining magnetic field to confine plasma in the deposition zone thereby to provide for sputter deposition of target material to the web of substrate in use. The confining magnetic field includes magnetic field lines arranged to, at least in the deposition zone, substantially follow a curve of the curved path so as to confine said plasma around said curve of the curved path.

First claim

The invention claimed is:

1 . An apparatus for sputter deposition of target material to a substrate, the apparatus comprising:
a substrate guide arranged to guide a substrate along a curved path, wherein the substrate is in a form of a web; a target portion spaced from the substrate guide and arranged to support target material, the target portion and the substrate guide defining between them a deposition zone; and a confining arrangement comprising one or more magnetic elements arranged to provide a confining magnetic field to confine plasma in the deposition zone thereby to provide for sputter deposition of target material to the web of substrate in use, the confining magnetic field including magnetic field lines arranged to, at least in the deposition zone, substantially follow a curve of the curved path so as to confine said plasma around said curve of the curved path, wherein each of the one or more magnetic elements is in a form of a solenoid, the solenoid being elongate in a direction substantially perpendicular to a direction of the magnetic field lines of the confining magnetic field in use.

2 . The apparatus according to claim 1 , wherein the one or more magnetic elements are arranged to provide the confining magnetic field so as to confine plasma in the form of a curved sheet.

3 . The apparatus according to claim 1 , wherein the one or more magnetic elements are arranged to provide the confining magnetic field so as to confine plasma in the form of a curved sheet having, at least in the deposition zone, a substantially uniform density.

4 . The apparatus according to claim 1 , wherein one or more of the magnetic elements is an electromagnet.

5 . The apparatus according to claim 4 , wherein the apparatus comprises a controller arranged to control the magnetic field provided by one or more of the electromagnets.

6 . The apparatus according to claim 1 , wherein the confining arrangement comprises at least two of the magnetic elements arranged to provide the confining magnetic field.

7 . The apparatus according to claim 6 , wherein the at least two magnetic elements are arranged such that a region of relatively high magnetic field strength provided between the magnetic elements substantially follows the curve of the curved path.

8 . The apparatus according to claim 1 , wherein the magnetic field lines are each curved so as to, at least in the deposition zone, substantially follow the curve of the curved path.

9 . The apparatus according to claim 8 , wherein each solenoid has an opening via which plasma is confined in use, the opening being elongate in a direction substantially parallel to a longitudinal axis of the substrate guide.

10 . The apparatus according to claim 8 , the apparatus further comprising a plasma generation arrangement arranged to generate plasma, wherein the plasma generation arrangement comprises one or more elongate antennae that extend in a direction substantially parallel to a longitudinal axis of the substrate guide.

11 . The apparatus according to claim 1 , wherein the magnetic field lines are arranged such that an imaginary line, extending perpendicularly to each magnetic field line and connecting the magnetic field lines, is curved so as to, at least in the deposition zone, substantially follow the curve of the curved path.

12 . The apparatus according to claim 11 , wherein each solenoid has an opening through which plasma is confined in use, the opening being curved and elongate in a direction substantially perpendicular to a longitudinal axis of the substrate guide.

13 . The apparatus according to claim 11 , the apparatus further comprising a plasma generation arrangement arranged to generate plasma, wherein the plasma generation arrangement comprises one or more elongate antennae that are curved and extend in a direction substantially perpendicular to a longitudinal axis of the substrate guide.

14 . The apparatus according to claim 1 , wherein the target portion is arranged, or is configurable to be arranged, such that at least one part of the target portion defines a supporting surface forming an obtuse angle with respect to a supporting surface of another part of the target portion.

15 . The apparatus according to claim 1 , wherein the target portion is substantially curved.

16 . The apparatus according to claim 1 , wherein the target portion is arranged to substantially follow or approximate the curve of the curved path.

17 . The apparatus according to claim 1 , wherein the substrate guide is provided by a curved member that guides a web of substrate along the curved path.

18 . A method of sputter deposition of target material to substrate using the apparatus of claim 1 , the substrate being guided by a substrate guide along a curved path, wherein a deposition zone is defined between the substrate guide and a target portion supporting target material, the method comprising:
providing a magnetic field to confine plasma in the deposition zone thereby to cause sputter deposition of target material to the web of substrate, the magnetic field including magnetic field lines arranged to, at least in the deposition zone, substantially follow a curve of the curved path so as to confine said plasma around the curved path.

Assignees

• Dyson Technology Ltd

Inventors

• Rendall Michael Edward
• Gruar Robert Ian Joseph

Classifications

• H01J37/3277

  of continuous material · CPC title

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title

• C23C16/45536

  Use of plasma, radiation or electromagnetic fields · CPC title

• H01J37/3211

  Antennas, e.g. particular shapes of coils · CPC title

• H01J37/3458

  Electromagnets in particular for cathodic sputtering apparatus (electromagnets in general H01F7/06) · CPC title