Amplitude and biphase control of MEMS scanning device

Patent metadata

Field	Value
Publication number	US-12457309-B2
Application number	US-202318218940-A
Country	US
Kind code	B2
Filing date	Jul 6, 2023
Priority date	Jun 15, 2020
Publication date	Oct 28, 2025
Grant date	Oct 28, 2025

Abstract

A MEMS scanning device (“Device”) includes at least (1) laser projector(s) controlled by a laser drive to project a laser beam, (2) MEMS scanning mirror(s) controlled by a MEMS drive to scan the laser beam to generate a raster scan, (3) a display configured to receive the raster scan, (4) a thermometer configured to detect a current temperature, (5) a display observing camera configured to capture an image of a predetermined area of the display, and (6) a computer-readable media that stores temperature model(s), each of which is custom-built using machine learning. The device uses the display observing camera to capture image(s) of predetermined pattern(s), which are then used to extract feature(s). The extracted feature(s) are compared with ideal feature(s) to identify a discrepancy. When the identified discrepancy is greater than a threshold, the temperature model(s) are updated accordingly.

First claim

What is claimed is:

1. A method for building a model that reflects a relationship between a temperature characteristic of a micro-electromechanical system (MEMS) scanning device and an operational characteristic of the MEMS scanning device, said method comprising:
causing one or more laser units and the MEMS scanning device to project a predetermined pattern, wherein the predetermined pattern has multiple lines in a scanning direction of the MEMS scanning device;
while the predetermined pattern is being projected, monitoring a temperature of the MEMS scanning device, such that temperature data is generated;
while the predetermined pattern is being projected, obtaining images of the predetermined pattern, such that image data is generated, wherein:
the image data provides indications of how the predetermined pattern changes over time based on fluctuations in the temperature of the MEMS scanning device,
the indications are reflective of the operational characteristic of the MEMS scanning device,
the operational characteristic is one of an amplitude for at least one MEMS scanning mirror or a phase shift for the at least one MEMS scanning mirror, and
the predetermined pattern is different depending on which one of the amplitude or the phase shift is being monitored; and

feeding the temperature data and the image data into a model that determines a relationship between the temperature of the MEMS scanning device and the operational characteristic of the MEMS scanning device.

2. The method of claim 1 , wherein the scanning direction of the MEMS scanning device is one of a vertical scanning direction or a horizontal scanning direction.

3. The method of claim 1 , wherein the method further includes using the model to cause the MEMS scanning device to adjust a control signal of the MEMS scanning device.

4. The method of claim 1 , wherein the method further includes using the model to cause the MEMS scanning device to adjust a parameter of the MEMS scanning device.

5. The method of claim 1 , wherein a deflection angle of the MEMS scanning device reduces when the temperature increases.

6. The method of claim 1 , wherein the model is a machine learning model.

7. The method of claim 1 , wherein (i) the temperature is monitored and (ii) the images are obtained for a period of time spanning between 20-25 minutes.

8. The method of claim 1 , wherein a thermometer is used to monitor the temperature of the MEMS scanning device, and wherein the thermometer is installed next to one or more mirrors of the MEMS scanning device.

9. The method of claim 1 , wherein a thermometer is used to monitor the temperature of the MEMS scanning device, and wherein the thermometer is installed in a housing where the MEMS scanning device is also installed.

10. The method of claim 1 , wherein the operational characteristic is the amplitude for the at least one MEMS scanning mirror.

11. The method of claim 1 , wherein the operational characteristic is the phase shift for the at least one MEMS scanning mirror.

12. A computer system that builds model that reflects a relationship between a temperature characteristic of a micro-electromechanical system (MEMS) scanning device and an operational characteristic of the MEMS scanning device, said computer system comprising:
one or more processors; and
one or more computer-readable hardware storage devices that store instructions that are executable by the one or more processors to cause the computer system to:
cause one or more laser units and the MEMS scanning device to project a predetermined pattern, wherein the predetermined pattern has multiple lines in a scanning direction of the MEMS scanning device;
while the predetermined pattern is being projected, monitor a temperature of the MEMS scanning device, such that temperature data is generated;
while the predetermined pattern is being projected, obtain images of the predetermined pattern, such that image data is generated, wherein:
the image data provides indications of how the predetermined pattern changes over time based on fluctuations in the temperature of the MEMS scanning device,
the indications are reflective of the operational characteristic of the MEMS scanning device,
the operational characteristic is one of an amplitude for at least one MEMS scanning mirror or a phase shift for the at least one MEMS scanning mirror, and
the predetermined pattern is different depending on which one of the amplitude or the phase shift is being monitored; and

feed the temperature data and the image data into a model that determines a relationship between the temperature of the MEMS scanning device and the operational characteristic of the MEMS scanning device.

13. The computer system of claim 12 , wherein the temperature is monitored and the images are obtained at a predetermined frequency.

14. The computer system of claim 12 , wherein the images are obtained in response to a condition where the temperature has changed a threshold amount.

15. The computer system of claim 12 , wherein the model is subsequently updated.

16. A method for building a model that reflects a relationship between a temperature characteristic of a micro-electromechanical system (MEMS) scanning device and an operational characteristic of the MEMS scanning device, said method comprising:
causing one or more laser units and the MEMS scanning device to project a predetermined pattern, wherein the predetermined pattern has multiple lines in a scanning direction of the MEMS scanning device;
while the predetermined pattern is being projected, monitoring a temperature of the MEMS scanning device, such that temperature data is generated;
while the predetermined pattern is being projected, obtaining images of the predetermined pattern, such that image data is generated, wherein:
the image data provides indications of how the predetermined pattern changes over time based on fluctuations in the temperature of the MEMS scanning device,
the indications are reflective of the operational characteristic of the MEMS scanning device,
the operational characteristic is one or more of an amplitude for at least one MEMS scanning mirror or a phase shift for the at least one MEMS scanning mirror, and
the predetermined pattern is different depending on which one of the amplitude or the phase shift is being monitored; and

feeding the temperature data and the image data into a model that determines a relationship between the temperature of the MEMS scanning device and the operational characteristic of the MEMS scanning device, wherein the model is a machine learning model.

17. The method of claim 16 , wherein a machine learning model is subsequently updated.

18. The method of claim 16 , wherein the method further includes using the model to cause the MEMS scanning device to adjust one or more of a control signal or a parameter of the MEMS scanning device.

19. The method of claim 16 , wherein a deflection angle of the MEMS scanning device reduces when the temperature increases.

20. The method of claim 16 , wherein the images are obtained for a period of time spanning between 20-25 minutes.

Assignees

• Microsoft Technology Licensing Llc

Inventors

• Samples Michael Edward
• Smirnov Mikhail
• Houben Jozef Barnabas
• Domjan Damon Marlow
• Miller Joshua Owen

Classifications

• G06F18/253

  of extracted features · CPC title

• H04N9/3194 Primary

  including sensor feedback · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/0858

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• G01K13/08

  in rotary movement · CPC title